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公开(公告)号:CN104425389B
公开(公告)日:2017-05-03
申请号:CN201410446263.5
申请日:2014-09-03
申请人: 千住金属工业株式会社
IPC分类号: H01L23/00 , H01L23/498 , H01L21/60 , H01L23/488
CPC分类号: B23K1/203 , B23K1/0016 , B23K1/20 , H01L21/4853 , H01L23/49816 , H01L24/11 , H01L24/13 , H01L2224/03828 , H01L2224/1112 , H01L2224/11334 , H01L2224/11849 , H01L2224/13109 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13117 , H01L2224/13118 , H01L2224/1312 , H01L2224/13123 , H01L2224/13124 , H01L2224/13138 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13179 , H01L2224/1318 , H01L2224/1319 , H01L2224/13582 , H01L2224/136 , H01L2224/13605 , H01L2224/13609 , H01L2224/13611 , H01L2224/13613 , H01L2224/13616 , H01L2224/13617 , H01L2224/13618 , H01L2224/1362 , H01L2224/13624 , H01L2224/13638 , H01L2224/13639 , H01L2224/13647 , H01L2224/13655 , H01L2224/13657 , H01L2224/1366 , H01L2224/13671 , H01L2924/3651 , H01L2924/384 , H05K3/3436 , H05K2201/10234 , H05K2201/10621 , H05K2201/10734 , H05K2203/041 , Y02P70/613 , H01L2924/00014 , H01L2924/014 , H01L2924/01032 , H01L2924/01014 , H01L2924/01057 , H01L2924/01047 , H01L2924/01029 , H01L2924/01015
摘要: 本发明涉及凸块电极、凸块电极基板以及其制造方法,研究焊料镀层的熔融工序,以便在电极焊盘上可以将成为凸块电极的核层的Cu球的中心在其水平截面上再现性良好地配置于所包覆的焊料的外壳的中心。具备接合于电极焊盘(12)上、施加焊料(14)到成为核层的Cu球(13)上的凸块电极(30),在凸块电极(30)涂布助焊剂(16)之后,搭载于电极焊盘(12)上,加热电极焊盘(12)以及Cu核球而将焊料镀层(24)熔融的熔融工序中,将搭载有电极焊盘(12)以及Cu核球的基板(11)的加热率设定为0.01[℃/sec]以上~不足0.3[℃/sec]的范围。
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公开(公告)号:CN107785347A
公开(公告)日:2018-03-09
申请号:CN201710733545.7
申请日:2017-08-24
申请人: 三星显示有限公司
IPC分类号: H01L23/498
CPC分类号: H01L23/49811 , H01L23/3171 , H01L23/3192 , H01L23/53204 , H01L23/53209 , H01L23/562 , H01L24/05 , H01L24/06 , H01L24/13 , H01L24/81 , H01L2224/0401 , H01L2224/05022 , H01L2224/0508 , H01L2224/05567 , H01L2224/0558 , H01L2224/05644 , H01L2224/05666 , H01L2224/13005 , H01L2224/13007 , H01L2224/1301 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/1312 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/13176 , H01L2224/13178 , H01L2224/13179 , H01L2224/1318 , H01L2224/13181 , H01L2224/13184 , H01L2224/13562 , H01L2224/1358 , H01L2224/13582 , H01L2224/13583 , H01L2224/13611 , H01L2224/13613 , H01L2224/13616 , H01L2224/1362 , H01L2224/13624 , H01L2224/13639 , H01L2224/13644 , H01L2224/13647 , H01L2224/13649 , H01L2224/13655 , H01L2224/13657 , H01L2224/1366 , H01L2224/13664 , H01L2224/13666 , H01L2224/13669 , H01L2224/13673 , H01L2224/13676 , H01L2224/13678 , H01L2224/13679 , H01L2224/1368 , H01L2224/13681 , H01L2224/13684 , H01L2224/1369 , H01L2224/16238 , H01L2224/2919 , H01L2224/73204 , H01L2224/81191 , H01L2224/81193 , H01L2924/00014 , H01L2924/013 , H01L2924/0665 , H01L23/49816
摘要: 提供了一种半导体芯片和电子装置。该半导体芯片包括:基底;一个或更多个导电焊盘,设置在基底上;一个或更多个凸起,电连接到一个或更多个导电焊盘,其中,一个或更多个凸起包括:金属芯;聚合物层,设置在金属芯的表面的上方;导电涂层,设置在聚合物层的表面的上方并且电连接到一个或更多个导电焊盘。
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公开(公告)号:CN105980087A
公开(公告)日:2016-09-28
申请号:CN201480074919.3
申请日:2014-02-04
申请人: 千住金属工业株式会社
CPC分类号: B23K35/0244 , B22F1/0003 , B22F1/0048 , B22F1/025 , B22F9/08 , B22F9/082 , B22F9/14 , B22F2009/0848 , B22F2301/10 , B22F2301/15 , B22F2998/10 , B22F2999/00 , B23K1/0016 , B23K1/008 , B23K3/0623 , B23K35/302 , B23K35/3033 , B23K2101/42 , C22C9/00 , C22C19/03 , C22F1/08 , C22F1/10 , H01L23/49816 , H01L23/556 , H01L24/11 , H01L24/13 , H01L24/16 , H01L2224/111 , H01L2224/11334 , H01L2224/13014 , H01L2224/13016 , H01L2224/13105 , H01L2224/13109 , H01L2224/13117 , H01L2224/13118 , H01L2224/1312 , H01L2224/13123 , H01L2224/13124 , H01L2224/13138 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13163 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13172 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13179 , H01L2224/1318 , H01L2224/13181 , H01L2224/13183 , H01L2224/13184 , H01L2224/132 , H01L2224/13211 , H01L2224/13294 , H01L2224/133 , H01L2224/13305 , H01L2224/13309 , H01L2224/13317 , H01L2224/13318 , H01L2224/1332 , H01L2224/13323 , H01L2224/13324 , H01L2224/13338 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13349 , H01L2224/13355 , H01L2224/13357 , H01L2224/1336 , H01L2224/13363 , H01L2224/13364 , H01L2224/13366 , H01L2224/13369 , H01L2224/1337 , H01L2224/13371 , H01L2224/13372 , H01L2224/13373 , H01L2224/13376 , H01L2224/13378 , H01L2224/13379 , H01L2224/1338 , H01L2224/13381 , H01L2224/13383 , H01L2224/13384 , H01L2224/1339 , H01L2224/136 , H01L2224/13611 , H01L2224/13655 , H01L2224/13657 , H01L2224/1369 , H01L2224/16145 , H01L2224/16225 , H01L2224/81011 , H01L2924/381 , H01L2924/3841 , H05K3/3436 , H05K3/3463 , H05K2203/041 , B22F2202/13 , H01L2924/00012 , H01L2924/014 , H01L2924/01047 , H01L2924/01029 , H01L2924/01049 , H01L2924/01028 , H01L2924/01027 , H01L2924/01051 , H01L2924/01032 , H01L2924/01015 , H01L2924/01026 , H01L2924/01082 , H01L2924/01079 , H01L2924/01092 , H01L2924/0109 , H01L2924/01033 , H01L2924/00014 , H01L2924/01203 , H01L2924/01204 , H01L2924/0105 , H01L2924/01083 , H01L2924/0103 , H01L2924/01048 , H01L2924/01016 , H01L2924/01013 , H01L2924/01012 , H01L2924/01022 , H01L2924/01025 , H01L2924/0106 , H01L2924/01071 , H01L2924/01069 , H01L2924/01021 , H01L2924/01068 , H01L2924/01059 , H01L2924/01067 , H01L2924/01066 , H01L2924/01065 , H01L2924/01064 , H01L2924/01061 , H01L2924/01057 , H01L2924/0102 , H01L2924/01063 , H01L2924/0107 , H01L2924/01058 , H01L2924/01038 , H01L2924/01056 , H01L2924/01052 , H01L2924/01076 , H01L2924/01072 , H01L2924/01043 , H01L2924/01004
摘要: 制造抑制了所释放的α射线量的金属球。包括如下工序:将纯金属在比作为去除对象的杂质的沸点高、比纯金属的熔点高、且比纯金属的沸点低的温度下进行加热而使纯金属熔融的工序;将熔融的纯金属造球成为球状的工序,其中,该纯金属与在纯金属所含的杂质中作为去除对象的杂质的对应于气压的沸点相比具有更高的沸点,U的含量为5ppb以下,Th的含量为5ppb以下,纯度为99.9%以上且99.995%以下,Pb或Bi中任一者的含量、或者Pb和Bi的总量为1ppm以上。
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公开(公告)号:CN108172523A
公开(公告)日:2018-06-15
申请号:CN201711286173.4
申请日:2017-12-07
申请人: 千住金属工业株式会社
IPC分类号: H01L21/60
CPC分类号: H01L24/13 , B22F1/0003 , B22F1/025 , B22F2999/00 , B23K1/0016 , B23K35/0227 , B23K35/0244 , B23K35/26 , B23K35/262 , B23K35/264 , B23K2101/40 , C22C5/00 , C22C9/00 , C22C12/00 , C22C13/02 , C25D3/60 , C25D5/10 , C25D5/12 , C25D7/00 , H01L24/11 , H01L2224/11462 , H01L2224/11849 , H01L2224/13109 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13117 , H01L2224/13118 , H01L2224/1312 , H01L2224/13123 , H01L2224/13124 , H01L2224/13138 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13179 , H01L2224/1318 , H01L2224/13561 , H01L2224/13582 , H01L2224/13611 , H01L2224/13613 , H01L2224/13655 , H01L2224/13657 , H01L2924/01014 , H01L2924/01032 , H01L2924/01057 , H01L2924/014 , H01L2924/3841 , H05K3/34 , C22C1/0483 , H01L24/10 , H01L24/12 , H01L24/81 , H01L2224/0401 , H01L2224/05099 , H01L2224/05139 , H01L2224/05147 , H01L2224/05155
摘要: 提供芯材料和半导体封装体和凸块电极的形成方法。该芯材料是将包含Sn和Bi的(Sn‑Bi)系软钎料合金在芯(12)的表面形成镀覆膜而得到的芯材料,其是软钎料镀覆层(16)中的Bi以规定范围的浓度比分布在软钎料镀覆层中的芯材料,是以Bi的浓度比在91.7~106.7%的规定范围内分布于软钎料镀覆层中的芯材料。软钎料镀覆层中的Bi是均匀的。因此,不会发生如下的情况:内周侧比外周侧更早发生熔融,在内周侧与外周侧产生体积膨胀差,使芯材料被弹飞。另外,软钎料镀覆层整体大致均匀地熔融,因此不会发生被认为是因熔融时机参差不齐而发生的芯材料的位置偏移,因此不存在伴随位置偏移等的电极间短路等担心。
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公开(公告)号:CN104303289A
公开(公告)日:2015-01-21
申请号:CN201380002160.3
申请日:2013-05-13
申请人: 新电元工业株式会社
发明人: 池田康亮
CPC分类号: H01L23/3672 , H01L21/4817 , H01L21/50 , H01L21/565 , H01L23/051 , H01L23/055 , H01L23/16 , H01L23/3675 , H01L23/3735 , H01L23/3737 , H01L23/42 , H01L23/48 , H01L23/49827 , H01L23/49838 , H01L23/49844 , H01L23/49866 , H01L23/5385 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/33 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L25/0657 , H01L25/071 , H01L25/165 , H01L25/50 , H01L2224/13016 , H01L2224/13082 , H01L2224/13147 , H01L2224/1318 , H01L2224/13294 , H01L2224/133 , H01L2224/16237 , H01L2224/29294 , H01L2224/293 , H01L2224/32013 , H01L2224/32014 , H01L2224/32225 , H01L2224/32227 , H01L2224/32245 , H01L2224/3303 , H01L2224/33181 , H01L2224/73203 , H01L2224/73253 , H01L2224/73265 , H01L2224/81447 , H01L2224/81815 , H01L2224/83447 , H01L2224/8348 , H01L2224/83815 , H01L2224/9211 , H01L2224/9221 , H01L2224/92247 , H01L2225/06548 , H01L2225/06555 , H01L2225/06572 , H01L2225/06582 , H01L2225/06589 , H01L2924/13055 , H01L2924/13091 , H01L2924/1611 , H01L2924/16152 , H01L2924/16724 , H01L2924/1679 , H01L2924/00 , H01L2924/00014 , H01L2224/81 , H01L2224/83 , H01L2924/00012 , H01L2924/01042 , H01L2924/01074
摘要: 本发明提供一种可小型化的电子模块及其制造方法。本发明涉及的电子模块1包括:电子模块10,具有包含主面11a及主面11b的基板11,并具有安装在主面11a上的电子元件12;电子模块20,具有包含主面21a及主面21b且主面21a被配置为与主面11a相对向的基板21,具有安装在主面11a上且通过连接部件18与电子元件12电连接的电子元件22,并具有安装在主面21b上且通过将基板21向厚度方向贯穿的连接部件19与电子元件电12电连接的电子元件23,并且,电子模块20通过连接部件18、19与电子模块10热连接;以及散热器30,在内部设有收纳部31a,将电子模块10、20收纳在收纳部31a中,从而使得主面11b与收纳部31a的内壁面相接触。
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公开(公告)号:CN105980087B
公开(公告)日:2018-05-25
申请号:CN201480074919.3
申请日:2014-02-04
申请人: 千住金属工业株式会社
CPC分类号: B23K35/0244 , B22F1/0003 , B22F1/0048 , B22F1/025 , B22F9/08 , B22F9/082 , B22F9/14 , B22F2009/0848 , B22F2301/10 , B22F2301/15 , B22F2998/10 , B22F2999/00 , B23K1/0016 , B23K1/008 , B23K3/0623 , B23K35/302 , B23K35/3033 , B23K2101/42 , C22C9/00 , C22C19/03 , C22F1/08 , C22F1/10 , H01L23/49816 , H01L23/556 , H01L24/11 , H01L24/13 , H01L24/16 , H01L2224/111 , H01L2224/11334 , H01L2224/13014 , H01L2224/13016 , H01L2224/13105 , H01L2224/13109 , H01L2224/13117 , H01L2224/13118 , H01L2224/1312 , H01L2224/13123 , H01L2224/13124 , H01L2224/13138 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13163 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13172 , H01L2224/13173 , H01L2224/13176 , H01L2224/13178 , H01L2224/13179 , H01L2224/1318 , H01L2224/13181 , H01L2224/13183 , H01L2224/13184 , H01L2224/132 , H01L2224/13211 , H01L2224/13294 , H01L2224/133 , H01L2224/13305 , H01L2224/13309 , H01L2224/13317 , H01L2224/13318 , H01L2224/1332 , H01L2224/13323 , H01L2224/13324 , H01L2224/13338 , H01L2224/13339 , H01L2224/13344 , H01L2224/13347 , H01L2224/13349 , H01L2224/13355 , H01L2224/13357 , H01L2224/1336 , H01L2224/13363 , H01L2224/13364 , H01L2224/13366 , H01L2224/13369 , H01L2224/1337 , H01L2224/13371 , H01L2224/13372 , H01L2224/13373 , H01L2224/13376 , H01L2224/13378 , H01L2224/13379 , H01L2224/1338 , H01L2224/13381 , H01L2224/13383 , H01L2224/13384 , H01L2224/1339 , H01L2224/136 , H01L2224/13611 , H01L2224/13655 , H01L2224/13657 , H01L2224/1369 , H01L2224/16145 , H01L2224/16225 , H01L2224/81011 , H01L2924/381 , H01L2924/3841 , H05K3/3436 , H05K3/3463 , H05K2203/041 , B22F2202/13 , H01L2924/00012 , H01L2924/014 , H01L2924/01047 , H01L2924/01029 , H01L2924/01049 , H01L2924/01028 , H01L2924/01027 , H01L2924/01051 , H01L2924/01032 , H01L2924/01015 , H01L2924/01026 , H01L2924/01082 , H01L2924/01079 , H01L2924/01092 , H01L2924/0109 , H01L2924/01033 , H01L2924/00014 , H01L2924/01203 , H01L2924/01204 , H01L2924/0105 , H01L2924/01083 , H01L2924/0103 , H01L2924/01048 , H01L2924/01016 , H01L2924/01013 , H01L2924/01012 , H01L2924/01022 , H01L2924/01025 , H01L2924/0106 , H01L2924/01071 , H01L2924/01069 , H01L2924/01021 , H01L2924/01068 , H01L2924/01059 , H01L2924/01067 , H01L2924/01066 , H01L2924/01065 , H01L2924/01064 , H01L2924/01061 , H01L2924/01057 , H01L2924/0102 , H01L2924/01063 , H01L2924/0107 , H01L2924/01058 , H01L2924/01038 , H01L2924/01056 , H01L2924/01052 , H01L2924/01076 , H01L2924/01072 , H01L2924/01043 , H01L2924/01004
摘要: 制造抑制了所释放的α射线量的金属球。包括如下工序:将纯金属在比作为去除对象的杂质的沸点高、比纯金属的熔点高、且比纯金属的沸点低的温度下进行加热而使纯金属熔融的工序;将熔融的纯金属造球成为球状的工序,其中,该纯金属与在纯金属所含的杂质中作为去除对象的杂质的对应于气压的沸点相比具有更高的沸点,U的含量为5ppb以下,Th的含量为5ppb以下,纯度为99.9%以上且99.995%以下,Pb或Bi中任一者的含量、或者Pb和Bi的总量为1ppm以上。
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公开(公告)号:CN104303289B
公开(公告)日:2017-10-24
申请号:CN201380002160.3
申请日:2013-05-13
申请人: 新电元工业株式会社
发明人: 池田康亮
CPC分类号: H01L23/3672 , H01L21/4817 , H01L21/50 , H01L21/565 , H01L23/051 , H01L23/055 , H01L23/16 , H01L23/3675 , H01L23/3735 , H01L23/3737 , H01L23/42 , H01L23/48 , H01L23/49827 , H01L23/49838 , H01L23/49844 , H01L23/49866 , H01L23/5385 , H01L24/13 , H01L24/16 , H01L24/29 , H01L24/32 , H01L24/33 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L25/0657 , H01L25/071 , H01L25/165 , H01L25/50 , H01L2224/13016 , H01L2224/13082 , H01L2224/13147 , H01L2224/1318 , H01L2224/13294 , H01L2224/133 , H01L2224/16237 , H01L2224/29294 , H01L2224/293 , H01L2224/32013 , H01L2224/32014 , H01L2224/32225 , H01L2224/32227 , H01L2224/32245 , H01L2224/3303 , H01L2224/33181 , H01L2224/73203 , H01L2224/73253 , H01L2224/73265 , H01L2224/81447 , H01L2224/81815 , H01L2224/83447 , H01L2224/8348 , H01L2224/83815 , H01L2224/9211 , H01L2224/9221 , H01L2224/92247 , H01L2225/06548 , H01L2225/06555 , H01L2225/06572 , H01L2225/06582 , H01L2225/06589 , H01L2924/13055 , H01L2924/13091 , H01L2924/1611 , H01L2924/16152 , H01L2924/16724 , H01L2924/1679 , H01L2924/00 , H01L2924/00014 , H01L2224/81 , H01L2224/83 , H01L2924/00012 , H01L2924/01042 , H01L2924/01074
摘要: 本发明提供一种可小型化的电子模块及其制造方法。本发明涉及的电子模块1包括:电子模块10,具有包含主面11a及主面11b的基板11,并具有安装在主面11a上的电子元件12;电子模块20,具有包含主面21a及主面21b且主面21a被配置为与主面11a相对向的基板21,具有安装在主面11a上且通过连接部件18与电子元件12电连接的电子元件22,并具有安装在主面21b上且通过将基板21向厚度方向贯穿的连接部件19与电子元件电12电连接的电子元件23,并且,电子模块20通过连接部件18、19与电子模块10热连接;以及散热器30,在内部设有收纳部31a,将电子模块10、20收纳在收纳部31a中,从而使得主面11b与收纳部31a的内壁面相接触。
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公开(公告)号:CN102074511A
公开(公告)日:2011-05-25
申请号:CN201010556867.7
申请日:2010-11-12
申请人: 三星电子株式会社
IPC分类号: H01L23/00 , H01L23/488 , H01L21/60
CPC分类号: H05K3/323 , H01L24/13 , H01L24/81 , H01L24/83 , H01L24/91 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/1318 , H01L2224/16225 , H01L2224/2929 , H01L2224/2939 , H01L2224/29444 , H01L2224/29455 , H01L2224/29457 , H01L2224/2946 , H01L2224/2948 , H01L2224/2949 , H01L2224/2989 , H01L2224/32225 , H01L2224/73204 , H01L2224/81903 , H01L2224/83851 , H01L2224/9211 , H01L2924/01006 , H01L2924/01027 , H01L2924/01033 , H01L2924/01042 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0781 , H01L2924/07811 , H01L2924/15311 , H05K2201/083 , H05K2201/10674 , H05K2203/104 , H01L2924/00 , H01L2924/00014
摘要: 本发明提供了一种倒装芯片封装件和一种制造倒装芯片封装件的方法。所述倒装芯片封装件可以包括半导体芯片、封装件基底、导电磁性凸起和各向异性导电构件。所述半导体芯片可以具有第一焊盘。所述封装件基底可以具有面对所述第一焊盘的第二焊盘。所述导电磁性凸起可以设置在所述半导体芯片和所述封装件基底之间,以产生磁力。所述各向异性导电构件可以布置在所述半导体芯片和所述封装件基底之间。所述各向异性导电构件可以具有导电磁性颗粒,所述导电磁性颗粒由所述磁力诱导朝向所述导电磁性凸起,以将所述第一焊盘与所述第二焊盘电连接。预定数量的导电磁性颗粒可以位于所述导电磁性凸起和所述焊盘之间,从而可以提高焊盘之间的电连接可靠性。
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公开(公告)号:CN104425389A
公开(公告)日:2015-03-18
申请号:CN201410446263.5
申请日:2014-09-03
申请人: 千住金属工业株式会社
IPC分类号: H01L23/00 , H01L23/498 , H01L21/60 , H01L23/488
CPC分类号: B23K1/203 , B23K1/0016 , B23K1/20 , H01L21/4853 , H01L23/49816 , H01L24/11 , H01L24/13 , H01L2224/03828 , H01L2224/1112 , H01L2224/11334 , H01L2224/11849 , H01L2224/13109 , H01L2224/13111 , H01L2224/13113 , H01L2224/13116 , H01L2224/13117 , H01L2224/13118 , H01L2224/1312 , H01L2224/13123 , H01L2224/13124 , H01L2224/13138 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13149 , H01L2224/13155 , H01L2224/13157 , H01L2224/1316 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/1317 , H01L2224/13171 , H01L2224/13179 , H01L2224/1318 , H01L2224/1319 , H01L2224/13582 , H01L2224/136 , H01L2224/13605 , H01L2224/13609 , H01L2224/13611 , H01L2224/13613 , H01L2224/13616 , H01L2224/13617 , H01L2224/13618 , H01L2224/1362 , H01L2224/13624 , H01L2224/13638 , H01L2224/13639 , H01L2224/13647 , H01L2224/13655 , H01L2224/13657 , H01L2224/1366 , H01L2224/13671 , H01L2924/3651 , H01L2924/384 , H05K3/3436 , H05K2201/10234 , H05K2201/10621 , H05K2201/10734 , H05K2203/041 , Y02P70/613 , H01L2924/00014 , H01L2924/014 , H01L2924/01032 , H01L2924/01014 , H01L2924/01057 , H01L2924/01047 , H01L2924/01029 , H01L2924/01015
摘要: 本发明涉及凸块电极、凸块电极基板以及其制造方法,研究焊料镀层的熔融工序,以便在电极焊盘上可以将成为凸块电极的核层的Cu球的中心在其水平截面上再现性良好地配置于所包覆的焊料的外壳的中心。具备接合于电极焊盘(12)上、施加焊料(14)到成为核层的Cu球(13)上的凸块电极(30),在凸块电极(30)涂布助焊剂(16)之后,搭载于电极焊盘(12)上,加热电极焊盘(12)以及Cu核球而将焊料镀层(24)熔融的熔融工序中,将搭载有电极焊盘(12)以及Cu核球的基板(11)的加热率设定为0.01[℃/sec]以上~不足0.3[℃/sec]的范围。
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公开(公告)号:CN102569239A
公开(公告)日:2012-07-11
申请号:CN201110463174.8
申请日:2011-12-01
申请人: 海力士半导体有限公司
发明人: 金圣哲
IPC分类号: H01L23/488 , H01L23/528 , H01L21/60
CPC分类号: H01L23/5384 , H01L23/481 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/14 , H01L24/17 , H01L25/0655 , H01L25/0657 , H01L2224/03452 , H01L2224/03462 , H01L2224/0347 , H01L2224/0401 , H01L2224/05551 , H01L2224/0557 , H01L2224/05578 , H01L2224/05599 , H01L2224/05609 , H01L2224/05611 , H01L2224/05616 , H01L2224/05618 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05666 , H01L2224/05669 , H01L2224/05671 , H01L2224/0568 , H01L2224/05684 , H01L2224/0603 , H01L2224/11312 , H01L2224/1132 , H01L2224/1145 , H01L2224/11452 , H01L2224/11462 , H01L2224/1147 , H01L2224/11849 , H01L2224/13018 , H01L2224/13025 , H01L2224/13027 , H01L2224/13028 , H01L2224/13078 , H01L2224/13082 , H01L2224/13099 , H01L2224/13109 , H01L2224/13111 , H01L2224/13116 , H01L2224/13118 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/13164 , H01L2224/13166 , H01L2224/13169 , H01L2224/13171 , H01L2224/1318 , H01L2224/13184 , H01L2224/1329 , H01L2224/133 , H01L2224/13339 , H01L2224/13355 , H01L2224/1339 , H01L2224/13393 , H01L2224/134 , H01L2224/1403 , H01L2224/1411 , H01L2224/16012 , H01L2224/16145 , H01L2224/16146 , H01L2224/17106 , H01L2224/17107 , H01L2225/06541 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01024 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01042 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/01048 , H01L2224/05552
摘要: 本发明的实施例提供了一种半导体封装体的接合结构、其制造方法及半导体封装体。该半导体封装体的接合结构包括:配置为传输电信号的第一导电构件;以及配置为电连接至第一导电构件的表面并包括多个子接合垫的接合垫。
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