-
公开(公告)号：US10825647B2
公开(公告)日：2020-11-03
申请号：US16255210
申请日：2019-01-23
申请人： FEI Company
摘要： A method of using a Transmission Charged Particle Microscope, comprising: Providing a specimen on a specimen holder; Using an illumination system to direct a beam of charged particles from a source onto said specimen; Using an imaging system to direct charged particles that are transmitted through the specimen onto a detector, further comprising the following actions: In an acquisition step, lasting a time interval T, using said detector in particle counting mode to register spatiotemporal data relating to individual particle detection incidences, and to output said spatiotemporal data in raw form, without assembly into an image frame; In a subsequent rendering step, assembling a final image from said spatiotemporal data, while performing a mathematical correction operation.
-
公开(公告)号：US20180019098A1
公开(公告)日：2018-01-18
申请号：US15648757
申请日：2017-07-13
申请人： FEI Company
IPC分类号： H01J37/22 , H01J37/20 , H01J37/244
CPC分类号： H01J37/222 , H01J37/20 , H01J37/228 , H01J37/244 , H01J37/28 , H01J2237/226 , H01J2237/2614
摘要： A method of imaging a specimen using ptychography includes directing a charged-particle beam from a source through an illuminator so as to traverse the specimen and land upon a detector, detecting a flux of radiation emanating from the specimen with the detector, calculating at least one property of a charged-particle wavefront exiting the specimen based on using an output of the detector in combination with applying a mathematical reconstruction technique, wherein the at least one property comprises a phase of the wavefront, and wherein applying the mathematical construction technique comprises directly reconstructing the phase of the wavefront to determine a reconstructed phase of the wavefront. An associated apparatus is also described.
-
公开(公告)号：US10665419B2
公开(公告)日：2020-05-26
申请号：US16282021
申请日：2019-02-21
申请人： FEI Company
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28 , H01J37/304 , H01J37/302
摘要： A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps: Providing the specimen on a specimen holder; Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen; Providing a segmented detector for detecting a flux of charged particles traversing the specimen; Causing said beam to scan across a surface of the specimen, and combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, said vector output having components Dx, Dy along respective X, Y coordinate axes, specifically comprising: Performing a relatively coarse pre-scan of the specimen, along a pre-scan trajectory; At selected positions pi on said pre-scan trajectory, analyzing said components Dx, Dy and also a scalar intensity sensor value Ds; Using said analysis of Dx, Dy and Ds to classify a specimen composition at each position pi into one of a group of composition classes; For a selected composition class, performing a relatively fine scan at positions pi assigned to that class.
-
公开(公告)号：US10403470B2
公开(公告)日：2019-09-03
申请号：US15053898
申请日：2016-02-25
申请人： FEI Company
发明人： Nikolaos Kontaras , Bart Jozef Janssen , Cornelis Sander Kooijman , Duarte Guerreiro Tome Antunes
IPC分类号： H01J37/244 , G01T1/17 , H01J37/28
摘要： A system for analyzing an analogue signal comprising randomly spaced events, the event having an event height, comprises: Converting the signal to a series of samples S(t), with t the moment of sampling, thereby forming a sampled, discrete time signal, Detecting the presence of an event, the event detected at t=T, Estimating the event height Using a model (412, FIG. 5) to estimate a noise contribution N(t) for t=(T−Δ1) to t=(T+Δ2), the noise contribution derived from samples S(t) with t≤(T−Δ1) and/or samples S(t) with t≥(T+Δ2), with Δ1 and Δ2 predetermined or preset time periods having a value such that the event has a negligible contribution to samples taken before (T−Δ1) or after (T+Δ2), Estimating the event height E by integrating the series of samples from (T−Δ1) to (T+Δ2) minus the noise contribution for said samples, E=Σt=(T−Δ1)t=(T+Δ2)S(t)−Σt=(T−Δ1)t=(T+Δ2)N(t)=Σt=(T−Δ1)t=(T+Δ2)[S(t)−N(t)].
-
公开(公告)号：US10014158B1
公开(公告)日：2018-07-03
申请号：US15590857
申请日：2017-05-09
申请人： FEI Company
发明人： Bart Jozef Janssen , Auke van der Heide , Henricus Gerardus Roeven , Jacobus Adrianus Maria Thomassen
CPC分类号： H01J37/222 , G06T5/50 , G06T2207/10061 , G06T2207/20192 , G06T2207/20221 , H01J37/20 , H01J37/26 , H01J37/261 , H01J2237/221
摘要： A method of using a charged particle microscope comprising a source; a specimen holder, for holding a specimen; an illuminator, for irradiating the specimen; a detector; and a controller, for controlling at least some aspects of the microscope's operation. The method comprises the steps of using the detector to acquire a series of component images of a part of the specimen; then successively quantizing each component image and storing it in a memory; recording a quantization error per pixel for each quantized component image, and keeping a running tally of cumulative quantization errors per pixel for the quantized component images; when quantizing a next component image, choosing a quantization polarity for each pixel that will avoid further increasing the total quantization error for each pixel. Finally, combining the component images to assemble a composite image.
-
公开(公告)号：US08817148B2
公开(公告)日：2014-08-26
申请号：US13645725
申请日：2012-10-05
申请人： FEI Company
CPC分类号： H04N5/335 , H01L27/146 , H04N5/32 , H04N5/3575 , H04N5/374
摘要： To avoid reset noise in a CMOS chip for direct particle counting, it is known to use Correlative Double Sampling: for each signal value, the pixel is sampled twice: once directly after reset and once after an integration time. The signal is then determined by subtracting the reset value from the later acquired value, and the pixel is reset again. In some embodiments of the invention, the pixel is reset only after a large number of read-outs. Applicants realized that typically a large number of events, typically approximately 10, are needed to cause a full pixel. By either resetting after a large number of images, or when one pixel of the image shows a signal above a predetermined value (for example 0.8 × the full-well capacity), the image speed can be almost doubled compared to the prior art method, using a reset after acquiring a signal.
摘要翻译： 为了避免用于直接粒子计数的CMOS芯片中的复位噪声，已知使用相关双倍采样：对于每个信号值，像素被采样两次：一次直接在复位后和一次积分时间之后。 然后通过从稍后获取的值中减去复位值来确定信号，并且再次复位像素。 在本发明的一些实施例中，仅在大量读出之后复位像素。 申请人意识到通常需要大量的事件，通常约为10个，以引起一个完整的像素。 通过在大量图像之后进行复位，或者当图像的一个像素显示高于预定值（例如0.8×全阱容量）的信号时，与现有技术方法相比，图像速度可以几乎翻倍， 在获取信号后使用复位。
-
7.发明授权公开(公告)号：US08766214B2
公开(公告)日：2014-07-01
申请号：US13919656
申请日：2013-06-17
申请人： FEI Company
发明人： Brian Roberts Routh, Jr. , Peter Christiaan Tiemeijer , Bart Jozef Janssen , Thomas G. Miller , David Foord , Ivan Lazić
IPC分类号： H01J37/26 , H01J37/28 , H01J37/295
CPC分类号： H01J37/28 , B82Y35/00 , G01Q10/04 , H01J37/26 , H01J37/295 , H01J37/3056 , H01J2237/2067 , H01J2237/208 , H01J2237/226 , H01J2237/2442 , H01J2237/24455 , H01J2237/2447 , H01J2237/2611 , H01J2237/2614 , H01J2237/31749
摘要： The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator. The method comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychographic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.
摘要翻译： 本发明涉及使用装备有电子柱和离子束柱的粒子光学装置，相机系统，机械手来制备和成像样品的方法。 该方法包括以下步骤：从第一电子图像导出样本的第一ptychographic图像，使样本变薄，并形成样品的第二ptychographic图像。 在本发明的实施例中，用于第二图像的种子图像是第一图像图像。 在另一个实施例中，第二ptychographic图像是在稀化期间去除的层的图像。 在另一个实施方案中，确定样品的内部电位并确定掺杂剂浓度。
-
公开(公告)号：US20230377835A1
公开(公告)日：2023-11-23
申请号：US18357904
申请日：2023-07-24
申请人： FEI Company
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/226
摘要： A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.
-
公开(公告)号：US11756762B2
公开(公告)日：2023-09-12
申请号：US17649917
申请日：2022-02-03
申请人： FEI Company
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/226
摘要： A sample holder retains a sample and can continuously rotate the sample in a single direction while the sample is exposed to a charged particle beam (CPB) or other radiation source. Typically, the CPB is strobed to produce a series of CPB images at random or arbitrary angles of rotation. The sample holder can rotate more than one complete revolution of the sample. The CPB images are used in tomographic reconstruction, and in some cases, relative rotation angles are used in the reconstruction, without input of an absolute rotation angle.
-
公开(公告)号：US11551906B1
公开(公告)日：2023-01-10
申请号：US17364621
申请日：2021-06-30
申请人： FEI Company
发明人： Bart Jozef Janssen , Gerard van Veen , Erik Kieft
IPC分类号： H01J37/244 , H01J37/04 , H01J37/26
摘要： Electron beam modulation in response to optical pump pulses applied to a sample is measured using SPAD elements. Individual detection events are used to form histograms of numbers of events in time bins associated with pump pulse timing. The histograms can be produced at a SPAD array, simplifying data transfer. In some examples, two SPAD arrays are stacked and a coincidence circuit discriminates signal events from noise events by determining corresponding events are detected within a predetermined time window.
-
-
-
-
-
-
-
-
-
搜索结果
37 条记录 (耗时 0.014 秒)
