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    Particle-optical apparatus for simultaneous observing a sample with particles and photons
    2.
    发明授权
    Particle-optical apparatus for simultaneous observing a sample with particles and photons 有权
    用于同时观察具有颗粒和光子的样品的粒子光学装置

    公开(公告)号：US07718979B2

    公开(公告)日：2010-05-18

    申请号：US12027245

    申请日：2008-02-06

    Applicant: William Ralph Knowles

    Inventor： William Ralph Knowles

    IPC: A61N5/00

    CPC classification number: H01J37/228 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/188 ,  H01J2237/2608 ,  H01J2237/2808

    Abstract: A particle-optical apparatus, such as an ESEM®, for simultaneous observing a sample with particles and photons. A pressure limiting aperture (PLA) is placed in a diaphragm between the objective lens of the ESEM® and the sample position. The distance between the sample position and the aperture is sufficiently small to allow a large collection angle of the photons through this aperture. A mirror is placed between the diaphragm and the objective lens. Due to the large collection angle for photons a large NA is achieved. The small distance between sample position and aperture also result in less scattering of electrons than occurs in ESEM's where a mirror is placed between aperture and sample position, as the electrons have to travel through only a limited length in a high pressure area. Embodiments describe combinations where e.g. an immersion lens is used.

    Abstract translation: 用于同时观察具有颗粒和光子的样品的颗粒光学装置，例如ESEM。 压力限制孔（PLA）放置在ESEM®的物镜和样品位置之间的隔膜中。 样品位置和孔径之间的距离足够小，以允许光子通过该孔的大的收集角。 镜片放置在隔膜和物镜之间。 由于光子的收集角度大，所以实现了大的NA。 样品位置和孔径之间的小距离也导致电子散射比在孔径和样品位置之间放置镜子的ESEM中发生的少，因为电子必须在高压区域中仅通过有限的长度行进。 实施例描述了例如 使用浸没透镜。

    Detector for charged particle beam instrument
    4.
    发明授权
    Detector for charged particle beam instrument 有权
    带电粒子束仪的探测器

    公开(公告)号：US07541580B2

    公开(公告)日：2009-06-02

    申请号：US11731743

    申请日：2007-03-30

    Applicant: William Ralph Knowles ,  Milos Toth

    Inventor： William Ralph Knowles ,  Milos Toth

    IPC: H01J37/252

    CPC classification number: G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2449 ,  H01J2237/2608

    Abstract: A detector for use with a high pressure SEM, such as an ESEM® environmental SEM from FEI Company, extends the effective detection space above the PLA, thereby increasing secondary signal amplification without increasing working distance or pressure. Embodiments can therefore provide improved resolution and can operate at lower gas pressures.

    Abstract translation: 用于高压SEM的检测器，如来自FEI公司的ESEM环境SEM，扩展了PLA上方的有效检测空间，从而在不增加工作距离或压力的情况下增加了二次信号放大。 因此，实施例可以提供改进的分辨率并且可以在较低的气体压力下操作。

    HIGH PRESSURE CHARGED PARTICLE BEAM SYSTEM
    6.
    发明申请
    HIGH PRESSURE CHARGED PARTICLE BEAM SYSTEM 有权
    高压充电粒子束系统

    公开(公告)号：US20110031394A1

    公开(公告)日：2011-02-10

    申请号：US12525908

    申请日：2008-02-06

    Applicant: William Ralph Knowles ,  Rae Knowles ,  Milos Toth

    Inventor： William Ralph Knowles ,  Rae Knowles ,  Milos Toth

    IPC: G01N23/00

    CPC classification number: H01J37/3056 ,  H01J37/301 ,  H01J2237/006 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/31732 ,  H01J2237/3174

    Abstract: The current invention includes methods and apparatuses for processing, that is, altering and imaging, a sample in a high pressure charged particle beam system. Embodiments of the invention include a cell in which the sample is positioned during high pressure charged particle beam processing. The cell reduces the amount of gas required for processing, thereby allowing rapid introduction, exhaustion, and switching between gases and between processing and imaging modes. Maintaining the processes gases within the cell protects the sample chamber and column from contact with the gases. In some embodiments, the temperature of the cell walls and the sample can be controlled.

    Abstract translation: 本发明包括用于处理的方法和装置，即改变和成像高压带电粒子束系统中的样品。 本发明的实施例包括其中样品在高压带电粒子束处理期间被定位的单元。 电池减少处理所需的气体量，从而允许气体之间以及处理和成像模式之间的快速引入，耗尽和切换。 维持过程中的气体保护样品室和色谱柱不与气体接触。 在一些实施方案中，可以控制细胞壁和样品的温度。

    Particle optical apparatus with a predetermined final vacuum pressure
    8.
    发明申请
    Particle optical apparatus with a predetermined final vacuum pressure 有权
    具有预定最终真空压力的粒子光学装置

    公开(公告)号：US20070176102A1

    公开(公告)日：2007-08-02

    申请号：US11700993

    申请日：2007-01-31

    Applicant: Hendrik Nicolaas Slingerland ,  William Ralph Knowles

    Inventor： Hendrik Nicolaas Slingerland ,  William Ralph Knowles

    IPC: G21K7/00

    CPC classification number: H01J37/18 ,  H01J37/301 ,  H01J37/3056 ,  H01J2237/182 ,  H01J2237/2608 ,  H01J2237/28

    Abstract: The invention relates to a particle-optical apparatus with a predetermined final vacuum pressure. To that end a vacuum chamber of said apparatus is via a first restriction connected to a volume where vapour or gas is present at a known pressure and via a second restriction to a vacuum pump. By making the ratio of the two conductances, associated with said restrictions, a calibrated ratio, the final pressure of the vacuum chamber is a predetermined final pressure. This eliminates the need for e.g. vacuum gauges and control systems, resulting in a more compact design of such apparatus.

    Abstract translation: 本发明涉及具有预定最终真空压力的粒子光学装置。 为此，所述装置的真空室经由与已知压力下存在蒸气或气体并通​​过第二限制到真空泵的体积连接的第一限制。 通过使与所述限制相关联的两个电导率的比率为校准比率，真空室的最终压力是预定的最终压力。 这消除了对例如 真空计和控制系统，从而使这种设备更加紧凑的设计。

    Methods and apparatus involving light pen interaction with a real time display
    9.
    发明授权
    Methods and apparatus involving light pen interaction with a real time display 失效
    涉及光笔与实时显示相互作用的方法和设备

    公开(公告)号：US4017680A

    公开(公告)日：1977-04-12

    申请号：US594016

    申请日：1975-07-08

    Applicant: Robert William Anderson ,  William Ralph Knowles ,  John Edward Culley

    Inventor： Robert William Anderson ,  William Ralph Knowles ,  John Edward Culley

    IPC: G06F3/0484 ,  G06F17/17 ,  G09G5/42 ,  H04N7/18

    CPC classification number: G06F17/175 ,  G06F3/04842 ,  G09G5/42

    Abstract: Improvements and modifications are described to an image analyzing system in which an image of a field under analysis is displayed on a television monitor screen and features can be edited by adding or subtracting feature content to or from the display (and corresponding signal content to or from the signal which is to be processed for analysis) using a light pen.One improvement provides for straight line interpolation between points in the display selected by the light pen during successive frame scans, so that a continuous trace and therefore corresponding signal is produced in the display corresponding to the path traced out by the light pen.Another provides for an alarm signal to be generated if the storage facility used for storing the locus of the trace to allow its reconstruction during successive frame scans, becomes more than a given percentage occupied.A further modification provides symbols to be displayed indicating the various editing functions which can be performed, one of which can be selected by the light pen.A circuit is described for causing a brightened-up mark to appear in the display to indicate the point selected by the light pen and also to modulate the video signal within an outlined area to indicate visually that the area has been selected.

    Abstract translation: 对图像分析系统进行改进和修改，其中在电视监视器屏幕上显示被分析场的图像，并且可以通过向显示器（或相应的信号内容）向或从显示器添加或减少特征内容来编辑特征 使用光笔进行处理的信号。

    Particle optical apparatus with a predetermined final vacuum pressure
    10.
    发明授权
    Particle optical apparatus with a predetermined final vacuum pressure 有权
    具有预定最终真空压力的粒子光学装置

    公开(公告)号：US09153414B2

    公开(公告)日：2015-10-06

    申请号：US11700993

    申请日：2007-01-31

    Applicant: Hendrik Nicolaas Slingerland ,  William Ralph Knowles

    Inventor： Hendrik Nicolaas Slingerland ,  William Ralph Knowles

    IPC: G01F23/00 ,  H01J37/18 ,  H01J37/301 ,  H01J37/305

    CPC classification number: H01J37/18 ,  H01J37/301 ,  H01J37/3056 ,  H01J2237/182 ,  H01J2237/2608 ,  H01J2237/28

    Abstract: The invention relates to a particle-optical apparatus with a predetermined final vacuum pressure. To that end a vacuum chamber of said apparatus is via a first restriction connected to a volume where vapor or gas is present at a known pressure and via a second restriction to a vacuum pump. By making the ratio of the two conductances, associated with said restrictions, a calibrated ratio, the final pressure of the vacuum chamber is a predetermined final pressure. This eliminates the need for e.g. vacuum gauges and control systems, resulting in a more compact design of such apparatus.

    Abstract translation: 本发明涉及具有预定最终真空压力的粒子光学装置。 为此，所述装置的真空室经由与已知压力下存在蒸气或气体并通​​过第二限制到真空泵的体积连接的第一限制。 通过使与所述限制相关联的两个电导率的比率为校准比率，真空室的最终压力是预定的最终压力。 这消除了对例如 真空计和控制系统，从而使这种设备更加紧凑的设计。

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