Semiconductor device having buffer layer and method of forming the same

    公开(公告)号:US09954052B2

    公开(公告)日:2018-04-24

    申请号:US14958146

    申请日:2015-12-03

    发明人: Jaehoon Lee

    摘要: A semiconductor device is provided as follows. A substrate includes an NMOS region and a PMOS region. A first trench and a second trench are disposed in the NMOS region. A first buffer layer is disposed in the first trench and the second trench. A stressor is disposed in the first trench and the second trench and disposed on the first buffer layer. A first channel region is disposed between the first trench and the second trench and disposed in the substrate. A first gate electrode is disposed on the first channel area. A third trench is disposed in the PMOS region. A second buffer layer is disposed in the third trench. A second channel area is disposed in the third trench, disposed on the second buffer layer, and has a different semiconductor layer from the substrate. A second gate electrode is disposed on the second channel area.