公开(公告)号：US11805653B2

公开(公告)日：2023-10-31

申请号：US17145131

申请日：2021-01-08

Applicant: Micron Technology, Inc.

Inventor： Haitao Liu ,  Kamal M. Karda ,  Gurtej S. Sandhu ,  Sanh D. Tang ,  Akira Goda ,  Lifang Xu

IPC: H01L27/11573 ,  H10B43/40 ,  G11C16/08 ,  H01L23/532 ,  H01L21/28 ,  H10B43/10 ,  H10B43/27 ,  H10B43/35 ,  H10B41/10 ,  H10B41/27 ,  H10B41/35 ,  H10B41/40

CPC classification number: H10B43/40 ,  G11C16/08 ,  H01L23/5329 ,  H01L29/40117 ,  H10B43/10 ,  H10B43/27 ,  H10B43/35 ,  H10B41/10 ,  H10B41/27 ,  H10B41/35 ,  H10B41/40

Abstract: A memory can have a stacked memory array that can have a plurality of levels of memory cells. Each respective level of memory cells can be commonly coupled to a respective access line. A plurality of drivers can be above the stacked memory array. Each respective driver can have a monocrystalline semiconductor with a conductive region coupled to a respective access line.

公开(公告)号：US11804270B2

公开(公告)日：2023-10-31

申请号：US17460954

申请日：2021-08-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ji-Yeon Shin ,  Jeong-Don Ihm ,  Byung-Hoon Jeong ,  Jung-June Park

IPC: G11C16/30 ,  G11C7/10 ,  G11C16/26 ,  H10B41/27 ,  H10B41/35 ,  H10B41/40 ,  H10B43/27 ,  H10B43/35 ,  H10B43/40

CPC classification number: G11C16/30 ,  G11C7/1051 ,  G11C16/26 ,  H10B41/27 ,  H10B41/35 ,  H10B41/40 ,  H10B43/27 ,  H10B43/35 ,  H10B43/40

Abstract: A non-volatile memory device includes a memory cell region including a first metal pad and a memory cell array including a plurality of memory cells, and a peripheral circuit region including a second metal pad and an output driver to output a data signal, and vertically connected to the memory cell region by the first metal pad and the second metal pad. The output driver includes a pull-up driver and a pull-down driver. The pull-up driver includes a first pull-up driver having a plurality of P-type transistors and a second pull-up driver having a plurality of N-type transistors. The pull-down driver includes a plurality of N-type transistors. One or more power supply voltages having different voltage levels are selectively applied to the pull-up driver. A first power supply voltage is applied to the first pull-up driver, and a second power supply voltage is applied to the second pull-up driver.

公开(公告)号：US11799038B2

公开(公告)日：2023-10-24

申请号：US17807831

申请日：2022-06-20

Applicant: Lodestar Licensing Group LLC

Inventor： Michael A. Smith

IPC: H10B41/40 ,  G11C16/04 ,  H01L29/94 ,  H01L29/49 ,  H01L21/28 ,  G11C16/30 ,  H01L29/66 ,  H10B43/40

CPC classification number: H01L29/94 ,  G11C16/30 ,  H01L21/28061 ,  H01L29/4933 ,  H01L29/66181 ,  H10B41/40 ,  H10B43/40 ,  G11C16/0483

Abstract: A semiconductor structure includes a capacitor structure comprising an active region comprising opposing field edges parallel to a first horizontal direction and a gate region comprising opposing gate edges parallel to a second horizontal direction transverse to the first horizontal direction. The semiconductor structure also comprises a first dielectric material adjacent at least one of the opposing field edges or the opposing gate edges and a second dielectric material adjacent the active area and abutting portions of the first dielectric material. A height of the second dielectric material in a vertical direction may be less than the height of the first dielectric material. Semiconductor devices and related methods are also disclosed.

公开(公告)号：US20230328989A1

公开(公告)日：2023-10-12

申请号：US18209983

申请日：2023-06-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Gi Yong CHUNG ,  Ho Jin KIM ,  Young-Jin KWON ,  Dong Seog EUN

IPC: H10B43/27 ,  G11C8/14 ,  H10B41/10 ,  H10B41/27 ,  H10B41/40 ,  H10B43/10 ,  H10B43/40

CPC classification number: H10B43/27 ,  G11C8/14 ,  H10B41/10 ,  H10B41/27 ,  H10B41/40 ,  H10B43/10 ,  H10B43/40

Abstract: A nonvolatile memory device includes a substrate including a cell array region, a first gate electrode including an opening on the cell array region of the substrate, a plurality of second gate electrodes stacked above the first gate electrode and including convex portions having an outward curve extending toward the substrate, and a word line cutting region cutting the opening and the convex portions.

公开(公告)号：US11784082B2

公开(公告)日：2023-10-10

申请号：US18092337

申请日：2023-01-01

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Brian Cronquist ,  Deepak C. Sekar

IPC: H01L21/683 ,  H01L21/74 ,  H01L21/762 ,  H01L21/768 ,  H01L21/822 ,  H01L21/8238 ,  H01L21/84 ,  H01L23/48 ,  H01L23/525 ,  H01L27/02 ,  H01L27/06 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/118 ,  H01L27/12 ,  H01L29/423 ,  H01L29/66 ,  H01L29/78 ,  H01L29/788 ,  H01L29/792 ,  G11C8/16 ,  H10B10/00 ,  H10B12/00 ,  H10B20/00 ,  H10B41/20 ,  H10B41/40 ,  H10B41/41 ,  H10B43/20 ,  H10B43/40 ,  H01L23/367 ,  H01L25/065 ,  H01L25/00 ,  H01L23/00 ,  H10B20/20

CPC classification number: H01L21/6835 ,  G11C8/16 ,  H01L21/743 ,  H01L21/76254 ,  H01L21/76898 ,  H01L21/8221 ,  H01L21/823828 ,  H01L21/84 ,  H01L23/481 ,  H01L23/5252 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/092 ,  H01L27/10 ,  H01L27/105 ,  H01L27/11807 ,  H01L27/11898 ,  H01L27/1203 ,  H01L29/4236 ,  H01L29/66272 ,  H01L29/66621 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/66901 ,  H01L29/78 ,  H01L29/7841 ,  H01L29/7843 ,  H01L29/7881 ,  H01L29/792 ,  H10B10/00 ,  H10B10/125 ,  H10B12/053 ,  H10B12/09 ,  H10B12/20 ,  H10B12/50 ,  H10B20/00 ,  H10B41/20 ,  H10B41/40 ,  H10B41/41 ,  H10B43/20 ,  H10B43/40 ,  H01L23/3677 ,  H01L24/13 ,  H01L24/16 ,  H01L24/45 ,  H01L24/48 ,  H01L25/0655 ,  H01L25/0657 ,  H01L25/50 ,  H01L27/1214 ,  H01L27/1266 ,  H01L2221/68368 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2224/131 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16227 ,  H01L2224/16235 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2224/81005 ,  H01L2224/83894 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2924/00011 ,  H01L2924/01002 ,  H01L2924/01004 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01046 ,  H01L2924/01066 ,  H01L2924/01068 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12032 ,  H01L2924/12033 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/1301 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/1579 ,  H01L2924/15311 ,  H01L2924/16152 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01L2924/30105 ,  H10B12/05 ,  H10B20/20

Abstract: A 3D semiconductor device, the device comprising: a first level comprising a first single crystal layer, said first level comprising first transistors, wherein each of said first transistors comprises a single crystal channel; first metal layers interconnecting at least said first transistors; a second metal layer overlaying said first metal layers; and a second level comprising a second single crystal layer, said second level comprising second transistors, wherein said second level overlays said first level, wherein at least one of said first transistors controls power delivery for at least one of said second transistor, wherein said second level is directly bonded to said first level, and wherein said bonded comprises direct oxide to oxide bonds.

公开(公告)号：US11778821B2

公开(公告)日：2023-10-03

申请号：US17037074

申请日：2020-09-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Joon Sung Kim ,  Byoung Il Lee ,  Seong-Hun Jeong ,  Jun Eon Jin

IPC: H01L27/11582 ,  H01L27/11565 ,  H01L23/528 ,  H01L27/1157 ,  H01L27/11573 ,  H01L23/522 ,  H01L27/11575 ,  H10B43/27 ,  G11C8/14 ,  G11C7/18 ,  H10B41/10 ,  H10B41/27 ,  H10B41/40 ,  H10B43/10 ,  H10B43/40

CPC classification number: H10B43/27 ,  G11C7/18 ,  G11C8/14 ,  H01L23/5226 ,  H10B41/10 ,  H10B41/27 ,  H10B41/40 ,  H10B43/10 ,  H10B43/40

Abstract: A semiconductor memory device with improved reliability and a related method are provided. The semiconductor memory device includes a mold structure including a plurality of gate electrodes and a plurality of mold insulating films on a first substrate, a channel structure penetrating the mold structure and crossing a respective level of each of the gate electrodes, a plurality of first insulating patterns in the mold structure, the first insulating patterns including a material different from that of the mold insulating films, and a first through via in the first insulating patterns, the first through via penetrating the first substrate and the mold structure. The gate electrodes include a first word line and a second word line on the first word line. A first distance from the first word line to the first through via is different from a second distance from the second word line to the first through via.

公开(公告)号：US11735501B1

公开(公告)日：2023-08-22

申请号：US18136336

申请日：2023-04-19

Applicant: Monolithic 3D Inc.

Inventor： Zvi Or-Bach ,  Deepak C. Sekar ,  Brian Cronquist

IPC: H01L21/768 ,  H01L23/48 ,  H01L27/06 ,  H01L27/088 ,  H01L29/732 ,  H01L27/118 ,  H01L29/10 ,  H01L29/808 ,  H01L29/66 ,  H01L27/02 ,  H01L29/78 ,  H01L21/74 ,  H10B12/00 ,  H10B41/20 ,  H10B41/40 ,  H10B43/20 ,  H10B43/40 ,  H01L23/544 ,  H01L23/34 ,  H01L23/50 ,  H10B63/00

CPC classification number: H01L23/481 ,  H01L21/743 ,  H01L23/34 ,  H01L23/50 ,  H01L23/544 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/088 ,  H01L27/0886 ,  H01L27/11807 ,  H01L29/1066 ,  H01L29/66272 ,  H01L29/66704 ,  H01L29/66825 ,  H01L29/66901 ,  H01L29/732 ,  H01L29/7841 ,  H01L29/808 ,  H10B12/09 ,  H10B12/20 ,  H10B12/50 ,  H10B41/20 ,  H10B41/40 ,  H10B43/20 ,  H10B43/40 ,  H01L27/0623 ,  H01L2224/16225 ,  H01L2224/73253 ,  H01L2924/12032 ,  H01L2924/1305 ,  H01L2924/13062 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/16152 ,  H10B63/30 ,  H10B63/845

Abstract: A 3D semiconductor device, the device including: a first level including a plurality of first metal layers; a second level, where the second level overlays the first level, where the second level includes at least one single crystal silicon layer, where the second level includes a plurality of transistors, where each transistor of the plurality of transistors includes a single crystal channel, where the second level includes a plurality of second metal layers, where the plurality of second metal layers include interconnections between the transistors of the plurality of transistors, and where the second level is overlaid by a first isolation layer; and a connective path between the plurality of transistors and the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, and where at least one of the transistors includes a four sided gate.

公开(公告)号：US20230240074A1

公开(公告)日：2023-07-27

申请号：US18129145

申请日：2023-03-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： SEONG-HUN JEONG ,  BYOUNGIL LEE ,  JOONHEE LEE

IPC: H10B43/27 ,  H01L23/528 ,  H10B41/10 ,  H10B41/27 ,  H10B41/40 ,  H10B43/10 ,  H10B43/40

CPC classification number: H10B43/27 ,  H01L23/528 ,  H10B41/10 ,  H10B41/27 ,  H10B41/40 ,  H10B43/10 ,  H10B43/40

Abstract: A semiconductor device includes a substrate including a lower horizontal layer and an upper horizontal layer and having a cell array region and a connection region, an electrode structure including electrodes, which are stacked above the substrate, and which extend from the cell array region to the connection region, a vertical channel structure on the cell array region that penetrates the electrode structure and is connected to the substrate, and a separation structure on the connection region that penetrates the electrode structure. The lower horizontal layer has a first top surface in contact with a first portion of the separation structure, and a second top surface in contact with a second portion of the separation structure, and an inflection point at which a height of the lower horizontal layer is abruptly changed between the first top surface and the second top surface.

公开(公告)号：US20230240073A1

公开(公告)日：2023-07-27

申请号：US18063878

申请日：2022-12-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yoonhwan SON ,  Miso KIM ,  Joongshik SHIN ,  Minjae OH

IPC: H10B43/27 ,  H10B43/10 ,  H10B43/35 ,  H10B43/40 ,  H10B41/10 ,  H10B41/27 ,  H10B41/35 ,  H10B41/40 ,  H10B41/50 ,  H10B43/50 ,  H01L21/28

CPC classification number: H10B43/27 ,  H10B43/10 ,  H10B43/35 ,  H10B43/40 ,  H10B41/10 ,  H10B41/27 ,  H10B41/35 ,  H10B41/40 ,  H10B41/50 ,  H10B43/50 ,  H01L29/40117

Abstract: A semiconductor device includes a substrate having a first region and a second region, a first stack structure in the first region, a first channel structure penetrating through the first stack structure and in contact with the substrate, and a second stack structure on the first stack structure and the first channel structure. The device includes a second channel structure penetrating through the second stack structure and connected to the first channel structure, a first molding structure in the second region, a first alignment structure penetrating through the first molding structure and in contact with the substrate, and a second molding structure on the first molding structure and the first alignment structure. The device includes a second alignment structure penetrating through the second molding structure and connected to the first alignment structure, and a protective layer between the first molding structure and the second molding structure.

公开(公告)号：US11711913B2

公开(公告)日：2023-07-25

申请号：US17344942

申请日：2021-06-10

Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.

Inventor： Weihua Cheng ,  Jun Liu

IPC: H10B10/00 ,  H01L21/76 ,  H01L23/00 ,  G11C14/00 ,  G11C16/04 ,  H01L21/50 ,  H01L25/18 ,  H01L25/00 ,  H01L27/06 ,  H01L29/04 ,  H01L29/16 ,  H10B12/00 ,  H10B41/27 ,  H10B41/40 ,  H10B43/20 ,  H10B43/27 ,  H10B43/35 ,  H10B43/40

CPC classification number: H10B10/12 ,  G11C14/0018 ,  G11C16/0483 ,  H01L21/50 ,  H01L21/76 ,  H01L24/03 ,  H01L24/05 ,  H01L24/06 ,  H01L24/08 ,  H01L24/27 ,  H01L24/29 ,  H01L24/32 ,  H01L24/73 ,  H01L24/83 ,  H01L24/94 ,  H01L25/18 ,  H01L25/50 ,  H01L27/0688 ,  H01L29/04 ,  H01L29/16 ,  H10B12/02 ,  H10B12/033 ,  H10B12/05 ,  H10B12/31 ,  H10B12/50 ,  H10B41/27 ,  H10B41/40 ,  H10B43/20 ,  H10B43/27 ,  H10B43/35 ,  H10B43/40 ,  H01L2224/04042 ,  H01L2224/05569 ,  H01L2224/08145 ,  H01L2224/291 ,  H01L2224/32145 ,  H01L2224/73215 ,  H01L2224/80895 ,  H01L2224/80896 ,  H01L2224/83895 ,  H01L2224/83896

Abstract: First semiconductor structures are formed on a first wafer. At least one of the first semiconductor structures includes a programmable logic device, an array of static random-access memory (SRAM) cells, and a first bonding layer including first bonding contacts. Second semiconductor structures are formed on a second wafer. At least one of the second semiconductor structures includes an array of NAND memory cells and a second bonding layer including second bonding contacts. The first wafer and the second wafer are bonded in a face-to-face manner, such that the at least one of the first semiconductor structures is bonded to the at least one of the second semiconductor structures. The first bonding contacts of the first semiconductor structure are in contact with the second bonding contacts of the second semiconductor structure at a bonding interface. The bonded first and second wafers are diced into dies. At least one of the dies includes the bonded first and second semiconductor structures.