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    Scanning electron microscope
    1.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US06365898B1

    公开(公告)日：2002-04-02

    申请号：US09308372

    申请日：1999-09-13

    Applicant: Pierre Sudraud ,  Antoine Corbin ,  Rainer Sailer ,  David John Bate

    Inventor： Pierre Sudraud ,  Antoine Corbin ,  Rainer Sailer ,  David John Bate

    IPC: H01J37244

    CPC classification number: H01J37/28 ,  H01J2237/04735 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/24445 ,  H01J2237/2445 ,  H01J2237/2608

    Abstract: A scanning electron microscope has means for generating a beam of electrons which is scanned over a specimen held within a holder in a chamber which contains a gaseous medium. A negative potential is applied to the holder so as to generate an electric field which accelerates secondary electrons, formed by the interaction or the primary beam with the specimen, in a direction away from the specimen surface and into a collision zone in the chamber. In that zone, the accelerated secondary electrons collide with gas molecules of the gaseous medium, thereby initiating a cascade of collisions which, in effect, amplifies the secondary electron signal. That signal (which may take the form of photons generated as a result of the collisions) is detected by detecting means, such as a photo-multiplier.

    Abstract translation: 扫描电子显微镜具有用于产生电子束的装置，该电子束被扫描在保持在包含气体介质的腔室内的保持器内的样本上。 向保持器施加负电位，从而产生电场，该电场通过与样本的相互作用或初级光束形成的二次电子沿远离样本表面的方向并且进入腔室中的碰撞区域。 在该区域中，加速的二次电子与气体介质的气体分子碰撞，从而引发碰撞的级联，其实际上放大了二次电子信号。 该信号（其可以采取作为碰撞的结果产生的光子的形式）通过诸如光电倍增器的检测装置来检测。

    SCANNING ELECTRON MICROSCOPE
    2.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号：US20150380207A1

    公开(公告)日：2015-12-31

    申请号：US14768641

    申请日：2014-02-18

    Applicant: B-NANO LTD.

    Inventor： Dov SHACHAL ,  Rafi DE PICCIOTTO

    IPC: H01J37/18 ,  H01J37/28

    CPC classification number: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24445 ,  H01J2237/2605

    Abstract: A scanning electron microscope suitable for imaging samples in a non-vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.

    Abstract translation: 一种适用于在非真空环境中成像样品的扫描电子显微镜，所述扫描电子显微镜包括位于保持在真空下的外壳内的电子源，设置在所述外壳的开口处的电子透过膜，其分隔所述外壳内的环境， 维持在真空和外壳外部的环境，其不被保持在真空下，电渗透膜不被电接地，并且至少一个非接地电极用作电子检测器。

    Environmental SEM Gas Injection System
    3.
    发明申请
    Environmental SEM Gas Injection System 有权
    环境SEM注气系统

    公开(公告)号：US20140034830A1

    公开(公告)日：2014-02-06

    申请号：US13954838

    申请日：2013-07-30

    Applicant: FEI Company

    Inventor： Marc Castagna ,  Clive D. Chandler ,  Wayne Kurowski ,  Daniel Woodrow Phifer, JR.

    IPC: H01J37/26 ,  H01J37/18

    CPC classification number: H01J37/26 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/006 ,  H01J2237/24445

    Abstract: A gas injection system provides a local region at the sample surface that has sufficient gas concentration to be ionized by secondary electrons to neutralize charged on the sample surface. In some embodiments, a gas concentration structure concentrates the gas near the surface. An optional hole in the gas concentration structure allows the charged particle beam to impact the interior of a shrouded region. In some embodiments, an anode near the surface increases the number of ions that return to the work piece surface for charge neutralization, the anode in some embodiments being a part of the gas injection system and in some embodiments being a separate structure.

    Abstract translation: 气体注入系统在样品表面处提供具有足够气体浓度的局部区域，以通过二次电子电离以中和样品表面上的带电。 在一些实施例中，气体浓度结构将气体靠近表面集中。 气体浓度结构中的可选孔允许带电粒子束冲击被覆盖区域的内部。 在一些实施例中，表面附近的阳极增加返回到工件表面以进行电荷中和的离子的数量，在一些实施例中，阳极是气体注入系统的一部分，并且在一些实施例中为独立的结构。

    Scanning electron microscope
    7.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US09466458B2

    公开(公告)日：2016-10-11

    申请号：US14768641

    申请日：2014-02-18

    Applicant: B-NANO LTD.

    Inventor： Dov Shachal ,  Rafi De Picciotto

    IPC: H01J37/28 ,  H01J37/18 ,  H01J37/244

    CPC classification number: H01J37/18 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/2002 ,  H01J2237/24445 ,  H01J2237/2605

    Abstract: A scanning electron microscope suitable for imaging samples in a non-vacuum environment, the scanning electron microscope including an electron source located within an enclosure maintained under vacuum, an electron permeable membrane disposed at an opening of the enclosure separating an environment within the enclosure which is maintained under vacuum and an environment outside the enclosure which is not maintained under vacuum, the electron permeable membrane not being electrically grounded and at least one non-grounded electrode operative as an electron detector.

    Abstract translation: 一种适用于在非真空环境中成像样品的扫描电子显微镜，所述扫描电子显微镜包括位于保持在真空下的外壳内的电子源，设置在所述外壳的开口处的电子透过膜，其分隔所述外壳内的环境， 维持在真空和外壳外部的环境，其不被保持在真空下，电渗透膜不被电接地，并且至少一个非接地电极用作电子检测器。

    Environmental scanning electron microscope (ESEM/SEM) gas injection apparatus with anode integrated with gas concentrating structure
    9.
    发明授权
    Environmental scanning electron microscope (ESEM/SEM) gas injection apparatus with anode integrated with gas concentrating structure 有权
    环境扫描电子显微镜（ESEM / SEM）气体注入装置与阳极集成结合

    公开(公告)号：US09070533B2

    公开(公告)日：2015-06-30

    申请号：US13954838

    申请日：2013-07-30

    Applicant: FEI Company

    Inventor： Marc Castagna ,  Clive D. Chandler ,  Wayne Kurowski ,  Daniel Woodrow Phifer, Jr.

    IPC: H01J37/18 ,  H01J37/26 ,  H01J37/28

    CPC classification number: H01J37/26 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/006 ,  H01J2237/24445

    Abstract: A gas injection system provides a local region at the sample surface that has sufficient gas concentration to be ionized by secondary electrons to neutralize charged on the sample surface. In some embodiments, a gas concentration structure concentrates the gas near the surface. An optional hole in the gas concentration structure allows the charged particle beam to impact the interior of a shrouded region. In some embodiments, an anode near the surface increases the number of ions that return to the work piece surface for charge neutralization, the anode in some embodiments being a part of the gas injection system and in some embodiments being a separate structure.

    Abstract translation: 气体注入系统在样品表面处提供具有足够气体浓度的局部区域，以通过二次电子电离以中和样品表面上的带电。 在一些实施例中，气体浓度结构将气体靠近表面集中。 气体浓度结构中的可选孔允许带电粒子束冲击被覆盖区域的内部。 在一些实施例中，表面附近的阳极增加返回到工件表面以进行电荷中和的离子的数量，在一些实施例中，阳极是气体注入系统的一部分，并且在一些实施例中为独立的结构。

    SCANNING ELECTRON MICROSCOPE
    10.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号：US20090230304A1

    公开(公告)日：2009-09-17

    申请号：US12396593

    申请日：2009-03-03

    Applicant: Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    Inventor： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    IPC: G01N23/00

    CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

    Abstract: In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

    Abstract translation: 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

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