公开(公告)号：US20160260575A1

公开(公告)日：2016-09-08

申请号：US15059199

申请日：2016-03-02

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Moon Youn JUNG ,  Dong Hoon SONG ,  Jin Sun KIM

IPC: H01J37/06 ,  H01J37/244

CPC classification number: H01J37/06 ,  H01J3/024 ,  H01J2237/049 ,  H01J2237/061 ,  H01J2237/06325 ,  H01J2237/06366 ,  H01J2237/0656 ,  H01J2237/2482

Abstract: Provided may include an electron beam generator, an image apparatus including the same, and an optical apparatus. The optical apparatus includes a first and second laser apparatuses providing a first and second laser beams on a substrate, and a first optical system provided between the first and second laser apparatuses and the substrate to focus the first and second laser beams. The first and second laser beams overlap with each other generating an interference beam, thereby decreasing a spot size of the interference beam to be smaller than a wavelength of each of the first and second laser beams at a focal point.

Abstract translation: 可以提供电子束发生器，包括该电子束发生器的图像装置和光学装置。 光学装置包括在基板上提供第一和第二激光束的第一和第二激光装置，以及设置在第一和第二激光装置与基板之间以使第一和第二激光束聚焦的第一光学系统。 第一和第二激光束彼此重叠，产生干涉光束，从而将干涉光束的光点尺寸减小为小于焦点处的第一和第二激光束的波长的波长。

公开(公告)号：US09390888B2

公开(公告)日：2016-07-12

申请号：US14720122

申请日：2015-05-22

Applicant: Industrial Technology Research Institute

Inventor： Wen-Li Wu ,  Yun-San Chien ,  Wei-En Fu ,  Yen-Song Chen ,  Hsin-Chia Ho

IPC: H01J37/00 ,  H01J37/29 ,  H01J37/06 ,  H01J37/145 ,  H01J37/04 ,  H01J37/295 ,  G01N23/20

CPC classification number: H01J37/29 ,  G01N23/20058 ,  H01J37/04 ,  H01J37/06 ,  H01J37/145 ,  H01J37/295 ,  H01J2237/0492 ,  H01J2237/255

Abstract: An apparatus and methods for small-angle electron beam scattering measurements in a reflection or a backscattering mode are provided. The apparatus includes an electron source, electron collimation optics before a sample, electron projection optics after the sample, a sample stage capable of holding the sample, and a electron detector module. The electrons emitted from the source are collimated and positioned to impinge nanostructures on the sample. The signals resulting from the interactions between the impinging electrons and the nanostructures are further magnified by the electron projection optics to reach a sufficient angular resolution before recorded by the electron detector module.

Abstract translation: 提供了一种用于反射或后向散射模式的小角度电子束散射测量的装置和方法。 该装置包括电子源，样品前的电子准直光学器件，样品后的电子投影光学器件，能够保持样品的样品台，以及电子检测器模块。 从源发射的电子被准直并定位成将纳米结构撞击在样品上。 由撞击电子和纳米结构之间的相互作用产生的信号被电子投影光学器件进一步放大，以在由电子检测器模块记录之前达到足够的角度分辨率。

公开(公告)号：US20160163506A1

公开(公告)日：2016-06-09

申请号：US15047064

申请日：2016-02-18

Applicant: FEI Company

Inventor： Jason Arjavac ,  Pei Zou ,  David James Tasker ,  Maximus Theodorus Otten ,  Gerhard Daniel

IPC: H01J37/28 ,  H01J37/20

CPC classification number: G01N1/28 ,  G01N1/06 ,  G01N1/08 ,  G01N1/32 ,  G01N23/04 ,  H01J37/06 ,  H01J37/18 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/063 ,  H01J2237/182 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (

公开(公告)号：US09349565B2

公开(公告)日：2016-05-24

申请号：US14688045

申请日：2015-04-16

Applicant: JEOL Ltd.

Inventor： Hidetaka Sawada

IPC: G21K5/04 ,  H01J37/141 ,  H01J37/06 ,  H01J37/26

CPC classification number: H01J37/141 ,  H01J37/06 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/063 ,  H01J2237/1415

Abstract: A multipole lens (100) which can produce static magnetic fields showing different strengths in the direction of travel of an electron beam has lens subasssemblies (10a, 10b, 10c) stacked on top of each other. The lens subassemblies (10a, 10b, 10c) have yokes (14a, 14b, 14c), respectively, and polar elements (12a, 12b, 12c), respectively. The polar elements (12a, 12b, 12c) have base portions (13a, 13b, 13c), respectively, magnetically coupled to the yokes (14a, 14b, 14c), respectively, and front end portions (11a, 11b, 11c), respectively, magnetically coupled to the base portions (13a, 13b, 13c), respectively. Magnetic field separators (20, 22) made of a nonmagnetic material are mounted between the front end portions (11a, 11b, 11c) which are successively adjacent to each other in the direction of stacking of the lens subassemblies (10a, 10b, 10c).

Abstract translation: 能够产生在电子束行进方向上具有不同强度的静磁场的多极镜（100）具有彼此堆叠的透镜子组件（10a，10b，10c）。 透镜组件（10a，10b，10c）分别具有轭（14a，14b，14c）和极性元件（12a，12b，12c）。 极性元件（12a，12b，12c）分别具有分别与轭（14a，14b，14c）磁接合的基部（13a，13b，13c）和前端部（11a，11b，11c） 分别磁耦合到基部（13a，13b，13c）。 由非磁性材料制成的磁场分离器（20,22）安装在沿着透镜组件（10a，10b，10c）堆叠方向相互相邻的前端部分（11a，11b，11c）之间， 。

公开(公告)号：US20160104597A1

公开(公告)日：2016-04-14

申请号：US14787263

申请日：2014-04-14

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuta IMAI ,  Takashi OHSHIMA ,  Hideo MORISHITA

IPC: H01J37/073 ,  H01J37/145 ,  H01J37/28 ,  H01J37/20 ,  H01J29/48 ,  H01J27/02

CPC classification number: H01J37/073 ,  H01J27/02 ,  H01J27/26 ,  H01J29/481 ,  H01J37/06 ,  H01J37/063 ,  H01J37/08 ,  H01J37/145 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/062 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0802 ,  H01J2237/1508 ,  H01J2237/2007 ,  H01J2237/2801

Abstract: The purpose of the present invention is to provide a charged particle gun using merely an electrostatic lens, said charged particle gun being relatively small and having less aberration, and to provide a field emission-type charged particle gun having high luminance even with a high current. This charged particle gun has: a charged particle source; an acceleration electrode that accelerates charged particles emitted from the charged particle source; a control electrode, which is disposed further toward the charged particle source side than the acceleration electrode, and which has a larger aperture diameter than the aperture diameter of the acceleration electrode; and a control unit that controls, on the basis of a potential applied to the acceleration electrode, a potential to be applied to the control electrode.

Abstract translation: 本发明的目的是提供一种仅使用静电透镜的带电粒子枪，所述带电粒子枪相对较小并且具有较小的像差，并且提供即使具有高电流也具有高亮度的场致发射型带电粒子枪 。 该带电粒子枪具有：带电粒子源; 加速电极，其加速从带电粒子源发射的带电粒子; 控制电极，其设置成比加速电极更加朝向带电粒子源侧，并且具有比加速电极的开口直径大的孔径; 以及控制单元，其基于对加速电极施加的电位控制施加到控制电极的电位。

公开(公告)号：US09275824B2

公开(公告)日：2016-03-01

申请号：US14721363

申请日：2015-05-26

Applicant: NuFlare Technology, Inc.

Inventor： Hiroshi Matsumoto

IPC: G11B9/10 ,  H01J37/147 ,  H01J37/20 ,  H01J37/06 ,  H01J37/317

CPC classification number: H01J37/1472 ,  G11B9/10 ,  H01J37/06 ,  H01J37/20 ,  H01J37/3023 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/30483 ,  H01J2237/31762 ,  H01J2237/31766

Abstract: A multi charged particle beam writing method includes emitting each corresponding beam in an “on” state while starting and continuing tracking control, shifting a writing position by beam deflection of the multi beams, in addition to tracking control, while continuing tracking control, emitting each corresponding beam in the next “on” state to the next writing position having been shifted while continuing tracking control, and returning the tracking position by resetting tracking control, after emitting each next corresponding beam to the next writing position having been shifted at least once, wherein writing of a predetermined region is completed by repeating the number of preset times a group of performing emitting, shifting, emitting, and returning, wherein the tracking time from start to reset of tracking control in at least one of the repeated groups is longer than the others.

Abstract translation: 一种多带电粒子束写入方法包括：在启动并且继续跟踪控制的同时发射处于“接通”状态的每个对应的波束，并且除继续跟踪控制之外，继续跟踪控制，同时继续跟踪控制， 将下一个“开”状态的相应光束移动到下一个写入位置，同时继续跟踪控制，并且在将每个下一个对应的光束发射到已经被移位至少一次的下一个写入位置之后，通过重新设置跟踪控制返回跟踪位置， 其中通过重复进行发射，移位，发射和返回的一组的预设次数来完成预定区域的写入，其中至少一个重复组中的跟踪控制的开始到复位的跟踪时间长于 其他。

公开(公告)号：US20150340194A1

公开(公告)日：2015-11-26

申请号：US14721808

申请日：2015-05-26

Applicant: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.

Inventor： Masateru Sato

IPC: H01J37/06 ,  H01J37/08

CPC classification number: H01J37/06 ,  H01J27/08 ,  H01J37/08 ,  H01J2237/082

Abstract: An ion generator includes an arc chamber, a cathode that extends outward from the inside of the arc chamber in an axial direction and that emits a thermal electron into the arc chamber, a thermal reflector with a cylindrical shape provided around the cathode in a radial direction and extending in the axial direction, and a narrow structure configured to narrow a width in the radial direction of a gap between the cathode and the thermal reflector at a given position in the axial direction.

Abstract translation: 离子发生器包括电弧室，阴极，其沿着轴向从电弧室的内部向外延伸并且向电弧室发射热电子;沿半径方向设置在阴极周围的具有圆筒形的热反射器 并且在轴向方向上延伸，窄结构构造成在轴向的给定位置处使阴极和热反射器之间的间隙的径向宽度变窄。

公开(公告)号：US09165741B2

公开(公告)日：2015-10-20

申请号：US14235892

申请日：2012-07-04

Applicant: Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

Inventor： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

IPC: H01J37/06 ,  H01J37/18 ,  H01J37/28

CPC classification number: H01J37/18 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/202 ,  H01J2237/2445 ,  H01J2237/2608

Abstract: A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam.

Abstract translation: 能够在空气气氛或气体气氛中观察样品的带电粒子束装置具有用于将压缩空间与减压空间分离的薄膜。 真空排气泵抽出第一壳体; 并且检测器检测在第一壳体中的带电粒子束（通过样品的照射获得）。 提供薄膜以至少沿着第一和第二壳体之间的界面的一部分分离第一壳体的内部和第二壳体的内部。 在薄膜中形成开口部，使得带电粒子照射单元侧的开口面积大于样品侧的开口面积; 并且覆盖开口部的样品侧的薄膜透过或允许通过初级带电粒子束和带电粒子束。

公开(公告)号：US09076631B2

公开(公告)日：2015-07-07

申请号：US14302221

申请日：2014-06-11

Applicant: Dov Shachal

Inventor： Dov Shachal

IPC: H01J40/00 ,  H01J37/28 ,  H01J37/20 ,  H01J37/301

CPC classification number: H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

公开(公告)号：US09006654B2

公开(公告)日：2015-04-14

申请号：US14447589

申请日：2014-07-30

Applicant: Hitachi High-Technologies Corporation

Inventor： Soichiro Matsunaga ,  Souichi Katagiri ,  Hajime Kawano

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/304 ,  H01J37/09 ,  H01J37/147

CPC classification number: H01J37/28 ,  H01J37/06 ,  H01J37/09 ,  H01J37/147 ,  H01J37/3045 ,  H01J2237/0455 ,  H01J2237/06316 ,  H01J2237/065 ,  H01J2237/1501 ,  H01J2237/24465 ,  H01J2237/24535 ,  H01J2237/24542

Abstract: An embodiment is to provide a technique that continuously applies a certain amount of an electron beam to a sample by selecting a beam applied to the sample from an electron beam emitted from an electron source in a scanning electron microscope. A charged particle apparatus is configured, including: a mechanism that detects the distribution of electric current strength with respect to the emitting direction of an electron beam emitted from an electron source; a functionality that predicts a fluctuation of an electric current applied to a sample by predicting the distribution of the electric current based on the detected result; a functionality that determines a position at which a beam applied to the sample is acquired based on the predicted result; and a mechanism that controls a position at which a probe beam is acquired based on the determined result.

Abstract translation: 一个实施例是提供一种技术，其通过从扫描电子显微镜中从电子源发射的电子束中选择施加到样品的光束，将一定量的电子束连续地施加到样品。 一种带电粒子装置，包括：检测相对于从电子源发射的电子束的发射方向的电流强度分布的机构; 通过基于检测结果预测电流分布来预测施加到样本的电流的波动的功能; 基于预测结果确定施加到样本的光束的位置的功能; 以及基于所确定的结果来控制获取探测光束的位置的机构。