公开(公告)号：US20160155606A1

公开(公告)日：2016-06-02

申请号：US15014516

申请日：2016-02-03

申请人： B-NANO LTD.

发明人： Dov SHACHAL

IPC分类号： H01J37/285 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/06 ,  H01J37/20 ,  H01J37/285 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/0458 ,  H01J2237/15 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/2002 ,  H01J2237/2006 ,  H01J2237/2605 ,  H01J2237/28 ,  H01J2237/2801 ,  H01J2237/2806 ,  H01J2237/2807

摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: passing at least one electron beam that is generated in a vacuum environment through at least one aperture out of an aperture array and through at least one ultra thin membrane that seals the at least one aperture; wherein the at least one electron beam is directed towards the object; wherein the at least one ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the at least one electron beam and the object.

公开(公告)号：US20150380207A1

公开(公告)日：2015-12-31

申请号：US14768641

申请日：2014-02-18

申请人： B-NANO LTD.

发明人： Dov SHACHAL ,  Rafi DE PICCIOTTO

IPC分类号： H01J37/18 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24445 ,  H01J2237/2605

摘要： A scanning electron microscope suitable for imaging samples in a non-vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.

摘要翻译： 一种适用于在非真空环境中成像样品的扫描电子显微镜，所述扫描电子显微镜包括位于保持在真空下的外壳内的电子源，设置在所述外壳的开口处的电子透过膜，其分隔所述外壳内的环境， 维持在真空和外壳外部的环境，其不被保持在真空下，电渗透膜不被电接地，并且至少一个非接地电极用作电子检测器。

公开(公告)号：US20140117232A1

公开(公告)日：2014-05-01

申请号：US13663684

申请日：2012-10-30

申请人： B-NANO LTD.

发明人： Dov SHACHAL ,  Rafi DE PICCIOTTO

IPC分类号： H01J37/04 ,  H01J37/147 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/184 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24495 ,  H01J2237/2605

摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

摘要翻译： 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

公开(公告)号：US20150243475A1

公开(公告)日：2015-08-27

申请号：US14615013

申请日：2015-02-05

申请人： B-NANO LTD.

发明人： Dov SHACHAL ,  Rafi DE PICCIOTTO

IPC分类号： H01J37/28 ,  H01J37/18

CPC分类号： H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/184 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24495 ,  H01J2237/2605

摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

摘要翻译： 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。