Method for molecular adhesion bonding at low pressure
    46.
    发明授权
    Method for molecular adhesion bonding at low pressure 有权
    低压分子粘合的方法

    公开(公告)号:US08338266B2

    公开(公告)日:2012-12-25

    申请号:US13192312

    申请日:2011-07-27

    Inventor: Marcel Broekaart

    Abstract: The present invention relates to a method for molecular adhesion bonding between at least a first wafer and a second wafer involving aligning the first and second wafers, placing the first and second wafers in an environment having a first pressure (P1) greater than a predetermined threshold pressure; bringing the first wafer and the second wafer into alignment and contact; and initiating the propagation of a bonding wave between the first and second wafer after the wafers are aligned and in contact by reducing the pressure within the environment to a second pressure (P2) below the threshold pressure. The invention also relates to the three-dimensional composite structure that is obtained by the described method of adhesion bonding.

    Abstract translation: 本发明涉及一种在至少第一晶片和第二晶片之间分子粘附的方法,包括使第一和第二晶片对齐,将第一和第二晶片置于具有大于预定阈值的第一压力(P1)的环境中 压力; 使第一晶片和第二晶片对准并接触; 以及在所述晶片对准之后,在所述第一和第二晶片之间启动粘结波的传播,并通过将所述环境内的压力降低到低于所述阈值压力的第二压力(P2)来接触。 本发明还涉及通过所述粘合粘合方法获得的三维复合结构。

    METHOD FOR MOLECULAR ADHESION BONDING AT LOW PRESSURE
    50.
    发明申请
    METHOD FOR MOLECULAR ADHESION BONDING AT LOW PRESSURE 有权
    低压分子粘合方法

    公开(公告)号:US20120038027A1

    公开(公告)日:2012-02-16

    申请号:US13192312

    申请日:2011-07-27

    Inventor: Marcel Broekaart

    Abstract: The present invention relates to a method for molecular adhesion bonding between at least a first wafer and a second wafer involving aligning the first and second wafers, placing the first and second wafers in an environment having a first pressure (P1) greater than a predetermined threshold pressure; bringing the first wafer and the second wafer into alignment and contact; and initiating the propagation of a bonding wave between the first and second wafer after the wafers are aligned and in contact by reducing the pressure within the environment to a second pressure (P2) below the threshold pressure. The invention also relates to the three-dimensional composite structure that is obtained by the described method of adhesion bonding.

    Abstract translation: 本发明涉及一种在至少第一晶片和第二晶片之间分子粘附的方法,包括使第一和第二晶片对齐,将第一和第二晶片置于具有大于预定阈值的第一压力(P1)的环境中 压力; 使第一晶片和第二晶片对准并接触; 以及在所述晶片对准之后,在所述第一和第二晶片之间启动粘结波的传播,并通过将所述环境内的压力降低到低于所述阈值压力的第二压力(P2)来接触。 本发明还涉及通过所述粘合粘合方法获得的三维复合结构。

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