Complementary switch element
    2.
    发明授权

    公开(公告)号:US11972985B2

    公开(公告)日:2024-04-30

    申请号:US17418104

    申请日:2019-12-25

    发明人: Katsuhiro Tomioka

    摘要: This complementary switch element includes: a first TFET having a first conductive channel; and a second TFET having a second conductive channel. Each of the first TFET and the second TFET includes: a group IV semiconductor substrate doped in a first conductive type; a nanowire which is formed of a group III-V compound semiconductor and is disposed on the group IV semiconductor substrate; a first electrode connected to the group IV semiconductor substrate; a second electrode connected to the nanowire; and a gate electrode. The nanowire includes a first area connected to the group IV semiconductor substrate and a second area doped in a second conductive type. In the first TFET, the second electrode is a source electrode, and the first electrode is a drain electrode. In the second TFET, the first electrode is a source electrode, and the second electrode is a drain electrode.

    GATE TRENCH POWER SEMICONDUCTOR DEVICES HAVING IMPROVED DEEP SHIELD CONNECTION PATTERNS

    公开(公告)号:US20230369486A1

    公开(公告)日:2023-11-16

    申请号:US18355683

    申请日:2023-07-20

    申请人: Wolfspeed, Inc.

    摘要: A power semiconductor device includes a semiconductor layer structure comprising a drift region of a first conductivity type and a well region of a second conductivity type, a plurality of gate trenches including respective gate insulating layers and gate electrodes therein extending into the drift region, respective shielding patterns of the second conductivity type in respective portions of the drift region adjacent the gate trenches, and respective conduction enhancing regions of the first conductivity type in the respective portions of the drift region. The drift region comprises a first concentration of dopants of the first conductivity type, and the respective conduction enhancing regions comprise a second concentration of the dopants of the first conductivity type that is higher than the first concentration. Related devices and fabrication methods are also discussed.