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公开(公告)号:CN109003955A
公开(公告)日:2018-12-14
申请号:CN201810029456.9
申请日:2018-01-12
Applicant: 爱思开海力士有限公司
Inventor: 李起洪
IPC: H01L23/485 , H01L23/488
CPC classification number: H01L27/1104 , G11C11/40 , G11C2216/04 , H01L23/53295 , H01L2224/32148
Abstract: 半导体装置及其制造方法。一种半导体装置包括:层叠结构;沟道层,其穿过层叠结构;阱板,其位于层叠结构下方;源极层,其位于层叠结构和阱板之间;连接结构,其将沟道层彼此联接,并且包括接触源极层的第一触点和接触阱板的第二触点;以及隔离图案,其将源极层和阱板彼此绝缘。
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公开(公告)号:CN104425394B
公开(公告)日:2018-01-12
申请号:CN201410436888.3
申请日:2014-08-29
Applicant: 财团法人工业技术研究院
CPC classification number: H01L23/481 , G02B6/12 , G02B6/34 , G02B2006/12061 , H01L21/30604 , H01L21/486 , H01L21/76898 , H01L23/13 , H01L23/147 , H01L23/49827 , H01L23/60 , H01L24/05 , H01L24/06 , H01L24/08 , H01L24/16 , H01L24/32 , H01L24/48 , H01L24/80 , H01L25/167 , H01L27/0255 , H01L29/861 , H01L33/20 , H01L33/62 , H01L2224/04 , H01L2224/0401 , H01L2224/04026 , H01L2224/04042 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/06102 , H01L2224/08148 , H01L2224/08238 , H01L2224/16148 , H01L2224/16238 , H01L2224/29294 , H01L2224/32148 , H01L2224/32238 , H01L2224/48091 , H01L2224/48105 , H01L2224/48148 , H01L2224/48229 , H01L2224/73265 , H01L2224/80801 , H01L2224/80805 , H01L2224/81439 , H01L2224/81444 , H01L2224/81447 , H01L2224/83439 , H01L2224/83444 , H01L2224/83447 , H01L2224/83805 , H01L2224/85439 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01322 , H01L2924/12035 , H01L2924/12041 , H01L2924/12042 , H01L2924/14 , H01L2924/1434 , H01L2933/0066 , H01S5/0208 , H01S5/02469 , H01S5/026 , H01S5/34 , H01L2924/00 , H01L2224/80 , H01L2924/00012 , H01L2224/45099
Abstract: 本发明公开一种基板、其制造方法及其应用,该基板包括基材、两个导体结构以及至少一二极管。两个导体结构分别从基材的第一表面,经由贯穿基材的两个穿孔,延伸到基材的第二表面。至少一二极管埋入于所述穿孔其中之一的一侧壁的基材中。
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公开(公告)号:CN107464796A
公开(公告)日:2017-12-12
申请号:CN201710383381.X
申请日:2017-05-26
Applicant: 三星显示有限公司
IPC: H01L23/488 , H01B5/16
CPC classification number: H01L27/3276 , H01L24/29 , H01L24/32 , H01L51/0096 , H01L2224/13144 , H01L2224/16238 , H01L2224/271 , H01L2224/29005 , H01L2224/29028 , H01L2224/29083 , H01L2224/29084 , H01L2224/2929 , H01L2224/29293 , H01L2224/2939 , H01L2224/29391 , H01L2224/294 , H01L2224/29439 , H01L2224/29444 , H01L2224/29447 , H01L2224/29455 , H01L2224/29499 , H01L2224/32148 , H01L2224/32225 , H01L2224/32238 , H01L2224/743 , H01L2224/81191 , H01L2224/81903 , H01L2224/831 , H01L2224/83192 , H01L2224/83201 , H01L2224/83203 , H01L2224/83345 , H01L2224/83851 , H01L2224/83862 , H01L2224/9211 , H01L2251/5369 , H01L2924/07811 , H01L2924/1426 , H01L2924/00014 , H01L2924/0665 , H01L2924/00012 , H01L2224/81 , H01L2224/83 , H01B5/16 , H01L2224/29291 , H01L2224/29298 , H01L2224/32227
Abstract: 本发明涉及各向异性导电膜及使用各向异性导电膜的显示装置。一种各向异性导电膜,包括:导电层;第一树脂绝缘层,在导电层的第一表面上方;以及第二树脂绝缘层,在导电层的第二表面上方,其中,导电层包括多个导电粒子和将多个导电粒子连接至彼此的纳米纤维,多个导电粒子中的每一个包括具有锥形的多个针状突出部,并且其中,第一树脂绝缘层和第二树脂绝缘层包括相同的材料并且具有不同的厚度。
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公开(公告)号:CN104425394A
公开(公告)日:2015-03-18
申请号:CN201410436888.3
申请日:2014-08-29
Applicant: 财团法人工业技术研究院
CPC classification number: H01L23/481 , G02B6/12 , G02B6/34 , G02B2006/12061 , H01L21/30604 , H01L21/486 , H01L21/76898 , H01L23/13 , H01L23/147 , H01L23/49827 , H01L23/60 , H01L24/05 , H01L24/06 , H01L24/08 , H01L24/16 , H01L24/32 , H01L24/48 , H01L24/80 , H01L25/167 , H01L27/0255 , H01L29/861 , H01L33/20 , H01L33/62 , H01L2224/04 , H01L2224/0401 , H01L2224/04026 , H01L2224/04042 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/06102 , H01L2224/08148 , H01L2224/08238 , H01L2224/16148 , H01L2224/16238 , H01L2224/29294 , H01L2224/32148 , H01L2224/32238 , H01L2224/48091 , H01L2224/48105 , H01L2224/48148 , H01L2224/48229 , H01L2224/73265 , H01L2224/80801 , H01L2224/80805 , H01L2224/81439 , H01L2224/81444 , H01L2224/81447 , H01L2224/83439 , H01L2224/83444 , H01L2224/83447 , H01L2224/83805 , H01L2224/85439 , H01L2224/85444 , H01L2224/85447 , H01L2924/00014 , H01L2924/01322 , H01L2924/12035 , H01L2924/12041 , H01L2924/12042 , H01L2924/14 , H01L2924/1434 , H01L2933/0066 , H01S5/0208 , H01S5/02469 , H01S5/026 , H01S5/34 , H01L2924/00 , H01L2224/80 , H01L2924/00012 , H01L2224/45099
Abstract: 本发明公开一种基板、其制造方法及其应用,该基板包括基材、两个导体结构以及至少一二极管。两个导体结构分别从基材的第一表面,经由贯穿基材的两个穿孔,延伸到基材的第二表面。至少一二极管埋入于所述穿孔其中之一的一侧壁的基材中。
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公开(公告)号:CN103964365A
公开(公告)日:2014-08-06
申请号:CN201310162964.1
申请日:2013-05-06
Applicant: 台湾积体电路制造股份有限公司
CPC classification number: B81C1/00825 , B81B2207/03 , B81C1/00269 , B81C2203/0118 , B81C2203/019 , B81C2203/035 , B81C2203/036 , B81C2203/054 , H01L21/50 , H01L22/32 , H01L23/10 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/94 , H01L2224/29011 , H01L2224/2908 , H01L2224/29082 , H01L2224/291 , H01L2224/29109 , H01L2224/29111 , H01L2224/29124 , H01L2224/29144 , H01L2224/29147 , H01L2224/32148 , H01L2224/32238 , H01L2224/32268 , H01L2224/83123 , H01L2224/83127 , H01L2224/83191 , H01L2224/83193 , H01L2224/83204 , H01L2224/83805 , H01L2224/94 , H01L2924/01322 , H01L2924/1461 , H01L2924/15787 , H01L2924/01029 , H01L2924/01032 , H01L2924/00 , H01L2224/83
Abstract: 公开了用于密封环结构的方法和装置。可以在第一晶圆和/或第二晶圆上形成晶圆密封环。在第一晶圆和/或第二晶圆中的一个或两个上可以形成有一个或多个管芯。晶圆密封环可以围绕对应的晶圆的管芯形成。一个或多个管芯密封环可以围绕一个或多个管芯形成。晶圆密封环可以形成为高度可以约等于在第一晶圆和/或第二晶圆上形成的一个或多个管芯密封环的高度。可以形成晶圆密封环以实现共晶或者熔融接合工艺。可以将第一晶圆和第二晶圆接合在一起以在第一晶圆和第二晶圆之间形成密封环结构。密封环结构可以在第一晶圆和第二晶圆之间提供密封。
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公开(公告)号:CN103377956A
公开(公告)日:2013-10-30
申请号:CN201310129982.X
申请日:2013-04-15
Applicant: 亚太优势微系统股份有限公司
IPC: H01L21/60
CPC classification number: H01L23/49866 , B81C1/00269 , B81C2203/019 , H01L21/50 , H01L21/76251 , H01L23/10 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/48 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/95 , H01L25/0657 , H01L25/50 , H01L2224/0347 , H01L2224/03614 , H01L2224/0401 , H01L2224/04042 , H01L2224/05073 , H01L2224/05166 , H01L2224/05171 , H01L2224/05655 , H01L2224/05669 , H01L2224/1145 , H01L2224/11462 , H01L2224/1147 , H01L2224/11614 , H01L2224/1308 , H01L2224/13082 , H01L2224/13111 , H01L2224/13139 , H01L2224/16148 , H01L2224/16238 , H01L2224/16503 , H01L2224/16507 , H01L2224/2745 , H01L2224/27462 , H01L2224/2747 , H01L2224/27614 , H01L2224/29011 , H01L2224/2908 , H01L2224/29082 , H01L2224/29084 , H01L2224/29111 , H01L2224/29139 , H01L2224/32146 , H01L2224/32148 , H01L2224/32235 , H01L2224/32238 , H01L2224/32503 , H01L2224/32507 , H01L2224/48091 , H01L2224/48148 , H01L2224/48228 , H01L2224/48463 , H01L2224/73103 , H01L2224/73203 , H01L2224/73215 , H01L2224/81011 , H01L2224/81013 , H01L2224/81022 , H01L2224/81121 , H01L2224/81193 , H01L2224/81203 , H01L2224/81825 , H01L2224/81948 , H01L2224/83011 , H01L2224/83013 , H01L2224/83022 , H01L2224/83121 , H01L2224/83193 , H01L2224/83203 , H01L2224/83805 , H01L2224/83825 , H01L2224/83948 , H01L2224/9202 , H01L2224/92147 , H01L2224/95 , H01L2924/00014 , H01L2924/01322 , H01L2924/1461 , H01L2924/15787 , H01L2924/16235 , H01L2924/351 , H01L2924/00015 , H01L2224/83 , H01L2224/85 , H01L2224/81 , H01L2924/00012 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明提供一种基材的接合方法,包含:首先提供一第一基材和一第二基材,其中一第一银层覆盖第一基材的表面,一第二银层覆盖第二基材的表面以及一金属层覆盖第二银层,其中金属层包含一第一钖层,接着进行一接合制程,将第一基材与第二基材对准,使得金属层和第一银层接触,并且施加负载并加热至一预定温度以生成Ag3Sn金属间化合物,最后降温并移除负载,完成接合制程。本发明的有益效果是改良接合晶圆的质量,使技术能实际应用于产品量产之上。
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公开(公告)号:CN101682988A
公开(公告)日:2010-03-24
申请号:CN200880020091.8
申请日:2008-10-29
Applicant: 日立化成工业株式会社
CPC classification number: H01R4/04 , C08K9/02 , C09J9/02 , C09J11/00 , H01L24/05 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/0401 , H01L2224/04026 , H01L2224/05611 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05669 , H01L2224/05671 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/2919 , H01L2224/2929 , H01L2224/2939 , H01L2224/29391 , H01L2224/29439 , H01L2224/29447 , H01L2224/29455 , H01L2224/32148 , H01L2224/32227 , H01L2224/83101 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/0102 , H01L2924/01024 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01042 , H01L2924/01045 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0665 , H01L2924/07811 , H01L2924/10253 , H01L2924/14 , H01L2924/15788 , H01L2924/19041 , H01L2924/19043 , H01R11/01 , H01R13/03 , H05K3/323 , H05K3/361 , H05K2201/0221 , H05K2201/0233 , H01L2924/00 , H01L2924/3512
Abstract: 本发明涉及一种电路连接材料,用于将形成有电路电极的2个电路部件电连接,以使得电路电极对置;该电路连接材料含有粘接剂组合物和导电粒子,导电粒子具备由有机高分子化合物形成的核体以及被覆该核体的金属层,金属层具有向着导电粒子的外侧突起的突起部,金属层由镍或者镍合金构成;在向导电粒子施加压力的情况下,突起部内侧部分的金属层会陷入核体。
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公开(公告)号:CN105778815B
公开(公告)日:2018-03-20
申请号:CN201610149536.9
申请日:2008-10-29
Applicant: 日立化成株式会社
CPC classification number: H01R4/04 , C08K9/02 , C09J9/02 , C09J11/00 , H01L24/05 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/0401 , H01L2224/04026 , H01L2224/05611 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05669 , H01L2224/05671 , H01L2224/16145 , H01L2224/16225 , H01L2224/16227 , H01L2224/2919 , H01L2224/2929 , H01L2224/2939 , H01L2224/29391 , H01L2224/29439 , H01L2224/29447 , H01L2224/29455 , H01L2224/32148 , H01L2224/32227 , H01L2224/83101 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/0102 , H01L2924/01024 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01042 , H01L2924/01045 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0665 , H01L2924/07811 , H01L2924/10253 , H01L2924/14 , H01L2924/15788 , H01L2924/19041 , H01L2924/19043 , H01R11/01 , H01R13/03 , H05K3/323 , H05K3/361 , H05K2201/0221 , H05K2201/0233 , H01L2924/00 , H01L2924/3512
Abstract: 本发明涉及电路部件的连接结构和电路部件的连接方法。所述电路部件的连接结构具备:形成有电路电极且所述电路电极被相对配置的2个电路部件;和介于所述电路部件之间,通过加热加压而将所述电路电极电连接的电路连接部件,所述电路连接部件为电路连接材料的固化物,所述电路连接材料含有粘接剂组合物和导电粒子,所述导电粒子具备由有机高分子化合物形成的核体以及被覆该核体的金属层,所述金属层具有向着导电粒子的外侧突起的突起部,所述金属层由镍或者镍合金构成,所述核体的平均粒径为2.5~3.5μm,所述金属层的厚度为75~100nm,在所述电路连接材料所含有的导电粒子的突起部的内侧部分,金属层陷入核体。
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公开(公告)号:CN104851848A
公开(公告)日:2015-08-19
申请号:CN201410053580.0
申请日:2014-02-17
Applicant: 中芯国际集成电路制造(上海)有限公司
CPC classification number: H01L21/56 , H01L21/30604 , H01L21/308 , H01L22/12 , H01L23/10 , H01L24/03 , H01L24/05 , H01L24/06 , H01L24/08 , H01L24/27 , H01L24/29 , H01L24/30 , H01L24/32 , H01L24/80 , H01L24/83 , H01L24/92 , H01L24/94 , H01L25/0657 , H01L25/50 , H01L2224/04026 , H01L2224/05571 , H01L2224/0612 , H01L2224/08145 , H01L2224/08148 , H01L2224/2761 , H01L2224/29011 , H01L2224/29012 , H01L2224/29013 , H01L2224/29014 , H01L2224/29078 , H01L2224/30145 , H01L2224/32145 , H01L2224/32148 , H01L2224/80011 , H01L2224/80203 , H01L2224/80805 , H01L2224/8081 , H01L2224/80895 , H01L2224/83011 , H01L2224/83193 , H01L2224/83203 , H01L2224/83805 , H01L2224/8381 , H01L2224/9211 , H01L2224/94 , H01L2924/00015 , H01L2924/0002 , H01L2924/163 , H01L2924/00 , H01L2224/48 , H01L2224/2919 , H01L2224/83 , H01L2924/00012 , H01L2924/00014 , H01L2224/80
Abstract: 本发明涉及一种C-SAM中接合晶圆的密封结构及其制备方法,所述密封结构位于所述接合晶圆的边缘,将位于所述密封结构内侧的所述接合晶圆形成密封区域,以防止C-SAM检测中所述接合晶圆的间隙进水;其中,所述接合晶圆包括相互接合的上部接合晶圆和下部接合晶圆。本发明的优点在于:(1)所述接合晶圆边缘上设置的密封结构可以在C-SAM检测过程中将水封锁在晶圆之外。(2)可以根据预先设定的检测方法选用C-SAM对所述晶圆接合质量进行检测。(3)所述晶圆在C-SAM检测之后不会受到损坏。
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公开(公告)号:CN103370784A
公开(公告)日:2013-10-23
申请号:CN201180067909.3
申请日:2011-04-01
Applicant: 德塞拉股份有限公司
IPC: H01L21/98 , H01L25/065
CPC classification number: H01L25/00 , H01L23/481 , H01L24/05 , H01L24/06 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/73 , H01L24/81 , H01L24/83 , H01L24/92 , H01L24/94 , H01L25/0657 , H01L25/50 , H01L2224/0401 , H01L2224/04026 , H01L2224/05023 , H01L2224/05124 , H01L2224/05147 , H01L2224/05155 , H01L2224/05186 , H01L2224/0519 , H01L2224/05568 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/0603 , H01L2224/0613 , H01L2224/06131 , H01L2224/06135 , H01L2224/06505 , H01L2224/116 , H01L2224/13023 , H01L2224/13082 , H01L2224/131 , H01L2224/13109 , H01L2224/13111 , H01L2224/13144 , H01L2224/13147 , H01L2224/136 , H01L2224/16146 , H01L2224/16148 , H01L2224/16235 , H01L2224/16238 , H01L2224/276 , H01L2224/29023 , H01L2224/29082 , H01L2224/291 , H01L2224/29109 , H01L2224/29111 , H01L2224/29144 , H01L2224/32148 , H01L2224/32238 , H01L2224/73103 , H01L2224/81191 , H01L2224/81193 , H01L2224/8123 , H01L2224/81815 , H01L2224/8183 , H01L2224/83191 , H01L2224/83193 , H01L2224/8323 , H01L2224/83815 , H01L2224/8383 , H01L2224/9202 , H01L2224/9221 , H01L2224/94 , H01L2225/06513 , H01L2225/06527 , H01L2225/06541 , H01L2225/06565 , H01L2924/00014 , H01L2924/0002 , H01L2924/01029 , H01L2924/09701 , H01L2924/14 , H01L2924/35 , H01L2924/014 , H01L2224/81 , H01L2224/83 , H01L2224/05552 , H01L2924/00012 , H01L2924/00
Abstract: 本发明公开了两元件(100,200)的微电子组件(300)及其形成方法。微电子元件(100)包括主表面(102)、及在主表面(102)暴露的介电层(120)和至少一个结合垫(110)。微电子元件(100)可包含复数个有源电路元件。第一金属层(130)沉积为覆盖至少一个结合垫(110)和介电层(120)。提供了具有第二金属层(230)沉积于其上的第二元件(200),第一金属层(130)与第二金属层(230)接合。组件(300)可沿切割线(301)切割为单独的单元,每个都包括芯片。
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