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公开(公告)号：CN105980087A
公开(公告)日：2016-09-28
申请号：CN201480074919.3
申请日：2014-02-04
申请人： 千住金属工业株式会社
CPC分类号： B23K35/0244 , B22F1/0003 , B22F1/0048 , B22F1/025 , B22F9/08 , B22F9/082 , B22F9/14 , B22F2009/0848 , B22F2301/10 , B22F2301/15 , B22F2998/10 , B22F2999/00 , B23K1/0016 , B23K1/008 , B23K3/0623 , B23K35/302 , B23K35/3033 , B23K2101/42 , C22C9/00 , C22C19/03 , C22F1/08 , C22F1/10 , H01L23/49816 , H01L23/556 , H01L24/11 , H01L24/13 , H01L24/16 , H01L2224/111 , H01L2224/11334 , H01L2224/13014 , H01L2224/13016 , H01L2224/13105 , H01L2224/13109 , H01L2224/13117 , H01L2224/13118 , H01L2224/1312 , H01L2224/13123 , H01L2224/13124 , H01L2224/13138 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13163 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13172 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13179 , H01L2224/1318 , H01L2224/13181 , H01L2224/13183 , H01L2224/13184 , H01L2224/132 , H01L2224/13211 , H01L2224/13294 , H01L2224/133 , H01L2224/13305 , H01L2224/13309 , H01L2224/13317 , H01L2224/13318 , H01L2224/1332 , H01L2224/13323 , H01L2224/13324 , H01L2224/13338 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13349 , H01L2224/13355 , H01L2224/13357 , H01L2224/1336 , H01L2224/13363 , H01L2224/13364 , H01L2224/13366 , H01L2224/13369 , H01L2224/1337 , H01L2224/13371 , H01L2224/13372 , H01L2224/13373 , H01L2224/13376 , H01L2224/13378 , H01L2224/13379 , H01L2224/1338 , H01L2224/13381 , H01L2224/13383 , H01L2224/13384 , H01L2224/1339 , H01L2224/136 , H01L2224/13611 , H01L2224/13655 , H01L2224/13657 , H01L2224/1369 , H01L2224/16145 , H01L2224/16225 , H01L2224/81011 , H01L2924/381 , H01L2924/3841 , H05K3/3436 , H05K3/3463 , H05K2203/041 , B22F2202/13 , H01L2924/00012 , H01L2924/014 , H01L2924/01047 , H01L2924/01029 , H01L2924/01049 , H01L2924/01028 , H01L2924/01027 , H01L2924/01051 , H01L2924/01032 , H01L2924/01015 , H01L2924/01026 , H01L2924/01082 , H01L2924/01079 , H01L2924/01092 , H01L2924/0109 , H01L2924/01033 , H01L2924/00014 , H01L2924/01203 , H01L2924/01204 , H01L2924/0105 , H01L2924/01083 , H01L2924/0103 , H01L2924/01048 , H01L2924/01016 , H01L2924/01013 , H01L2924/01012 , H01L2924/01022 , H01L2924/01025 , H01L2924/0106 , H01L2924/01071 , H01L2924/01069 , H01L2924/01021 , H01L2924/01068 , H01L2924/01059 , H01L2924/01067 , H01L2924/01066 , H01L2924/01065 , H01L2924/01064 , H01L2924/01061 , H01L2924/01057 , H01L2924/0102 , H01L2924/01063 , H01L2924/0107 , H01L2924/01058 , H01L2924/01038 , H01L2924/01056 , H01L2924/01052 , H01L2924/01076 , H01L2924/01072 , H01L2924/01043 , H01L2924/01004
摘要： 制造抑制了所释放的α射线量的金属球。包括如下工序：将纯金属在比作为去除对象的杂质的沸点高、比纯金属的熔点高、且比纯金属的沸点低的温度下进行加热而使纯金属熔融的工序；将熔融的纯金属造球成为球状的工序，其中，该纯金属与在纯金属所含的杂质中作为去除对象的杂质的对应于气压的沸点相比具有更高的沸点，U的含量为5ppb以下，Th的含量为5ppb以下，纯度为99.9％以上且99.995％以下，Pb或Bi中任一者的含量、或者Pb和Bi的总量为1ppm以上。
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公开(公告)号：CN102812543B
公开(公告)日：2016-03-30
申请号：CN201180014602.7
申请日：2011-03-18
申请人： 古河电气工业株式会社
IPC分类号： H01L21/60
CPC分类号： H01L23/4924 , H01L21/4853 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/81 , H01L24/83 , H01L2224/0401 , H01L2224/04026 , H01L2224/05166 , H01L2224/05644 , H01L2224/1132 , H01L2224/1134 , H01L2224/1147 , H01L2224/13082 , H01L2224/13294 , H01L2224/13305 , H01L2224/13309 , H01L2224/13311 , H01L2224/13313 , H01L2224/13316 , H01L2224/13317 , H01L2224/13318 , H01L2224/1332 , H01L2224/13323 , H01L2224/13324 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13349 , H01L2224/13355 , H01L2224/13357 , H01L2224/13364 , H01L2224/13366 , H01L2224/13369 , H01L2224/1601 , H01L2224/16227 , H01L2224/16245 , H01L2224/2732 , H01L2224/2747 , H01L2224/29294 , H01L2224/29305 , H01L2224/29309 , H01L2224/29311 , H01L2224/29313 , H01L2224/29316 , H01L2224/29317 , H01L2224/29318 , H01L2224/2932 , H01L2224/29323 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29349 , H01L2224/29355 , H01L2224/29357 , H01L2224/29364 , H01L2224/29366 , H01L2224/29369 , H01L2224/3201 , H01L2224/32227 , H01L2224/32245 , H01L2224/81075 , H01L2224/81125 , H01L2224/81127 , H01L2224/81191 , H01L2224/81192 , H01L2224/81193 , H01L2224/81203 , H01L2224/81447 , H01L2224/8184 , H01L2224/83075 , H01L2224/83125 , H01L2224/83127 , H01L2224/83191 , H01L2224/83192 , H01L2224/83203 , H01L2224/83447 , H01L2224/8384 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01009 , H01L2924/01012 , H01L2924/01013 , H01L2924/01019 , H01L2924/01021 , H01L2924/01022 , H01L2924/01025 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/01051 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/12042 , H01L2924/15787 , H01L2924/351 , H05K2203/0338 , H01L2924/00 , H01L2924/00012 , H01L2924/00014
摘要： 本发明提供由热循环特性优异的金属多孔质体构成的导电性凸块、导电性芯片焊接部等导电连接部件。所述导电连接部件在半导体元件的电极端子或电路基板的电极端子的接合面形成，其特征在于，该导电连接部件是对包含平均一次粒径为10nm～500nm的金属微粒(P)和有机溶剂(S)或者由有机溶剂(S)与有机粘结剂(R)构成的有机分散介质(D)的导电性糊料进行加热处理而使金属微粒彼此结合所形成的金属多孔质体，该金属多孔质体的空隙率为5体积%～35体积%，构成该金属多孔质体的金属微粒的平均粒径为10nm～500nm的范围，且存在于该金属微粒间的平均空穴直径为1nm～200nm的范围。
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公开(公告)号：CN102124550A
公开(公告)日：2011-07-13
申请号：CN200980130051.3
申请日：2009-07-08
申请人： 株式会社新川 , 国立大学法人东北大学 , 株式会社爱发科
IPC分类号： H01L21/60 , B22F1/02 , H01L25/065 , H01L25/07 , H01L25/18
CPC分类号： B22F1/0062 , B22F2999/00 , H01L21/4867 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/75 , H01L24/81 , H01L25/50 , H01L2224/111 , H01L2224/11318 , H01L2224/1152 , H01L2224/1329 , H01L2224/13324 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13355 , H01L2224/13364 , H01L2224/13369 , H01L2224/13399 , H01L2224/16 , H01L2224/75251 , H01L2224/75252 , H01L2224/75745 , H01L2224/75753 , H01L2224/81097 , H01L2224/81193 , H01L2224/81203 , H01L2224/8184 , H01L2225/06513 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/01057 , H01L2924/01067 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12044 , B22F1/0018 , H01L2924/00014 , H01L2924/00
摘要： 在将由分散剂(102)涂布表面的金属纳米粒子(101)混合到有机溶剂(105)中前或混合后，将氧作为氧纳米气泡(125)或氧气泡(121)注入有机溶剂(105)中，通过加压烧结制造用于接合半导体芯片的电极和线路板的电极以及/或半导体芯片的电极和另一半导体芯片的电极的金属纳米油墨(100)。将该金属纳米油墨(100)的微液滴射出到电极上，在半导体芯片的的电极和线路板的电极上形成凸块，使得半导体芯片反转，对位叠合在线路板上后，对各电极间的凸块加压并加热，加压烧结凸块的金属纳米粒子。由此，抑制加压烧结时产生空隙。
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公开(公告)号：CN100527373C
公开(公告)日：2009-08-12
申请号：CN200610100027.3
申请日：2006-06-28
申请人： 富士通微电子株式会社
发明人： 藤森城次
IPC分类号： H01L21/60 , H01L21/28 , H01L23/485
CPC分类号： H01L24/11 , H01L23/3192 , H01L24/03 , H01L24/05 , H01L24/12 , H01L24/13 , H01L24/742 , H01L2224/0381 , H01L2224/0401 , H01L2224/05073 , H01L2224/05624 , H01L2224/05647 , H01L2224/1131 , H01L2224/11332 , H01L2224/11472 , H01L2224/11515 , H01L2224/13022 , H01L2224/1329 , H01L2224/133 , H01L2224/13309 , H01L2224/13318 , H01L2224/1332 , H01L2224/13344 , H01L2224/13347 , H01L2224/13355 , H01L2224/13364 , H01L2224/13369 , H01L2224/742 , H01L2224/94 , H01L2924/00013 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01018 , H01L2924/01022 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01046 , H01L2924/01049 , H01L2924/01051 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/05042 , H01L2224/11 , H01L2924/00014 , H01L2224/13099 , H01L2224/05099 , H01L2224/13599 , H01L2224/05599 , H01L2224/29099 , H01L2224/29599
摘要： 本发明提供一种成本低、易使用及效率高的制造半导体器件的方法及具有以窄间距排列的微凸点的高性能半导体器件，该制造半导体器件的方法使得在形成凸点时不需要形成或去除阻挡金属。该方法包括如下步骤：在半导体衬底(10)的一个表面上形成多个电极焊盘(12)；形成覆盖在各个电极焊盘(12)的周边的绝缘层，例如无机绝缘层(14)和有机绝缘层(16)；在所述绝缘层(14，16)上有选择地形成掩模层(20)；清洗电极焊盘(12)的没有被所述绝缘层(14，16)覆盖的表面；在由所述绝缘层(14，16)和该掩模层(20)界定的区域中形成外部端子(46)，使其与所述电极焊盘(12)接触；以及去除该掩模层(20)。
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公开(公告)号：CN105980087B
公开(公告)日：2018-05-25
申请号：CN201480074919.3
申请日：2014-02-04
申请人： 千住金属工业株式会社
CPC分类号： B23K35/0244 , B22F1/0003 , B22F1/0048 , B22F1/025 , B22F9/08 , B22F9/082 , B22F9/14 , B22F2009/0848 , B22F2301/10 , B22F2301/15 , B22F2998/10 , B22F2999/00 , B23K1/0016 , B23K1/008 , B23K3/0623 , B23K35/302 , B23K35/3033 , B23K2101/42 , C22C9/00 , C22C19/03 , C22F1/08 , C22F1/10 , H01L23/49816 , H01L23/556 , H01L24/11 , H01L24/13 , H01L24/16 , H01L2224/111 , H01L2224/11334 , H01L2224/13014 , H01L2224/13016 , H01L2224/13105 , H01L2224/13109 , H01L2224/13117 , H01L2224/13118 , H01L2224/1312 , H01L2224/13123 , H01L2224/13124 , H01L2224/13138 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13163 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13172 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13179 , H01L2224/1318 , H01L2224/13181 , H01L2224/13183 , H01L2224/13184 , H01L2224/132 , H01L2224/13211 , H01L2224/13294 , H01L2224/133 , H01L2224/13305 , H01L2224/13309 , H01L2224/13317 , H01L2224/13318 , H01L2224/1332 , H01L2224/13323 , H01L2224/13324 , H01L2224/13338 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13349 , H01L2224/13355 , H01L2224/13357 , H01L2224/1336 , H01L2224/13363 , H01L2224/13364 , H01L2224/13366 , H01L2224/13369 , H01L2224/1337 , H01L2224/13371 , H01L2224/13372 , H01L2224/13373 , H01L2224/13376 , H01L2224/13378 , H01L2224/13379 , H01L2224/1338 , H01L2224/13381 , H01L2224/13383 , H01L2224/13384 , H01L2224/1339 , H01L2224/136 , H01L2224/13611 , H01L2224/13655 , H01L2224/13657 , H01L2224/1369 , H01L2224/16145 , H01L2224/16225 , H01L2224/81011 , H01L2924/381 , H01L2924/3841 , H05K3/3436 , H05K3/3463 , H05K2203/041 , B22F2202/13 , H01L2924/00012 , H01L2924/014 , H01L2924/01047 , H01L2924/01029 , H01L2924/01049 , H01L2924/01028 , H01L2924/01027 , H01L2924/01051 , H01L2924/01032 , H01L2924/01015 , H01L2924/01026 , H01L2924/01082 , H01L2924/01079 , H01L2924/01092 , H01L2924/0109 , H01L2924/01033 , H01L2924/00014 , H01L2924/01203 , H01L2924/01204 , H01L2924/0105 , H01L2924/01083 , H01L2924/0103 , H01L2924/01048 , H01L2924/01016 , H01L2924/01013 , H01L2924/01012 , H01L2924/01022 , H01L2924/01025 , H01L2924/0106 , H01L2924/01071 , H01L2924/01069 , H01L2924/01021 , H01L2924/01068 , H01L2924/01059 , H01L2924/01067 , H01L2924/01066 , H01L2924/01065 , H01L2924/01064 , H01L2924/01061 , H01L2924/01057 , H01L2924/0102 , H01L2924/01063 , H01L2924/0107 , H01L2924/01058 , H01L2924/01038 , H01L2924/01056 , H01L2924/01052 , H01L2924/01076 , H01L2924/01072 , H01L2924/01043 , H01L2924/01004
摘要： 制造抑制了所释放的α射线量的金属球。包括如下工序：将纯金属在比作为去除对象的杂质的沸点高、比纯金属的熔点高、且比纯金属的沸点低的温度下进行加热而使纯金属熔融的工序；将熔融的纯金属造球成为球状的工序，其中，该纯金属与在纯金属所含的杂质中作为去除对象的杂质的对应于气压的沸点相比具有更高的沸点，U的含量为5ppb以下，Th的含量为5ppb以下，纯度为99.9％以上且99.995％以下，Pb或Bi中任一者的含量、或者Pb和Bi的总量为1ppm以上。
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公开(公告)号：CN104205312A
公开(公告)日：2014-12-10
申请号：CN201380017110.2
申请日：2013-03-21
申请人： 田中贵金属工业株式会社
CPC分类号： H01L24/83 , B22F1/0074 , B22F1/025 , B23K1/203 , B23K35/0222 , B23K35/0244 , B23K35/025 , B23K35/226 , B23K35/3006 , B23K35/3013 , B23K35/302 , B23K35/322 , B23K2101/40 , H01B1/22 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/81 , H01L2224/0401 , H01L2224/04026 , H01L2224/05082 , H01L2224/05166 , H01L2224/05169 , H01L2224/05644 , H01L2224/11312 , H01L2224/11318 , H01L2224/1132 , H01L2224/11416 , H01L2224/13294 , H01L2224/13339 , H01L2224/13347 , H01L2224/13364 , H01L2224/13444 , H01L2224/16227 , H01L2224/27312 , H01L2224/27318 , H01L2224/2732 , H01L2224/27416 , H01L2224/29294 , H01L2224/29339 , H01L2224/29347 , H01L2224/29364 , H01L2224/29444 , H01L2224/32225 , H01L2224/81192 , H01L2224/81203 , H01L2224/81444 , H01L2224/8184 , H01L2224/83192 , H01L2224/83203 , H01L2224/83444 , H01L2224/8384 , H01L2924/01029 , H01L2924/01046 , H01L2924/01047 , H01L2924/01079 , H01L2924/01203 , H01L2924/014 , H01L2924/10253 , H01L2924/15747 , H01L2924/351 , H01L2924/00 , H01L2924/00014 , H01L2924/00012
摘要： 本发明为一种导电性糊，其为由金属粉末和有机溶剂构成的芯片接合用导电性糊，其中，所述金属粉末由选自纯度为99.9质量％以上、平均粒径为0.01μm～1.0μm的银粉、钯粉、铜粉中的一种以上的金属粒子和包覆所述金属粒子的至少一部分的由金构成的包覆层构成。根据本发明的导电性糊，在将半导体元件等往衬底上进行芯片接合时，能够抑制在接合部产生空隙等缺陷。
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公开(公告)号：CN102812543A
公开(公告)日：2012-12-05
申请号：CN201180014602.7
申请日：2011-03-18
申请人： 古河电气工业株式会社
IPC分类号： H01L21/60
CPC分类号： H01L23/4924 , H01L21/4853 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/81 , H01L24/83 , H01L2224/0401 , H01L2224/04026 , H01L2224/05166 , H01L2224/05644 , H01L2224/1132 , H01L2224/1134 , H01L2224/1147 , H01L2224/13082 , H01L2224/13294 , H01L2224/13305 , H01L2224/13309 , H01L2224/13311 , H01L2224/13313 , H01L2224/13316 , H01L2224/13317 , H01L2224/13318 , H01L2224/1332 , H01L2224/13323 , H01L2224/13324 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13349 , H01L2224/13355 , H01L2224/13357 , H01L2224/13364 , H01L2224/13366 , H01L2224/13369 , H01L2224/1601 , H01L2224/16227 , H01L2224/16245 , H01L2224/2732 , H01L2224/2747 , H01L2224/29294 , H01L2224/29305 , H01L2224/29309 , H01L2224/29311 , H01L2224/29313 , H01L2224/29316 , H01L2224/29317 , H01L2224/29318 , H01L2224/2932 , H01L2224/29323 , H01L2224/29324 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29349 , H01L2224/29355 , H01L2224/29357 , H01L2224/29364 , H01L2224/29366 , H01L2224/29369 , H01L2224/3201 , H01L2224/32227 , H01L2224/32245 , H01L2224/81075 , H01L2224/81125 , H01L2224/81127 , H01L2224/81191 , H01L2224/81192 , H01L2224/81193 , H01L2224/81203 , H01L2224/81447 , H01L2224/8184 , H01L2224/83075 , H01L2224/83125 , H01L2224/83127 , H01L2224/83191 , H01L2224/83192 , H01L2224/83203 , H01L2224/83447 , H01L2224/8384 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01009 , H01L2924/01012 , H01L2924/01013 , H01L2924/01019 , H01L2924/01021 , H01L2924/01022 , H01L2924/01025 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/01051 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/12042 , H01L2924/15787 , H01L2924/351 , H05K2203/0338 , H01L2924/00 , H01L2924/00012 , H01L2924/00014
摘要： 本发明提供由热循环特性优异的金属多孔质体构成的导电性凸块、导电性芯片焊接部等导电连接部件。所述导电连接部件在半导体元件的电极端子或电路基板的电极端子的接合面形成，其特征在于，该导电连接部件是对包含平均一次粒径为10nm～500nm的金属微粒(P)和有机溶剂(S)或者由有机溶剂(S)与有机粘结剂(R)构成的有机分散介质(D)的导电性糊料进行加热处理而使金属微粒彼此结合所形成的金属多孔质体，该金属多孔质体的空隙率为5体积%～35体积%，构成该金属多孔质体的金属微粒的平均粒径为10nm～500nm的范围，且存在于该金属微粒间的平均空穴直径为1nm～200nm的范围。
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公开(公告)号：CN101026109A
公开(公告)日：2007-08-29
申请号：CN200610100027.3
申请日：2006-06-28
申请人： 富士通株式会社
发明人： 藤森城次
IPC分类号： H01L21/60 , H01L21/28 , H01L23/485
CPC分类号： H01L24/11 , H01L23/3192 , H01L24/03 , H01L24/05 , H01L24/12 , H01L24/13 , H01L24/742 , H01L2224/0381 , H01L2224/0401 , H01L2224/05073 , H01L2224/05624 , H01L2224/05647 , H01L2224/1131 , H01L2224/11332 , H01L2224/11472 , H01L2224/11515 , H01L2224/13022 , H01L2224/1329 , H01L2224/133 , H01L2224/13309 , H01L2224/13318 , H01L2224/1332 , H01L2224/13344 , H01L2224/13347 , H01L2224/13355 , H01L2224/13364 , H01L2224/13369 , H01L2224/742 , H01L2224/94 , H01L2924/00013 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01018 , H01L2924/01022 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/01046 , H01L2924/01049 , H01L2924/01051 , H01L2924/01078 , H01L2924/01079 , H01L2924/014 , H01L2924/05042 , H01L2224/11 , H01L2924/00014 , H01L2224/13099 , H01L2224/05099 , H01L2224/13599 , H01L2224/05599 , H01L2224/29099 , H01L2224/29599
摘要： 本发明提供一种成本低、易使用及效率高的制造半导体器件的方法及具有以窄间距排列的微凸点的高性能半导体器件，该制造半导体器件的方法使得在形成凸点时不需要形成或去除阻挡金属。该方法包括如下步骤：在半导体衬底(10)的一个表面上形成多个电极焊盘(12)；形成覆盖在各个电极焊盘(12)的周边的绝缘层，例如无机绝缘层(14)和有机绝缘层(16)；在所述绝缘层(14，16)上有选择地形成掩模层(20)；清洗电极焊盘(12)的没有被所述绝缘层(14，16)覆盖的表面；在由所述绝缘层(14，16)和该掩模层(20)界定的区域中形成外部端子(46)，使其与所述电极焊盘(12)接触；以及去除该掩模层(20)。
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公开(公告)号：CN104412724A
公开(公告)日：2015-03-11
申请号：CN201380033809.8
申请日：2013-02-21
申请人： 松下知识产权经营株式会社
CPC分类号： H05K1/097 , G02F1/1303 , G06K19/07718 , G06K19/07745 , H01L21/4853 , H01L23/145 , H01L23/4985 , H01L23/49855 , H01L23/49866 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/742 , H01L24/75 , H01L24/81 , H01L24/94 , H01L24/95 , H01L24/97 , H01L25/0652 , H01L2223/6677 , H01L2224/11312 , H01L2224/1132 , H01L2224/13008 , H01L2224/13016 , H01L2224/13019 , H01L2224/13025 , H01L2224/13111 , H01L2224/13144 , H01L2224/13147 , H01L2224/1329 , H01L2224/13301 , H01L2224/13311 , H01L2224/13318 , H01L2224/13324 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13355 , H01L2224/13357 , H01L2224/1336 , H01L2224/13364 , H01L2224/13369 , H01L2224/1339 , H01L2224/1349 , H01L2224/13644 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/16238 , H01L2224/17106 , H01L2224/73204 , H01L2224/7526 , H01L2224/75262 , H01L2224/7565 , H01L2224/75651 , H01L2224/75702 , H01L2224/7598 , H01L2224/81127 , H01L2224/81191 , H01L2224/81193 , H01L2224/81203 , H01L2224/8159 , H01L2224/81601 , H01L2224/81611 , H01L2224/81618 , H01L2224/81624 , H01L2224/81639 , H01L2224/81644 , H01L2224/81647 , H01L2224/81655 , H01L2224/81657 , H01L2224/8166 , H01L2224/81664 , H01L2224/81669 , H01L2224/81815 , H01L2224/8184 , H01L2224/81871 , H01L2224/9202 , H01L2224/94 , H01L2224/95 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2225/06565 , H01L2924/12042 , H01L2924/19105 , H05K1/0274 , H05K1/0313 , H05K1/181 , H05K3/12 , H05K3/321 , H05K2201/0108 , H05K2201/10674 , H01L2924/00015 , H01L2924/00014 , H01L2924/00012 , H01L2924/01048 , H01L2224/81 , H01L2224/11 , H01L2924/00
摘要： 电子部件安装构造体包含基板；形成于基板表面上的、以Cu等高熔点金属为主体的导电性配线图案；将导电性配线图案的端子接合位置内包、搭载于所述基板表面的搭载位置上、具有外部端子的电子部件。外部端子在端子接合位置处以埋入到导电性配线图案的内部的状态与导电性配线图案相连接。因此，与仅在导电性配线图案的表面上将电子部件的外部端子与导电性配线图案连接的接合部相比，可以在强度更高的接合部处将外部端子与导电性配线图案连接。
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公开(公告)号：CN102124550B
公开(公告)日：2013-04-24
申请号：CN200980130051.3
申请日：2009-07-08
申请人： 株式会社新川 , 国立大学法人东北大学 , 株式会社爱发科
IPC分类号： H01L21/60 , B22F1/02 , H01L25/065 , H01L25/07 , H01L25/18
CPC分类号： B22F1/0062 , B22F2999/00 , H01L21/4867 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/75 , H01L24/81 , H01L25/50 , H01L2224/111 , H01L2224/11318 , H01L2224/1152 , H01L2224/1329 , H01L2224/13324 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13355 , H01L2224/13364 , H01L2224/13369 , H01L2224/13399 , H01L2224/16 , H01L2224/75251 , H01L2224/75252 , H01L2224/75745 , H01L2224/75753 , H01L2224/81097 , H01L2224/81193 , H01L2224/81203 , H01L2224/8184 , H01L2225/06513 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/01057 , H01L2924/01067 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12044 , B22F1/0018 , H01L2924/00014 , H01L2924/00
摘要： 在将由分散剂(102)涂布表面的金属纳米粒子(101)混合到有机溶剂(105)中前或混合后，将氧作为氧纳米气泡(125)或氧气泡(121)注入有机溶剂(105)中，通过加压烧结制造用于接合半导体芯片的电极和线路板的电极以及/或半导体芯片的电极和另一半导体芯片的电极的金属纳米油墨(100)。将该金属纳米油墨(100)的微液滴射出到电极上，在半导体芯片的的电极和线路板的电极上形成凸块，使得半导体芯片反转，对位叠合在线路板上后，对各电极间的凸块加压并加热，加压烧结凸块的金属纳米粒子。由此，抑制加压烧结时产生空隙。
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