MONOLITHIC OPTO-MOSFET RELAY AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20250072129A1

    公开(公告)日:2025-02-27

    申请号:US18480750

    申请日:2023-10-04

    Inventor: Di-Bao WANG

    Abstract: A monolithic Opto-MOSFET relay and manufacturing method thereof are provided. The manufacturing method of the monolithic Opto-MOSFET relay involves using a low ion doping concentration substrate. In this method, a first P-N junction structure, a second P-N junction structure, and an N-P-N junction structure are formed within an epitaxial layer. Dry etching is employed to divide the epitaxial layer into a high-voltage region and a low-voltage region, which are electrically isolated from the each other. Subsequently, an isolation layer is deposited on the epitaxial layer, and photomask etching is performed to generate multiple patterns. A metal layer is then deposited to form a light emitting diode (LED) based on the pattern within the first P-N junction structure, a photodiode within the second P-N junction structure, and at least one MOSFET within the N-P-N junction structure.

    TRENCH MOSFET DEVICE WITH PROTECTION GATE STRUCTURE AND A METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20250072021A1

    公开(公告)日:2025-02-27

    申请号:US18237034

    申请日:2023-08-23

    Inventor: Wai Tien CHAN

    Abstract: A silicon carbide MOSFET device which contains a N-Channel MOSFET, and a JFET connected to the N-Channel MOSFET such that their drain-source current paths are connected in series. A gate of the JFET is connected to a gate of the N-Channel MOSFET device via a voltage divider, which is formed monolithically with the silicon carbide substrate and the first to fourth silicon carbide layers. The protection gate structure can shield the trench oxide from high drain voltage during off-state. The voltage divider is configured to restrict a gate voltage of the JFET such that a SiC PN diode formed within the silicon carbide MOSFET device is turned off when the N-Channel MOSFET is on or off.

    Trench gate silicon carbide MOSFET device and fabrication method thereof

    公开(公告)号:US12237410B1

    公开(公告)日:2025-02-25

    申请号:US18937369

    申请日:2024-11-05

    Abstract: A trench gate silicon carbide metal oxide semiconductor field effect transistor (MOSFET) device and a fabrication method thereof. A second conductive heavily doped layer at the bottom corner of a trench gate is electrically connected to a second conductive heavily doped layer on another side edge of the trench gate through a layout design, which ensures a ground potential during voltage blocking state. This design protects the insulating layer in the trench gate and the Schottky contact in a junction barrier Schottky (JBS) diode, thereby enhancing device reliability. Moreover, in a diode operating mode, P+ on the left and right sides of the trench gate are connected to a positive potential. When the P+/N− junction is activated, the conductivity modulation can be implemented through hole injection, thereby improving the device's ability to withstand surge current impacts.

    Wide Bandgap Trench Gate Semiconductor Device with Buried Gate

    公开(公告)号:US20250063800A1

    公开(公告)日:2025-02-20

    申请号:US18449458

    申请日:2023-08-14

    Abstract: Wide bandgap trench gate semiconductor devices are provided. In one example, a semiconductor device includes a wide bandgap semiconductor structure. The wide bandgap semiconductor structure includes a drift region of a first conductivity type and a well region of a second conductivity type. The semiconductor device includes a gate trench in the wide bandgap semiconductor structure. The gate trench extends through the well region into the drift region. The semiconductor device includes a buried gate structure in the gate trench. The buried gate structure includes a gate polysilicon layer and a gate silicide layer.

    LATERALLY SILICON CARBIDE JUNCTION GATE FIELD EFFECT TRANSISTOR DEVICE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20250063760A1

    公开(公告)日:2025-02-20

    申请号:US18769255

    申请日:2024-07-10

    Inventor: Changchang WANG

    Abstract: Disclosed are a lateral silicon carbide junction gate field effect transistor (SiC-JFET) device and a manufacturing method thereof. The lateral SiC-JFET device includes a base; a source and a drift region formed on the base in sequence; a first source contact region, a second source contact region, and a channel region formed on the source in sequence; and a gate formed on the channel region; where the channel region and the drift region are independent structures respectively. The embodiments of the present disclosure solved the technical problem that the adjustment of the breakdown voltage of the conventional lateral SiC-JFET device is limited by the size of the channel region.

    METHOD FOR PRODUCING A POWER FINFET BY MEANS OF LITHOGRAPHY MASKS, AND POWER FINFET

    公开(公告)号:US20250056830A1

    公开(公告)日:2025-02-13

    申请号:US18716653

    申请日:2022-12-14

    Abstract: A method for producing a power FinFET with two-part control electrodes. The method includes: creating a first structured mask including oxide regions and first and second open regions on the front side of a semiconductor body via lithography; creating first and second trenches below the first and second open regions, respectively, by a first etching process starting from the front side of the semiconductor body into the drift layer, the first and second trenches being arranged substantially parallel to one another and alternate, the second trenches have a smaller width than the first trenches; applying a polysilicon layer onto the front side so that the first and second trenches are filled; applying an isotropic oxide layer onto the front side of the semiconductor body; creating a second structured mask on the isotropic oxide layer via lithography, wherein the second structured mask is open above the first trenches.

    JBS device with improved electrical performances, and manufacturing process of the JBS device

    公开(公告)号:US12224358B2

    公开(公告)日:2025-02-11

    申请号:US17584185

    申请日:2022-01-25

    Abstract: A Junction Barrier Schottky device includes a semiconductor body of SiC having a first conductivity. An implanted region having a second conductivity, extends into the semiconductor body from a top surface of the semiconductor body to form a junction barrier diode with the semiconductor body. An electrical terminal is in ohmic contact with the implanted region and in direct electrical contact with the top surface, laterally to the implanted region, to form a Schottky diode with the semiconductor body. The implanted region is formed by a first and a second portion electrically connected directly to each other and aligned along an alignment axis transverse to the top surface. Orthogonally to the alignment axis, the first portion has a first maximum width and the second portion has a second maximum width greater than the first maximum width.

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