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公开(公告)号:CN102214621B
公开(公告)日:2014-12-03
申请号:CN201110070897.1
申请日:2011-03-21
Applicant: 台湾积体电路制造股份有限公司
IPC: H01L23/48 , H01L23/367 , H01L25/075 , H01L33/64 , H01L21/48
CPC classification number: H01L21/76898 , H01L21/3065 , H01L21/486 , H01L21/6835 , H01L21/76843 , H01L21/76876 , H01L21/76877 , H01L21/76879 , H01L23/147 , H01L23/481 , H01L23/49827 , H01L24/29 , H01L24/48 , H01L24/49 , H01L24/97 , H01L33/005 , H01L33/0054 , H01L33/486 , H01L33/62 , H01L33/641 , H01L33/644 , H01L33/647 , H01L2221/68345 , H01L2221/68359 , H01L2224/16 , H01L2224/32225 , H01L2224/32506 , H01L2224/48091 , H01L2224/48227 , H01L2224/48233 , H01L2224/49113 , H01L2224/73265 , H01L2224/97 , H01L2924/00014 , H01L2924/01019 , H01L2924/01029 , H01L2924/01078 , H01L2924/01079 , H01L2924/01322 , H01L2924/04941 , H01L2924/12041 , H01L2924/14 , H01L2924/181 , H01L2924/19041 , H01L2933/0066 , H01L2924/3512 , H01L2924/00 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明提供一种半导体装置封装体及其制造方法,其中,具有穿硅插塞(或导孔)的基板可不需使用导电凸块。工艺流程非常简单且有成本效益。本结构将个别的硅穿孔、重分布层及导电凸块结构结合至单一结构中。经由结合个别的结构,可以得到一具有高散热能力的低电阻电性连接。另外,具有穿硅插塞(或导孔,或沟槽)的基板也使得多个芯片可以封装在一起。穿硅沟槽可围绕一个或多个芯片,以在工艺中避免铜扩散到邻近装置。另外,多个具有相似或相异功能的芯片可整合在硅穿孔基板上。具不同图案的穿硅插塞可用在一半导体芯片之下以增进散热及解决工艺问题。
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公开(公告)号:CN102768965A
公开(公告)日:2012-11-07
申请号:CN201210214671.9
申请日:2009-01-20
Applicant: 瑞萨电子株式会社
IPC: H01L21/60 , H01L21/56 , H01L23/495 , H01L23/29
CPC classification number: H01L24/83 , H01L23/49513 , H01L23/49524 , H01L23/49562 , H01L23/49582 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/37 , H01L24/40 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/743 , H01L24/84 , H01L2224/04026 , H01L2224/274 , H01L2224/29101 , H01L2224/2919 , H01L2224/29339 , H01L2224/32245 , H01L2224/32506 , H01L2224/37124 , H01L2224/37147 , H01L2224/40091 , H01L2224/40245 , H01L2224/40247 , H01L2224/45014 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48247 , H01L2224/48465 , H01L2224/49111 , H01L2224/49175 , H01L2224/73219 , H01L2224/73221 , H01L2224/73265 , H01L2224/743 , H01L2224/83194 , H01L2224/83439 , H01L2224/83801 , H01L2224/83805 , H01L2224/8384 , H01L2224/8385 , H01L2224/83855 , H01L2224/85205 , H01L2924/00011 , H01L2924/01005 , H01L2924/01006 , H01L2924/01007 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01022 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01049 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/01322 , H01L2924/014 , H01L2924/0665 , H01L2924/0781 , H01L2924/10253 , H01L2924/1305 , H01L2924/13055 , H01L2924/1306 , H01L2924/13091 , H01L2924/181 , H01L2924/30105 , H01L2924/00014 , H01L2924/00 , H01L2924/01026 , H01L2924/3512 , H01L2924/00015 , H01L2224/83205 , H01L2924/00012
Abstract: 本发明涉及半导体装置及其制造方法。本发明使得介于半导体芯片和芯片垫部之间的导电性接着剂的接合可靠性提高。硅芯片3A搭载在与漏极引线Ld一体形成的芯片垫部4D上,且在硅芯片3A的主面上形成有源极垫7。硅芯片3A的背面构成一功率MOSFET的漏极,且经由Ag膏5而接合于芯片垫部4D上。源极引线Ls与源极垫7是通过Al带10而电连接。在硅芯片3A的背面上形成有Ag纳米粒子涂膜9A,在芯片垫部4D与引线(漏极引线Ld、源极引线Ls)的表面上形成有Ag纳米粒子涂膜9B。
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公开(公告)号:CN102292280A
公开(公告)日:2011-12-21
申请号:CN201080005182.1
申请日:2010-01-13
Applicant: 飞思卡尔半导体公司
Inventor: 鲁本·B·蒙特兹 , 亚历克斯·P·帕马塔特
CPC classification number: H01L23/10 , B81B2207/097 , B81C1/00269 , B81C2203/0109 , B81C2203/019 , H01L21/50 , H01L24/02 , H01L24/03 , H01L24/05 , H01L24/27 , H01L24/29 , H01L24/32 , H01L24/83 , H01L24/94 , H01L2224/02 , H01L2224/022 , H01L2224/036 , H01L2224/0391 , H01L2224/04026 , H01L2224/05558 , H01L2224/05572 , H01L2224/05638 , H01L2224/2745 , H01L2224/27452 , H01L2224/2746 , H01L2224/276 , H01L2224/29013 , H01L2224/29016 , H01L2224/29083 , H01L2224/29111 , H01L2224/29117 , H01L2224/29124 , H01L2224/29138 , H01L2224/29144 , H01L2224/29155 , H01L2224/29157 , H01L2224/29166 , H01L2224/29169 , H01L2224/29181 , H01L2224/29184 , H01L2224/32145 , H01L2224/32225 , H01L2224/32502 , H01L2224/32506 , H01L2224/83193 , H01L2224/83203 , H01L2224/83411 , H01L2224/83424 , H01L2224/83444 , H01L2224/83455 , H01L2224/83457 , H01L2224/83466 , H01L2224/83469 , H01L2224/83481 , H01L2224/83484 , H01L2224/83805 , H01L2224/94 , H01L2924/10157 , H01L2924/15159 , H01L2924/164 , H01L2924/01032 , H01L2924/01014 , H01L2924/01029 , H01L2924/00014 , H01L2924/00012 , H01L2224/83
Abstract: 在一个实施例中,一种用于将第一衬底(103)接合至第二衬底(303)的方法包括在第一衬底之上形成包括金属的层。在一个实施例中,包括金属的层包围半导体器件,其可为微电子机械系统(MEMS)器件。在第二衬底(303)上,形成包括硅(401)的第一层。在第一层上形成包括锗和硅的第二层(403)。在第二层上形成包括锗的第三层(405)。使得第三层与包括金属的层接触。向第三层和包括金属的层施加热量(一些实施例中还有压力),以在第一衬底和第二衬底之间形成机械接合材料,其中,机械接合材料是导电性的。在机械接合物包围诸如MEMS的半导体器件的情况下,机械接合物用作保护MEMS的气密性密封是特别有利的。
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公开(公告)号:CN102214617A
公开(公告)日:2011-10-12
申请号:CN201110038181.3
申请日:2011-02-11
Applicant: 台湾积体电路制造股份有限公司
IPC: H01L23/13 , H01L23/367 , H01L33/64
CPC classification number: H01L21/76898 , H01L21/3065 , H01L21/486 , H01L21/6835 , H01L21/76843 , H01L21/76876 , H01L21/76877 , H01L21/76879 , H01L23/147 , H01L23/481 , H01L23/49827 , H01L24/29 , H01L24/48 , H01L24/49 , H01L24/97 , H01L33/005 , H01L33/0054 , H01L33/486 , H01L33/62 , H01L33/641 , H01L33/644 , H01L33/647 , H01L2221/68345 , H01L2221/68359 , H01L2224/16 , H01L2224/32225 , H01L2224/32506 , H01L2224/48091 , H01L2224/48227 , H01L2224/48233 , H01L2224/49113 , H01L2224/73265 , H01L2224/97 , H01L2924/00014 , H01L2924/01019 , H01L2924/01029 , H01L2924/01078 , H01L2924/01079 , H01L2924/01322 , H01L2924/04941 , H01L2924/12041 , H01L2924/14 , H01L2924/181 , H01L2924/19041 , H01L2933/0066 , H01L2924/3512 , H01L2924/00 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明提供的半导体封装基板具有穿透硅插塞(或通孔)可提供需要热管理的半导体芯片水平与垂直的散热途径。具有高负载比设计的穿透硅插塞能有效增加散热性。当穿透硅插塞采用双面梳图案时,其负载比可高达大于或等于50%。具有高负载比的封装基板可用于产生大量热的半导体芯片。举例来说,半导体芯片可为发光二极管芯片。
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公开(公告)号:CN101641785B
公开(公告)日:2011-07-13
申请号:CN200780049592.4
申请日:2007-11-09
Applicant: 怡得乐QLP公司
IPC: H01L23/14
CPC classification number: H01L23/142 , H01L21/4803 , H01L23/047 , H01L23/10 , H01L23/4924 , H01L23/562 , H01L24/29 , H01L24/32 , H01L24/48 , H01L2224/29101 , H01L2224/29109 , H01L2224/29111 , H01L2224/29144 , H01L2224/29183 , H01L2224/32245 , H01L2224/32506 , H01L2224/48091 , H01L2224/48247 , H01L2224/73265 , H01L2224/83192 , H01L2224/83444 , H01L2224/83455 , H01L2224/83805 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01027 , H01L2924/01029 , H01L2924/0103 , H01L2924/01032 , H01L2924/01033 , H01L2924/0104 , H01L2924/01042 , H01L2924/01046 , H01L2924/01047 , H01L2924/01049 , H01L2924/0105 , H01L2924/01051 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/01322 , H01L2924/0133 , H01L2924/014 , H01L2924/10329 , H01L2924/15747 , H01L2924/16195 , H01L2924/3511 , H01L2924/00 , H01L2924/01014 , H01L2924/3512 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 一种在铜凸缘和芯片装配之间有延展层的微电路封装体。所述延展层吸收了凸缘与安装在凸缘上的半导体器件之间的应力,可以大量减少作用于半导体器件的应力。此外,所述封装体提供了铜凸缘与TCE接近于铜的聚合物介电材料的组合,可以得到可靠性和传导性都有改善的低应力结构。
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公开(公告)号:CN101290920A
公开(公告)日:2008-10-22
申请号:CN200710136914.0
申请日:2007-07-23
Inventor: 漆畑博可
IPC: H01L23/488 , H01L25/00 , H01L25/065
CPC classification number: H01L24/85 , H01L23/4952 , H01L23/49562 , H01L23/49575 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/78 , H01L24/83 , H01L24/97 , H01L2224/291 , H01L2224/32245 , H01L2224/32506 , H01L2224/45015 , H01L2224/45124 , H01L2224/45144 , H01L2224/48091 , H01L2224/48247 , H01L2224/48465 , H01L2224/49111 , H01L2224/49171 , H01L2224/73265 , H01L2224/78301 , H01L2224/83801 , H01L2224/83851 , H01L2224/85181 , H01L2224/85205 , H01L2224/97 , H01L2924/00011 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01029 , H01L2924/01033 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01322 , H01L2924/014 , H01L2924/07802 , H01L2924/12041 , H01L2924/13091 , H01L2924/181 , H01L2924/19043 , H01L2924/20752 , H01L2924/00014 , H01L2224/85 , H01L2924/00 , H01L2924/00012 , H01L2224/83205
Abstract: 一种半导体装置,小型且防止引线接合时的引线的变形。半导体装置(10A)具备:岛(11)、安装于岛(11)下面的半导体元件(13)、接近岛(11)设置的引线(20C、20F)、将这些构成要素一体密封的密封树脂(23)。另外,在本发明的半导体装置(10A)中,半导体元件(13)的电极(19A)等与邻接未设置自岛(11)连续的引线(20B)等的侧边的引线连接。
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公开(公告)号:CN101266955A
公开(公告)日:2008-09-17
申请号:CN200710109019.X
申请日:2007-06-12
Applicant: 台湾积体电路制造股份有限公司
Inventor: 张仕承
IPC: H01L23/48 , H01L23/488 , H01L21/60
CPC classification number: H01L23/481 , H01L24/16 , H01L24/28 , H01L24/48 , H01L24/73 , H01L2224/04042 , H01L2224/16 , H01L2224/2919 , H01L2224/32506 , H01L2224/48091 , H01L2224/8389 , H01L2924/00014 , H01L2924/01006 , H01L2924/01033 , H01L2924/01082 , H01L2924/01322 , H01L2924/14 , H01L2924/181 , H01L2924/19043 , H01L2924/30105 , H01L2924/0665 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明提供一种半导体装置及其制造方法。该半导体装置包括:半导体晶粒,具有与电路元件连接的电源与接地布线;多个贯穿晶圆的介层窗,置于该半导体晶粒内,与该电源及接地布线连接;基板,与该半导体晶粒连接,且该基板具有与该贯穿晶圆的介层窗连接且用于将电源从该基板传递至该电路元件的电源与接地引线。本发明结构紧凑,使用嵌入芯片的导电贯穿晶圆的介层窗直接将电源从封装基板传送至芯片背面,电路长度缩短,且电路的电阻与层间电极的电容同时减少,电性能稳定。本发明具有节省空间与节能的优点,并可以节省制造成本。
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公开(公告)号:CN102214617B
公开(公告)日:2014-05-14
申请号:CN201110038181.3
申请日:2011-02-11
Applicant: 台湾积体电路制造股份有限公司
IPC: H01L23/13 , H01L23/367 , H01L33/64
CPC classification number: H01L21/76898 , H01L21/3065 , H01L21/486 , H01L21/6835 , H01L21/76843 , H01L21/76876 , H01L21/76877 , H01L21/76879 , H01L23/147 , H01L23/481 , H01L23/49827 , H01L24/29 , H01L24/48 , H01L24/49 , H01L24/97 , H01L33/005 , H01L33/0054 , H01L33/486 , H01L33/62 , H01L33/641 , H01L33/644 , H01L33/647 , H01L2221/68345 , H01L2221/68359 , H01L2224/16 , H01L2224/32225 , H01L2224/32506 , H01L2224/48091 , H01L2224/48227 , H01L2224/48233 , H01L2224/49113 , H01L2224/73265 , H01L2224/97 , H01L2924/00014 , H01L2924/01019 , H01L2924/01029 , H01L2924/01078 , H01L2924/01079 , H01L2924/01322 , H01L2924/04941 , H01L2924/12041 , H01L2924/14 , H01L2924/181 , H01L2924/19041 , H01L2933/0066 , H01L2924/3512 , H01L2924/00 , H01L2924/00012 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
Abstract: 本发明提供的半导体封装基板具有穿透硅插塞(或通孔)可提供需要热管理的半导体芯片水平与垂直的散热途径。具有高占空比设计的穿透硅插塞能有效增加散热性。当穿透硅插塞采用双面梳图案时,其占空比可高达大于或等于50%。具有高占空比的封装基板可用于产生大量热的半导体芯片。举例来说,半导体芯片可为发光二极管芯片。
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公开(公告)号:CN101436572B
公开(公告)日:2012-07-04
申请号:CN200810188630.0
申请日:2004-01-29
Applicant: 怡得乐QLP公司
Inventor: 迈克尔·齐默尔曼
IPC: H01L23/047 , H01L23/13 , H01L23/492 , H01L23/498
CPC classification number: H01L21/50 , H01L23/047 , H01L23/10 , H01L23/492 , H01L23/49861 , H01L23/562 , H01L23/564 , H01L24/29 , H01L24/48 , H01L24/85 , H01L2224/32506 , H01L2224/45099 , H01L2224/48247 , H01L2224/73265 , H01L2224/85205 , H01L2924/00014 , H01L2924/01012 , H01L2924/0102 , H01L2924/01078 , H01L2924/01079 , H01L2924/01322 , H01L2924/10253 , H01L2924/12042 , H01L2924/14 , H01L2924/16195 , H01L2924/16315 , H01L2924/181 , H01L2924/18301 , H01L2924/3511 , Y10T428/24132 , H01L2924/3512 , H01L2924/00 , H01L2224/45015 , H01L2924/207
Abstract: 一种用于容纳半导体或其它集成电路器件(“管芯”)的电路封装,包括高铜凸缘、一个或多个高铜引线以及模塑到凸缘和引线的液晶聚合物框架。凸缘包括楔形榫形沟槽或其它框架保持部件,该保持部件与模塑的框架机械互锁。在模塑期间,框架的一部分形成冻结在框架保持部分中或其周围的键。引线包括一个或多个引线保持部件以与框架机械互锁。在模塑期间,框架的一部分冻结在这些引线保持部件中或其相邻处。框架包括阻止湿气渗透并使其热膨胀系数(CTE)与引线和凸缘的热膨胀系数相匹配的化合物。将框架设计为能承受管芯附着温度。在将管芯附着到凸缘之后,将盖子超声焊接到框架。
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公开(公告)号:CN101728288A
公开(公告)日:2010-06-09
申请号:CN200910180727.1
申请日:2009-10-21
Applicant: 先进自动器材有限公司
IPC: H01L21/603 , H01L33/00 , B23K1/00 , B23K1/20 , B23K35/24
CPC classification number: H01L24/83 , H01L24/29 , H01L24/75 , H01L2224/29101 , H01L2224/29111 , H01L2224/29144 , H01L2224/2919 , H01L2224/32506 , H01L2224/83191 , H01L2224/838 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01079 , H01L2924/01082 , H01L2924/0132 , H01L2924/01322 , H01L2924/014 , H01L2924/0665 , H01L2924/12041 , H01L2924/157 , H01L2924/15787 , H01L2924/3025 , H01L2924/00 , H01L2924/00014
Abstract: 本发明公开了一种键合包含有焊料层的晶粒的方法,焊料层具有熔点Tm,该方法包含有以下步骤:将键合头加热到键合头设定温度T1,T1高于Tm;将衬底加热到衬底设定温度T2,T2低于Tm;使用键合头拾取晶粒,并朝向温度T1加热晶粒,以便于熔化焊料层;将晶粒的焊料层按压在衬底上,以便于键合晶粒到衬底上;其后将键合头与晶粒分开,以便于焊料层朝向温度T2冷却并固化。
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