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    RETRACTABLE DETECTOR
    2.
    发明申请
    RETRACTABLE DETECTOR 审中-公开

    公开(公告)号：US20190189391A1

    公开(公告)日：2019-06-20

    申请号：US16279538

    申请日：2019-02-19

    申请人： APPLIED MATERIALS ISRAEL LTD.

    发明人： Alon Litman ,  Efim Vinnitsky

    IPC分类号： H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285

    CPC分类号： H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/024 ,  H01J2237/2445 ,  H01J2237/2807

    摘要： A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

    Multi mode system with a dispersion X-ray detector
    4.
    发明授权
    Multi mode system with a dispersion X-ray detector 有权

    公开(公告)号：US09818577B2

    公开(公告)日：2017-11-14

    申请号：US15005949

    申请日：2016-01-25

    申请人： APPLIED MATERIALS ISRAEL LTD.

    发明人： Alon Litman ,  Efim Vinnitsky

    IPC分类号： H01J37/244 ,  H01J37/285 ,  H01J37/20 ,  H01J37/28

    CPC分类号： H01J37/244 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/024 ,  H01J2237/2445 ,  H01J2237/2807

    摘要： A method for evaluating a specimen, the method can include positioning an energy dispersive X-ray (EDX) detector at a first position; scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and propagates through an aperture of an EDX detector tip; detecting, by the EDX detector, x-ray photons emitted from the flat surface as a result of the scanning of the flat surface with the charged particle beam; after a completion of the scanning of the flat surface, positioning the EDX detector at a second position in which a distance between the EDX detector tip and a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics tip; and wherein a projection of the EDX detector on the plane of the flat surface virtually falls on the flat surface when the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.

    Notched magnetic lens for improved sample access in an SEM
    6.
    发明授权
    Notched magnetic lens for improved sample access in an SEM 有权
    用于在SEM中改善样品存取的缺口磁性透镜

    公开(公告)号：US09443693B2

    公开(公告)日：2016-09-13

    申请号：US14738632

    申请日：2015-06-12

    申请人： KLA-Tencor Corporation

    发明人： Christopher M. Sears

    IPC分类号： H01J37/141 ,  H01J37/28

    CPC分类号： H01J37/141 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/1415 ,  H01J2237/2807

    摘要： A magnetic immersion lens apparatus includes an outer pole piece and an inner pole piece with a gap therebetween. The outer pole piece has an opening that permits energetic particles from a target in front of the immersion lens to pass through the outer pole piece to an external detector. The outer or inner pole piece has one or more notches near the gap. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    摘要翻译： 磁浸透镜装置包括外极片和内极片之间的间隙。 外极片具有允许来自浸没透镜前方的目标物的高能粒子通过外极片的外部检测器的开口。 外部或内部极片在间隙附近具有一个或多个凹口。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

    Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
    8.
    发明授权
    Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope 有权
    界面，在非真空环境中观察物体的方法和扫描电子显微镜

    公开(公告)号：US08779358B2

    公开(公告)日：2014-07-15

    申请号：US13449392

    申请日：2012-04-18

    申请人： Dov Shachal

    发明人： Dov Shachal

    IPC分类号： G01N23/00

    CPC分类号： H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

    摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

    摘要翻译： 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。

    In-situ differential spectroscopy
    9.
    发明授权
    In-situ differential spectroscopy 失效
    原位差分光谱

    公开(公告)号：US08283631B2

    公开(公告)日：2012-10-09

    申请号：US12351215

    申请日：2009-01-09

    申请人： Mehdi Vaez-Iravani ,  Mehran Nasser-Ghodsi ,  Guoheng Zhao

    发明人： Mehdi Vaez-Iravani ,  Mehran Nasser-Ghodsi ,  Guoheng Zhao

    IPC分类号： G01N23/00 ,  G21K7/00 ,  H01J40/00

    CPC分类号： H01J37/244 ,  G01N2223/079 ,  G01N2223/086 ,  G01N2223/33 ,  H01J37/256 ,  H01J2237/24495 ,  H01J2237/2511 ,  H01J2237/2807

    摘要： A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array, and extracts a differential signal that represents a difference between the signals that are received from the first position and the signals that are received from the second position.

    摘要翻译： 具有用于产生针对样品的电子束的电子束发生器的光谱仪。 电子束定位器将电子束引导到样品的位置，从而产生来自样品的二次发射流，其中二次发射流包括电子和X射线中的至少一个。 二次发射流定位器将二次发射流定位在检测器阵列上，检测器阵列接收二次发射流并检测二次发射流的量和接收位置。 调制器调制被引导到样品上的电子束，从而在样品上的第一位置和第二位置之间扫描电子束。 提取器与调制器和检测器阵列进行信号通信，并且提取表示从第一位置接收的信号与从第二位置接收的信号之间的差的差分信号。

    INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE
    10.
    发明申请
    INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENVIRONMENT AND A SCANNING ELECTRON MICROSCOPE 有权
    界面，用于观察非真空环境中的对象和扫描电子显微镜的方法

    公开(公告)号：US20120241608A1

    公开(公告)日：2012-09-27

    申请号：US13449392

    申请日：2012-04-18

    申请人： Dov Shachal

    发明人： Dov Shachal

    IPC分类号： H01J37/28

    CPC分类号： H01J37/285 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

    摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

    摘要翻译： 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：使在真空环境中产生的至少一个电子束通过孔阵列中的至少一个孔并通过至少一个密封所述至少一个孔的超薄膜; 其中所述至少一个电子束被引向所述物体; 其中所述至少一个超薄膜承受真空环境和非真空环境之间的压力差; 以及检测响应于所述至少一个电子束和所述物体之间的相互作用而产生的微粒。