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公开(公告)号:US20240130128A1
公开(公告)日:2024-04-18
申请号:US18047571
申请日:2022-10-18
发明人: Yongjun Hu
IPC分类号: H01L27/1157 , G11C5/06 , H01L27/11524 , H01L27/11578
CPC分类号: H01L27/1157 , G11C5/063 , H01L27/11524 , H01L27/11578
摘要: Methods, systems, and devices for single crystal silicon cores for stacked memory cells are described. A memory device may be formed using silicon cores that are each associated with a set of multiple memory cells. Multiple silicon cores may extend along a first direction, and multiple sleeves of memory materials and conductive materials may be formed around each silicon core. Each sleeve of memory materials may be associated with a respective memory cell and each conductive material may be associated with a word line, such that each silicon core may be associated with multiple memory cells. The respective sleeves of memory materials and conductive materials may be formed from larger sleeves of material that may be etched into sections of the memory materials and the conductive materials along the silicon cores.
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公开(公告)号:US20240120371A1
公开(公告)日:2024-04-11
申请号:US18045528
申请日:2022-10-11
发明人: James McClay , Maxim Klebanov , Sundar Chetlur , Thomas S. Chung
IPC分类号: H01L29/06 , H01L27/11524 , H01L29/788
CPC分类号: H01L29/0646 , H01L27/11524 , H01L29/7883
摘要: Methods and apparatus for a device that includes a circuit, such as a memory cell, and an isolation structure to electrically isolate the circuit cell. The isolation structure can include a p-type substrate, a first series of p-type material extending to the p-type substrate, and a second series of p-type material extending to the p-type substrate. The first series of p-type material, the p-type substrate, and the second series of p-type material surrounds a first side, a second side, and a bottom of the circuit cell to electrically isolate the circuit cell with continuous p-type material. In some embodiments, the first series of p-type material comprises p-type well regions. In some embodiments, the first series of p-type material comprises deep trench isolation.
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公开(公告)号:US20240081070A1
公开(公告)日:2024-03-07
申请号:US17929965
申请日:2022-09-06
IPC分类号: H01L27/1157 , H01L27/11524 , H01L27/11553 , H01L27/11582
CPC分类号: H01L27/1157 , H01L27/11524 , H01L27/11553 , H01L27/11582
摘要: Source terminals of memory devices and related apparatuses, computing systems, and methods are disclosed. An apparatus includes a first polysilicon material, a second polysilicon material offset from the first polysilicon material, an intervening polysilicon material between the first polysilicon material and the second polysilicon material, and pillars defining memory cells. The pillars extend through the second polysilicon material and a proximal portion of the intervening polysilicon material into the first polysilicon material. The one or more insulative materials are at a distal edge of the intervening polysilicon material. The intervening polysilicon material is thicker at the distal edge than at the pillars. A method includes removing, using an isotropic etch process, portions of the first polysilicon material and the second polysilicon material in a trench and forming the intervening polysilicon material between the first polysilicon material and the second polysilicon material.
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公开(公告)号:US20240071496A1
公开(公告)日:2024-02-29
申请号:US17897460
申请日:2022-08-29
IPC分类号: G11C16/04 , H01L27/11519 , H01L27/11524 , H01L27/11556 , H01L27/11565 , H01L27/1157 , H01L27/11582
CPC分类号: G11C16/0483 , H01L27/11519 , H01L27/11524 , H01L27/11556 , H01L27/11565 , H01L27/1157 , H01L27/11582
摘要: Memory circuitry comprising strings of memory cells comprises a stack comprising vertically-alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers in a memory-array region. The insulative tiers and the conductive tiers extend from the memory-array region into a stair-step region. The stair-step region comprises a cavity comprising a flight of stairs extending along a first direction. Multiple different-depth and height-sequential treads in individual of the stairs extend along a second direction that is orthogonal to the first direction. Individual of the multiple different-depth treads comprise conducting material of one of the conductive tiers. The cavity comprises a pair of laterally-opposing outermost sidewalls relative to the second direction and that individually extend along the first direction. The multiple different-depth and height-sequential treads in the individual stairs comprise a single flight of said treads that extends along the second direction from one of the laterally-opposing outermost sidewalls to the other of the laterally-opposing outermost sidewalls. Methods are disclosed.
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5.
公开(公告)号:US20230413551A1
公开(公告)日:2023-12-21
申请号:US17807819
申请日:2022-06-20
发明人: Yao CHEN , Shigehisa INOUE , Kazuto OHSAWA , Hisaya SAKAI
IPC分类号: H01L27/11582 , H01L27/11556 , H01L23/522 , H01L23/528 , H01L27/1157 , H01L27/11565 , H01L27/11524 , H01L27/11519
CPC分类号: H01L27/11582 , H01L27/11556 , H01L23/5226 , H01L27/11519 , H01L27/1157 , H01L27/11565 , H01L27/11524 , H01L23/5283
摘要: A memory die includes first and second memory-region alternating stacks of memory-region insulating layers and electrically conductive layers that are laterally spaced apart from each other by a respective first portion of a retro-stepped dielectric structure overlying first stepped surfaces of the first and second memory-region alternating stacks, memory opening fill structures located the first and second memory-region alternating stacks, and a peripheral alternating stack of peripheral insulating layers and spacer material which is laterally spaced from the second memory-region alternating stack by a second portion of the retro-stepped dielectric structure overlying second stepped surfaces of the second memory-region alternating stack. Bottom surfaces of the first and second memory-region alternating stacks are spaced apart by a first lateral spacing distance, and bottom surfaces of the second memory alternating stack and the peripheral alternating stack are spaced apart by the first lateral spacing distance.
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公开(公告)号:US20230413547A1
公开(公告)日:2023-12-21
申请号:US17843867
申请日:2022-06-17
申请人: Intel Corporation
发明人: Sagar Suthram , Abhishek A. Sharma , Wilfred Gomes , Anand S. Murthy , Tahir Ghani , Pushkar Sharad Ranade
IPC分类号: H01L27/1156 , H01L27/11524
CPC分类号: H01L27/1156 , H01L27/11524
摘要: IC devices implementing 2T memory cells with source-drain coupling in one transistor, and related assemblies and methods, are disclosed herein. In particular, 2T memory cells presented herein use first and second transistors arranged so that source and drain terminals of the second transistor are coupled to one another. A memory state may be represented by charge indicative of the bit value stored in the second transistor, while the first transistor may serve as a switch to control access to the second transistor. 2T memory cells with source-drain coupling in one transistor provide a promising way to increasing memory cell densities, drive current, and design flexibility in making electrical connections to, or between, various transistor terminals and control lines of memory arrays, thus providing good scalability in the number of 2T memory cells included in memory arrays.
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7.
公开(公告)号:US20230397421A1
公开(公告)日:2023-12-07
申请号:US17876271
申请日:2022-07-28
IPC分类号: H01L27/11582 , H01L27/11519 , H01L27/11524 , H01L27/11556 , H01L27/11565 , H01L27/1157
CPC分类号: H01L27/11582 , H01L27/11519 , H01L27/11524 , H01L27/11556 , H01L27/11565 , H01L27/1157
摘要: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another, the tiers including conductive materials that form part of respective control gates for memory cells of the apparatus; a staircase structure formed in the tiers, the conductive materials including respective portions that collectively form a part of the staircase structure, the staircase structure including a sidewall on a side of the staircase structure; a dielectric liner formed on the sidewall; recesses formed in respective tiers and adjacent the sidewall such that respective portions of the dielectric liner are located in the recesses; and a contact structure extending through a portion of the dielectric liner, wherein the portions of the dielectric liner are between the contract structure and the conductive materials.
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公开(公告)号:US20230352091A1
公开(公告)日:2023-11-02
申请号:US17734623
申请日:2022-05-02
发明人: Jun Fujiki , Yoshiaki Fukuzumi , Akira Goda
IPC分类号: G11C16/08 , G11C16/04 , H01L27/11519 , H01L27/11524 , H01L27/11556 , H01L27/11565 , H01L27/1157 , H01L27/11582
CPC分类号: G11C16/08 , G11C16/0483 , H01L27/11519 , H01L27/11524 , H01L27/11556 , H01L27/11565 , H01L27/1157 , H01L27/11582
摘要: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes tiers located one over another, each of the tiers including memory cells and a control gate for the memory cells, each of the tiers including first transistors connected in series between the control gate in a respective tier and a conductive line, and second transistors connected in series between the control gate in the respective tier and the conductive line, the second transistors connected in parallel with the first transistors between the control gate and the conductive line, conductive joints coupled to channel regions of the first and second transistors, and gates for the first transistors and second transistors, each of the gates shared by one of the first transistors and one of the second transistors.
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公开(公告)号:US20230343696A1
公开(公告)日:2023-10-26
申请号:US17725015
申请日:2022-04-20
发明人: Gerben Doornbos , Mauricio Manfrini
IPC分类号: H01L23/522 , H01L27/11519 , H01L27/11524 , H01L27/11529 , H01L27/11565 , H01L27/1157 , H01L27/11573 , H01L21/28 , H01L29/423 , H01L29/66 , H01L29/788 , H01L29/792
CPC分类号: H01L23/5226 , H01L27/11519 , H01L27/11524 , H01L27/11529 , H01L27/11565 , H01L27/1157 , H01L27/11573 , H01L29/40114 , H01L29/40117 , H01L29/42336 , H01L29/42352 , H01L29/66825 , H01L29/788 , H01L29/792 , H01L29/66833
摘要: A semiconductor device is provided. The semiconductor device includes a memory structure including a first transistor channel, a gate structure overlying the first transistor channel, and a second transistor channel overlying the gate structure. The gate structure includes a control gate.
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公开(公告)号:US20230328977A1
公开(公告)日:2023-10-12
申请号:US17883842
申请日:2022-08-09
发明人: Ansoo PARK , Ahreum KIM
IPC分类号: H01L27/11524 , H01L27/11519 , H01L27/11529 , H01L27/08
CPC分类号: H01L27/11524 , H01L27/0802 , H01L27/11529 , H01L27/11519
摘要: An active resistor array of a semiconductor memory device comprises a first active resistor in a first active resistor region; a second active resistor in the first active resistor region and arranged in parallel with the first active resistor, and an isolation element layer interposed therebetween; a third active resistor formed in a second active resistor region; a first selection transistor formed in a first selection transistor region and connected to the second active resistor; and a second selection transistor formed in a second selection transistor region and connected to the third active resistor. The first and second selection transistors are connected to the same gate layer. The gate layer of the first and second selection transistors is on the isolation element layer. Since example embodiments may help to ensure the uniformity of the layout pattern, active resistance distribution may be improved due to reduction in process variation.
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