Photosensitive compound, photosensitive composition, method for resist pattern formation, and process for device production
    3.
    发明授权
    Photosensitive compound, photosensitive composition, method for resist pattern formation, and process for device production 失效
    感光性化合物,感光性组合物,抗蚀剂图案形成方法和装置制造方法

    公开(公告)号:US07651834B2

    公开(公告)日:2010-01-26

    申请号:US11746747

    申请日:2007-05-10

    IPC分类号: G03F7/30 G03F7/004

    摘要: A process for forming a resist pattern comprises the steps of applying on a substrate to form a photosensitive resist layer a photosensitive composition comprising at least one photosensitive compound having, in the molecule, two or more structural units represented by C6R2-6—CHR1—OR7 or C6R2-6—CHR1—COOR7 where R1 is a hydrogen atom or an alkyl group, at least one of R2, R3, R4, R5, and R6 is a nitro group, and others are selected from the group consisting of a hydrogen atom, a halogen atom, an alkyl, an alkoxy, a phenyl, a naphthyl, and an alkyl in which a part or the entire of hydrogen atoms are substituted by a fluorine atom, and R7 is a substituted or unsubstituted phenylene or naphthylene group dissolved in an organic solvent, irradiating the resist layer selectively with a radiation ray, and developing a portion irradiated by the ray to form a pattern of the resist layer.

    摘要翻译: 用于形成抗蚀剂图案的方法包括以下步骤:在基材上施加光敏抗蚀剂层,所述光敏组合物包含至少一种在分子中具有两个或更多个由C 6 R 2 -6-CHR 1 -OR 7表示的结构单元的光敏化合物 或C6R2-6-CHR1-COOR7,其中R1是氢原子或烷基,R2,R3,R4,R5和R6中的至少一个是硝基,其它选自氢原子 卤素原子,烷基,烷氧基,苯基,萘基和其中部分或全部氢原子被氟原子取代的烷基,R7是被取代或未取代的亚苯基或亚萘基 有机溶剂,用辐射线选择性地照射抗蚀剂层,并且显影由光线照射的部分以形成抗蚀剂层的图案。

    Alpha-hydroperoxyisopropylphenyl compounds and process for preparing the
same
    10.
    发明授权
    Alpha-hydroperoxyisopropylphenyl compounds and process for preparing the same 失效
    α-氢过氧异丙基苯基化合物及其制备方法

    公开(公告)号:US5043142A

    公开(公告)日:1991-08-27

    申请号:US350707

    申请日:1989-11-17

    摘要: .alpha.-Hydroperoxyisopropylphenyl compounds are useful as an organic hydroxyperoxide content in test compositions for the measurement of peroxide-active substances and are effectively utilized for detecting peroxide-active substances such as blood or hemoglobin (occult blood).Test devices for the detection of occult blood are constituted of a carrier in which organic hydroperoxide, coloration indicator, buffering agent, wetting agent, activating agent and stabilizer are impregnated. If hemoglobin is present in a specimen, the organic hydroperoxide is activated to produce nascent oxygen with which the indicator is oxidized and develops color. Although 2,5-dimethylhexane-2,5-dihydroperoxide and cumene hydroperoxide have been employed as the organic hydroperoxide, they are disadvantageous in remarkable reduction of the detective sensitivity due to lack of the stability with elapse of time, pseudonegative judgement when vitamin C is contained in urine specimen, reduction of capacity in the multi-item test pieces for the detection of urinary components caused by discoloration of the adjacent test pieces, low coloration sensitivity, etc.The compounds of the present invention are improved in the above-mentioned defects.As typical examples of the .alpha.-hydroperoxy-isopropylphenyl compounds according to the invention are mentioned 4-(2,4,7-trioxaoctyl) cumene hydroperoxide, 4-(.alpha.-operoxyisopropyl)benzyl benzyl ether, 4-octyl cumene -hydroperoxyisopropyl)benzyl benzyl ether, 4-octyl cumene hydroperoxide, bis[4-(.alpha.-hydroperoxyisopropyl)benzyl]ether, N,N-dimethyl-]4-(.alpha.-hydroperoxyisopropyl)benzene]-sulfoamide and the like.

    摘要翻译: PCT No.PCT / JP87 / 00831 Sec。 371日期:一九八九年十一月十七日 102(e)日期:1989年11月17日PCT提交1987年10月29日PCT公布。 出版物WO88 / 03134 日期:1988年5月5日.α-过氧异丙基苯基化合物可用作测试组合物中有机羟基过氧化物含量,用于测量过氧化物活性物质,并有效用于检测过氧化物活性物质如血液或血红蛋白(潜血)。 用于检测隐血的测试装置由浸渍有机氢过氧化物,着色指示剂,缓冲剂,润湿剂,活化剂和稳定剂的载体构成。 如果血红蛋白存在于样品中,有机氢过氧化物被活化以产生新生氧,指示剂被氧化并显色。 虽然已经使用了2,5-二甲基己烷-2,5-二氢过氧化物和氢过氧化枯烯作为有机氢过氧化物,但由于缺乏稳定性随着时间的推移,检测灵敏度显着降低是不利的,当维生素C为 尿样中含有的尿液成分的检出量降低,相邻试验片变色引起的尿成分检测能力降低,着色敏感性差等。本发明的化合物在上述缺陷中得到改善 。 根据本发明的α-氢过氧基 - 异丙基苯基化合物的典型实例是4-(2,4,7-三氧代辛基)氢过氧化异丙苯,4-(α-过氧异丙基)苄基苄基醚,4-辛基异丙基氢过氧异丙基)苄基 苄基醚,4-辛基氢过氧化枯烯,双[4-(α-氢过氧异丙基)苄基]醚,N,N-二甲基 - ] 4-(α-氢过氧异丙基)苯] - 磺酰胺等。