Three-dimensional semiconductor device having variable resistance structure

    公开(公告)号:US12063795B2

    公开(公告)日:2024-08-13

    申请号:US17542886

    申请日:2021-12-06

    申请人: SK hynix Inc.

    发明人: Jae Hyun Han

    摘要: A semiconductor device includes a substrate, a first bit line disposed on the substrate, a first tunnel insulation layer disposed on the first bit line, a variable resistance structure disposed on the first tunnel insulation layer and having a pillar structure, a second tunnel insulation layer disposed on an upper surface of the variable resistance structure, a second bit line disposed on the second tunnel insulation layer, a barrier insulation layer disposed on a sidewall surface of the variable resistance structure, and a word line disposed on the barrier insulation layer. A dielectric constant of the barrier insulation layer is greater than a dielectric constant of each of the first and second tunnel insulation layers.

    Three-dimensional (3D) semiconductor memory device

    公开(公告)号:US12022658B2

    公开(公告)日:2024-06-25

    申请号:US18356064

    申请日:2023-07-20

    摘要: A 3D semiconductor memory device includes a peripheral circuit structure including a first row decoder region, a second row decoder region, and a control circuit region between the first and second row decoder regions, a first electrode structure and a second electrode structure on the peripheral circuit structure, spaced apart in a first direction, and each including stacked electrodes, a mold structure on the peripheral circuit structure between the first and second electrode structures and including stacked sacrificial layers, vertical channel structures penetrating the first and second electrode structures, a separation insulating pattern provided between the first electrode structure and the mold structure and penetrating the mold structure, and a separation structure intersecting the first electrode structure in the first direction and extending to the separation insulating pattern, wherein a maximum width of the separation insulating pattern in a second direction is greater than a maximum width of the separation structure in the second direction.

    Semiconductor storage device having bit line selection circuit formed in memory cell array

    公开(公告)号:US12014799B2

    公开(公告)日:2024-06-18

    申请号:US17842766

    申请日:2022-06-16

    发明人: Naohito Morozumi

    CPC分类号: G11C7/18 G11C7/1039 G11C7/12

    摘要: The disclosure provides a semiconductor storage device that realizes high integration and improves reliability. A bit line selection circuit (100) of a flash memory includes transistors (BLSeO, BLSeE, BLSoO, BLSoE) in the column direction of bit lines (BL0-BL3), selecting a bit line pair composed of an even-numbered bit line (BL0) and an odd-numbered bit line (BL3) is selected by the transistors, in which a bit line pair (BL1, BL2) adjacent to the selected bit line pair is set as a non-selected bit line pair, and the selected bit line pair (BL0, BL3) is connected to page buffer/sensing circuit through an output node (BLS0, BLS1).