SEMICONDUCTOR DEVICE WITH LOW PINCH-OFF VOLTAGE AND METHODS FOR MANUFACTURING THE SAME

    公开(公告)号:US20230261116A1

    公开(公告)日:2023-08-17

    申请号:US18170034

    申请日:2023-02-16

    CPC classification number: H01L29/808 H01L27/085 H01L21/8232

    Abstract: A semiconductor device includes a junction field effect transistor (JFET) device. The JFET device includes a substrate, a first well region, a first source region, a first drain region, a first gate region and a second gate region. A channel region is formed between the first source region and the first drain region along a first direction. The first gate region and the second gate region are located within the channel region, the first gate region includes a first surface extending from a top surface to a bottom surface of the first gate region, and the second gate region includes a second surface extending from a top surface to a bottom surface of the second gate region. The first surface is facing a second direction perpendicular to the first direction toward the second surface. A method of manufacturing such semiconductor device is also provided.

    Fin-double-gated junction field effect transistor
    6.
    发明授权
    Fin-double-gated junction field effect transistor 有权
    翅片双栅结场效应晶体管

    公开(公告)号:US09536789B1

    公开(公告)日:2017-01-03

    申请号:US15007616

    申请日:2016-01-27

    Abstract: A method of forming a double-gated junction field effect transistors (JFET) and a tri-gated metal-oxide-semiconductor field effect transistor (MOSFET) on a common substrate is provided. The double-gated JFET is formed in a first region of a substrate by forming a semiconductor gate electrode contacting sidewall surfaces of a first channel region of a first semiconductor fin and a top surface of a portion of a first fin cap atop the first channel region. The tri-gated MOSFET is formed in a second region of the substrate by forming a metal gate stack contacting a top surface and sidewall surfaces of a second channel region of a second semiconductor fin.

    Abstract translation: 提供了在共同的基板上形成双门控结型场效应晶体管(JFET)和三栅极金属氧化物半导体场效应晶体管(MOSFET)的方法。 双门控JFET通过形成半导体栅极电极而形成在衬底的第一区域中,半导体栅电极接触第一半导体鳍片的第一沟道区域的侧壁表面和在第一沟道区域顶部的第一鳍片帽部分的顶表面 。 三栅极MOSFET通过形成接触第二半导体鳍片的第二沟道区域的顶表面和侧壁表面的金属栅叠层形成在衬底的第二区域中。

    Electrostatic Discharge Protection Structure And Fabrication Method Thereof
    8.
    发明申请
    Electrostatic Discharge Protection Structure And Fabrication Method Thereof 审中-公开
    静电放电保护结构及其制作方法

    公开(公告)号:US20160181237A1

    公开(公告)日:2016-06-23

    申请号:US15055613

    申请日:2016-02-28

    Abstract: An electrostatic discharge protection structure includes: substrate of a first type of conductivity, well region of a second type of conductivity, substrate contact region in the substrate and of the first type of conductivity, well contact region in the well region and of the second type of conductivity, substrate counter-doped region between the substrate contact region and the well contact region and of the second type of conductivity, well counter-doped region between the substrate contact region and the well contact region and of the first type of conductivity, communication region at a lateral junction between the substrate and the well region, first isolation region between the substrate counter-doped region and the communication region, second isolation region between the well counter-doped region and the communication region, oxide layer having one end on the first isolation region and another end on the substrate, and field plate structure on the oxide layer.

    Abstract translation: 静电放电保护结构包括:第一导电类型的衬底,第二导电类型的阱区,衬底中的衬底接触区域和第一类型的导电性,阱区和第二类型的阱接触区域 在衬底接触区域和阱接触区域之间的导电性,衬底反掺杂区域和第二类型的导电性,衬底接触区域和阱接触区域之间的良好的反掺杂区域以及第一类型的导电性,通信 在衬底和阱区之间的横向结合处的区域,衬底反掺杂区域和连通区域之间的第一隔离区域,阱对掺杂区域和连通区域之间的第二隔离区域, 第一隔离区和衬底上的另一端,以及氧化物层上的场板结构。

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