Method for manufacturing electronic chips

    公开(公告)号:US11574816B2

    公开(公告)日:2023-02-07

    申请号:US17104869

    申请日:2020-11-25

    IPC分类号: H01L21/44 H01L21/48 H01L21/56

    摘要: A method for manufacturing electronic chips includes forming, on the side of a first face of a semiconductor substrate, in and on which a plurality of integrated circuits has been formed beforehand, metallizations coupling contacts of adjacent integrated circuits to one another. The method further includes forming, on the side of the first face of the substrate, first trenches extending through the first face of the substrate and laterally separating the adjacent integrated circuits. The first trenches extend through the metallizations to form at least a portion of metallizations at each of the adjacent circuits.

    Die-to-die routing through a seal ring

    公开(公告)号:US11476203B2

    公开(公告)日:2022-10-18

    申请号:US17216278

    申请日:2021-03-29

    申请人: Apple Inc.

    摘要: Stitched die structures, and methods for interconnecting die are described. In an embodiment, a stitched die structure includes a semiconductor substrate that includes a first die area of a first die and a second die area of a second die separate from the first die area. A back-end-of-the-line (BEOL) build-up structure spans over the first die area and the second die area, and includes a first metallic seal directly over a first peripheral area of the first die area, a second metallic seal directly over a second peripheral area of the second die area, and a die-to-die routing extending through the first metallic seal and the second metallic seal to electrically connect the first die to the second die.