Methods for Hybrid Wafer Bonding Integrated with CMOS Processing
    4.
    发明申请
    Methods for Hybrid Wafer Bonding Integrated with CMOS Processing 有权
    与CMOS处理集成的混合晶片焊接方法

    公开(公告)号:US20140273347A1

    公开(公告)日:2014-09-18

    申请号:US13903700

    申请日:2013-05-28

    Abstract: Methods for forming an integrated device using CMOS processing with wafer bonding. In an embodiment, a method is disclosed that includes defining an integrated circuit function using a front-end substrate having one or more active devices and a back-end substrate having connections formed in metal layers in dielectric material, wherein the back-end substrate is free from active devices; manufacturing the front-end substrate in a first semiconductor process; more or less simultaneously, manufacturing the back-end substrate in a second semiconductor process; physically contacting bonding surfaces of the front-end substrate and the back-end substrate; and performing wafer bonding to form bonds between the front-end and back-end substrates to form an integrated circuit. Additional methods are disclosed.

    Abstract translation: 利用晶片接合的CMOS处理形成集成器件的方法。 在一个实施例中,公开了一种方法,其包括使用具有一个或多个有源器件的前端衬底和具有形成在介电材料中的金属层中的连接的后端衬底定义集成电路功能,其中后端衬底是 没有活动设备; 在第一半导体工艺中制造前端衬底; 或多或少同时地在第二半导体工艺中制造后端衬底; 物理接触前端基板和后端基板的接合表面; 并执行晶片接合以在前端和后端衬底之间形成结合,以形成集成电路。 公开了另外的方法。

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