METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

    公开(公告)号:US20240178306A1

    公开(公告)日:2024-05-30

    申请号:US18432923

    申请日:2024-02-05

    发明人: Katsumi NAKAMURA

    摘要: A semiconductor device includes: an N− drift layer of a first conductivity type formed in the semiconductor substrate; a P base layer formed on the N− drift layer; and an N buffer layer of the first conductivity type formed under the N− drift layer and higher in peak impurity concentration than the N− drift layer. The N buffer layer includes: a first buffer layer in which a trap level derived from lattice defect is not detected by a photoluminescence method; and a second buffer layer provided between the first buffer layer and the N− drift layer and in which two types of trap levels derived from lattice defect are detected by the photoluminescence method.

    METHOD OF MANUFACTURING WIDE-BAND GAP SEMICONDUCTOR DEVICE

    公开(公告)号:US20240170583A1

    公开(公告)日:2024-05-23

    申请号:US18430609

    申请日:2024-02-01

    摘要: A wide-band gap semiconductor device and a method of manufacturing the same are provided. The wide-band gap semiconductor device of the disclosure includes a substrate, an epitaxial layer, an array of merged PN junction Schottky (MPS) diode, and an edge termination area surrounding the array of MPS diode. The epitaxial layer includes a first plane, a second plane, and trenches between the first plane and the second plane. The array of MPS diode is formed in the first plane of the epitaxial layer. The edge termination area includes a floating ring region having floating rings formed in the second plane of the epitaxial layer, and a transition region between the floating ring region and the array of MPS diode. The transition region includes a PIN diode formed in the plurality of trenches and on the epitaxial layer between the trenches.

    Merged PiN Schottky (MPS) diode and method of manufacturing the same

    公开(公告)号:US11990553B2

    公开(公告)日:2024-05-21

    申请号:US17711013

    申请日:2022-03-31

    摘要: A merged PiN Schottky (MPS) diode includes a substrate, a first epitaxial layer of a first conductivity type, doped regions of a second conductivity type, a second epitaxial layer of the first conductivity type, and a Schottky metal layer. The first epitaxial layer is disposed on the first surface of the substrate. The doped regions are disposed in a surface of the first epitaxial layer, wherein the doped regions consist of first portions and second portions, the first portions are electrically floating, and the second portions are electrically connected to a top metal. The second epitaxial layer is disposed on the surface of the first epitaxial layer, wherein trenches are formed in the second epitaxial layer to expose the second portions of the doped regions. The Schottky metal layer is conformally deposited on the second epitaxial layer and the exposed second portions of the doped regions.

    DIODE
    8.
    发明公开
    DIODE 审中-公开

    公开(公告)号:US20240014326A1

    公开(公告)日:2024-01-11

    申请号:US18372226

    申请日:2023-09-25

    摘要: A diode of the present disclosure includes a stacked structure, and a first connection section and a second connection section provided at respective ends of the stacked structure in a length direction. The stacked structure includes a first structure and a second structure each having a nanowire structure or a nanosheet structure and stacked alternately in a thickness direction. The first connection section has a first conductivity type, and the second connection section has a second conductivity type. The diode further includes a control electrode section formed to extend at least from a top portion to a side surface of the stacked structure and spaced apart from the first connection section and the second connection section. The first connection section and the control electrode section or the second connection section and the control electrode section are connected electrically.