公开(公告)号：US20240096588A1

公开(公告)日：2024-03-21

申请号：US18368310

申请日：2023-09-14

Applicant: JEOL Ltd.

Inventor： Kanako Noguchi

IPC: H01J37/22

CPC classification number: H01J37/228 ,  H01J37/224 ,  H01J2237/2802

Abstract: A laser beam illumination equipment has a laser beam generation section and a mirror unit. An image generation section has a camera and a camera controller. A laser beam illumination control section sets a pulse period of a laser beam to the same period as an exposure period of the camera. With this configuration, a state change of a specimen can be set uniform over exposure durations. A pulse train of the laser beam may be generated based on a synchronization signal which is output from the camera controller.

公开(公告)号：US10008363B2

公开(公告)日：2018-06-26

申请号：US15648757

申请日：2017-07-13

Applicant: FEI Company

Inventor： Eric Gerardus Theodoor Bosch ,  Bart Jozef Janssen

IPC: H01J37/22 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/222 ,  H01J37/20 ,  H01J37/228 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/226 ,  H01J2237/2614

Abstract: A method of imaging a specimen using ptychography includes directing a charged-particle beam from a source through an illuminator so as to traverse the specimen and land upon a detector, detecting a flux of radiation emanating from the specimen with the detector, calculating at least one property of a charged-particle wavefront exiting the specimen based on using an output of the detector in combination with applying a mathematical reconstruction technique, wherein the at least one property comprises a phase of the wavefront, and wherein applying the mathematical construction technique comprises directly reconstructing the phase of the wavefront to determine a reconstructed phase of the wavefront. An associated apparatus is also described.

公开(公告)号：US09857320B2

公开(公告)日：2018-01-02

申请号：US15314141

申请日：2015-06-18

Applicant: LEIBNIZ-INSTITUT FUER NEUE MATERIALIEN GEMEINNUETZIGE GMBH

Inventor： Niels De Jonge ,  Diana B. Peckys

IPC: G01N23/00 ,  G01N23/225 ,  H01J37/20

CPC classification number: G01N23/2251 ,  G01N2223/307 ,  G01N2223/418 ,  G01N2223/612 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/2004 ,  H01J2237/24455 ,  H01J2237/2802

Abstract: The present invention relates to a device and a method for the stoichiometric analysis of samples.In order to study the spatial distribution of different proteins in the plasma membrane of a complete cell within a short time frame, a device and a method are proposed for the stoichiometric analysis of samples.The object is established by means of a device for the stoichiometric analysis of samples, said device comprising a) a sample processing device comprising a sample holder for holding the sample, means for setting the temperature, means for adding and removing fluids (including gases) and at least one fluid reservoir, b) an electron microscope with a detector, and c) a computer-controlled process control system for controlling the means for setting the temperature and the means for adding and removing fluids (including gases), a computer-controlled and automated imaging device that captures images by means of the electron microscope, a unit that stores the captured images and an image analysis unit controlled by the computer.

公开(公告)号：US09673114B1

公开(公告)日：2017-06-06

申请号：US14695767

申请日：2015-04-24

Applicant: Multibeam Corporation

Inventor： David K. Lam ,  Kevin M. Monahan ,  Michael C. Smayling ,  Theodore A. Prescop

IPC: H01L21/66 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/26 ,  H01J37/305 ,  H01J37/30

CPC classification number: H01L21/3065 ,  B81C1/00373 ,  B81C2201/0143 ,  B81C2201/0188 ,  C23C14/48 ,  C23C16/047 ,  C23C16/48 ,  C23C16/486 ,  C23C16/487 ,  H01J37/05 ,  H01J37/06 ,  H01J37/08 ,  H01J37/228 ,  H01J37/244 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305 ,  H01J37/3053 ,  H01J37/3056 ,  H01J37/3172 ,  H01J37/3174 ,  H01J37/3177 ,  H01J37/3178 ,  H01J2237/004 ,  H01J2237/0635 ,  H01J2237/1501 ,  H01J2237/24592 ,  H01J2237/30466 ,  H01J2237/30472 ,  H01J2237/31708 ,  H01J2237/31732 ,  H01J2237/31735 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31749 ,  H01L21/0228 ,  H01L21/0262 ,  H01L21/26 ,  H01L21/308 ,  H01L21/3085 ,  H01L22/12 ,  H01L22/20 ,  H01L22/26

Abstract: Methods, devices and systems for patterning of substrates using charged particle beams without photomasks and without a resist layer. Material can be removed from a substrate, as directed by a design layout database, localized to positions targeted by multiple, matched charged particle beams. Reducing the number of process steps, and eliminating lithography steps, in localized material removal has the dual benefit of reducing manufacturing cycle time and increasing yield by lowering the probability of defect introduction. Furthermore, highly localized, precision material removal allows for controlled variation of removal rate and enables creation of 3D structures or profiles. Local gas injectors and detectors, and local photon injectors and detectors, are local to corresponding ones of the columns, and can be used to facilitate rapid, accurate, targeted substrate processing.

公开(公告)号：US09464998B2

公开(公告)日：2016-10-11

申请号：US14745122

申请日：2015-06-19

Applicant: CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： Ahmed H. Zewail ,  John Spencer Baskin ,  Haihua Liu

IPC: H01J37/073 ,  G01N23/205 ,  G01N23/20 ,  G01N23/04 ,  H01J37/20 ,  H01J37/26 ,  G01N21/00 ,  H01J37/22

CPC classification number: G01N23/2055 ,  G01N21/00 ,  G01N23/04 ,  G01N23/20058 ,  G01N23/20083 ,  H01J37/228 ,  H01J37/26 ,  H01J2237/06333 ,  H01J2237/0635 ,  H01J2237/2482 ,  H01J2237/2617 ,  H01J2237/2626

Abstract: An electron microscope system includes a laser system operable to generate an optical pulse and a pump pulse and a microscope column. The microscope column includes a multiple cathode structure having a plurality of spatially separated cathode regions. Each of the cathode regions are operable to generate an electron pulse. The microscope column also includes an electron acceleration region adjacent the multiple cathode structure, a specimen region operable to support a specimen, and a detector.

Abstract translation: 电子显微镜系统包括可操作以产生光脉冲和泵脉冲和显微镜柱的激光系统。 显微镜柱包括具有多个空间分离的阴极区域的多阴极结构。 每个阴极区域可操作以产生电子脉冲。 显微镜柱还包括与多个阴极结构相邻的电子加速区域，可操作以支撑样本的样本区域和检测器。

公开(公告)号：US20150235802A1

公开(公告)日：2015-08-20

申请号：US14420722

申请日：2013-08-08

Applicant: SNU R&DB Foundation

Inventor： Young Woon Kim ,  Sung Dae Kim

IPC: H01J37/20 ,  H01J37/26 ,  H01J37/22

CPC classification number: H01J37/20 ,  H01J37/226 ,  H01J37/228 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/2602 ,  H01J2237/2808

Abstract: Disclosed is a holder device for an electron microscope, which efficiently collects light emitted when electrons collide with a sample inside the electron microscope and is selectively usable in various electron microscopes since it can be easily attached to and detached from the electron microscopes. The holder device includes a frame; a sample support block configured to be supported on the frame and comprising a sample mounting portion to support an edge of a sample; a mirror unit configured to comprise an upper mirror and a lower mirror respectively arranged above and below the sample and reflect light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction; a condensing lens configured to condense light from the mirror unit on a predetermined target; and an optical fiber configured to collect light from the condensing lens.

Abstract translation: 公开了一种用于电子显微镜的保持装置，其有效地收集当电子与电子显微镜内部的样品碰撞时发射的光，并且可以选择性地使用于各种电子显微镜，因为它可以容易地附着到电子显微镜上并从电子显微镜上分离。 支架装置包括框架; 样品支撑块，被配置为支撑在所述框架上并且包括样品安装部分以支撑样品的边缘; 反射镜单元，被配置为包括分别布置在样本上方和下方的上反射镜和下反射镜，并将从样品发射的光沿预定方向反射，该样品安装到样品安装部分并且发射电子束; 聚光透镜，被配置为将来自所述反射镜单元的光在预定目标上进行冷凝; 以及配置为收集来自聚光透镜的光的光纤。

公开(公告)号：US20150108350A1

公开(公告)日：2015-04-23

申请号：US14390095

申请日：2013-04-02

Applicant: Jacob Pieter HOOGENBOOM ,  Pieter KRUIT ,  Nalan LIV ,  Aernout Christaan ZONNEVYLLE ,  DELMIC B.V.

Inventor： Jacob Pieter Hoogenboom ,  Pieter Kruit ,  Nalan Liv ,  Aernout Christiaan Zonnevylle

IPC: H01J37/22 ,  H01J37/28

CPC classification number: H01J37/222 ,  G01C21/32 ,  G01C21/3484 ,  H01J37/22 ,  H01J37/226 ,  H01J37/228 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/24475 ,  H01J2237/2806

Abstract: An apparatus for inspecting a sample, is equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa. The apparatus is accommodated with a processing unit adapted and equipped to represent an image as generated with the column and an image as generated with the microscope. The unit is further adapted to perform an alignment procedure mutually correlating a region of interest in one of the images, wherein the alignment procedure involves detecting a change in the optical image as caused by the charged particle beam.

Abstract translation: 用于检查样品的装置装备有带电粒子柱，用于产生聚焦的带电粒子束以观察或改变样品，以及光学显微镜以观察样品上的感兴趣区域，如通过带电粒子束 或相反亦然。 该装置容纳有适于和配备为表示用柱产生的图像和用显微镜产生的图像的处理单元。 该单元进一步适于执行在一个图像中相互关联感兴趣区域的对准过程，其中对准过程涉及检测由带电粒子束引起的光学图像的变化。

公开(公告)号：US20150060660A1

公开(公告)日：2015-03-05

申请号：US14303227

申请日：2014-06-12

Applicant: Marcus Straw ,  Mark Emerson

Inventor： Marcus Straw ,  Mark Emerson

IPC: H01J37/304 ,  H01J37/305 ,  G21K5/08 ,  H01J37/22

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

Abstract translation: 用于对准与带电粒子束一致的激光束的方法和装置。 所描述的本发明提供了一种通过物镜的中心对准激光束并最终瞄准多光束系统的中心点的方法。 该装置利用激光束对准系统的部件位于带电粒子系统的真空室内和外部。

公开(公告)号：US08759760B2

公开(公告)日：2014-06-24

申请号：US13050035

申请日：2011-03-17

Applicant: Dirk Zeidler ,  Ulrike Zeile

Inventor： Dirk Zeidler ,  Ulrike Zeile

IPC: G01N23/00

CPC classification number: H01J37/28 ,  H01J37/09 ,  H01J37/228 ,  H01J2237/043 ,  H01J2237/06333 ,  H01J2237/206 ,  H01J2237/24585

Abstract: A combined inspection system for inspecting an object disposable in an object plane 19, comprises a particle-optical system, which provides a particle-optical beam path 3, and a light-optical system, which provides a light-optical beam path 5; and a controller 60, wherein the light-optical system comprises at least one light-optical lens 30 arranged in the light-optical beam, which comprises a first lens surface facing the object plane which has two lens surfaces 34, 35 and a through hole 32, wherein the particle-optical system comprises a beam deflection device 23, in order to scan a primary particle beam 15 over a part of the sample plane 19, and wherein the controller is configured to control the beam deflection device 23 in such a manner that a deflected primary particle beam 15 intersects an optical axis 3 of the particle-optical beam path in a plane which is arranged inside the through hole.

Abstract translation: 用于检查物体平面19中的一次性物品的组合检查系统包括提供粒子光束路径3的粒子光学系统和提供光束光路5的光学系统; 以及控制器60，其中所述光学系统包括布置在所述光 - 光束中的至少一个光 - 透镜30，所述至少一个光 - 透镜30包括面对所述物平面的第一透镜表面，所述第一透镜表面具有两个透镜表面34,35和通孔 32，其中所述粒子光学系统包括光束偏转装置23，以便在样本平面19的一部分上扫描初级粒子束15，并且其中控制器被配置为以这种方式控制束偏转装置23 偏转的一次粒子束15在布置在通孔内的平面中与粒子光束路径的光轴3相交。

公开(公告)号：US20140131573A1

公开(公告)日：2014-05-15

申请号：US13681746

申请日：2012-11-20

Applicant: FEI COMPANY

Inventor： N. William Parker ,  Mark W. Utlaut

IPC: G01N23/225

CPC classification number: G01N21/6428 ,  G01N21/6458 ,  G01N21/6486 ,  G01N23/225 ,  H01J37/228 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/206 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2803 ,  H01J2237/2857

Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.

Abstract translation: 公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。 使用重组遗传学技术将“记者”基因插入许多物种已经很成熟。 特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响 的由GoI编码的感兴趣的蛋白质（PoI）。 生物学家的一个目标是更精确地定位细胞内的PoI。 本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。 提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。