Array Formed From A Multiplicity Of Electric Integrated Circuits, and Method For Production Thereof
    7.
    发明申请
    Array Formed From A Multiplicity Of Electric Integrated Circuits, and Method For Production Thereof 审中-公开
    由多个电气集成电路形成的阵列及其制造方法

    公开(公告)号:US20160254202A1

    公开(公告)日:2016-09-01

    申请号:US15027346

    申请日:2014-09-29

    IPC分类号: H01L21/66 H01L21/78 H01L23/00

    摘要: A method for producing an array formed from a multiplicity of electric integrated circuits, said array being intended for separation and having a conductive connection to a central contact path for bond monitoring, said method comprising the following steps: applying conductive tracks to the array, wherein the separation region is recessed from applying said tracks, and closing the conductive connection to the central contact path by applying individual conductive connection portions, which extend between two contact paths which enclose the separation region and are arranged adjacent thereto, formed from at least one material from the group comprising the elements gold, palladium, tantalum and nickel and also comprising the alloy containing predominantly at least one of the mentioned elements.

    摘要翻译: 一种用于制造由多个电集成电路形成的阵列的方法,所述阵列旨在用于分离并且具有到用于键合监测的中心接触路径的导电连接,所述方法包括以下步骤:将导电轨道施加到阵列,其中 分离区域从施加所述轨道凹陷,并且通过施加各自的导电连接部分将导电连接件闭合,各个导电连接部分在两个包围分离区域并且邻近设置的接触路径之间延伸,该接触路径由至少一种材料形成 包括元素金,钯,钽和镍的组,并且还包含主要包含至少一个所述元素的合金。