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1.发明授权Method of performing tomographic imaging of a sample in a charged-particle microscope 有权在带电粒子显微镜中对样品进行断层成像的方法公开(公告)号：US08912491B2
公开(公告)日：2014-12-16
申请号：US14091035
申请日：2013-11-26
Applicant: FEI Company
Inventor： Remco Schoenmakers , Uwe Luecken , Erik Michiel Franken
CPC classification number: H01J37/22 , G01N23/046 , G01N23/2251 , G01N2223/418 , G01N2223/419 , H01J37/21 , H01J37/222 , H01J37/26 , H01J2237/21 , H01J2237/226 , H01J2237/2802
Abstract: The invention relates to a method of performing tomographic imaging of a sample comprising providing a beam of charged particles; providing the sample on a sample holder that can be tilted; in an imaging step, directing the beam through the sample to image the sample; repeating this procedure at each of a series of sample tilts to acquire a set of images; in a reconstruction step, mathematically processing images from said set to construct a composite image, whereby in said imaging step, for a given sample tilt, a sequence of component images is captured at a corresponding sequence of focus settings; and in said reconstruction step, for at least one member of said series of sample tilts, multiple members of said sequence of component images are used in said mathematical image processing. This renders a 3D imaging cube rather than a 2D imaging sheet at a given sample tilt.
Abstract translation: 本发明涉及一种对样品进行层析成像的方法，包括提供带电粒子束; 将样品提供在可倾斜的样品架上; 在成像步骤中，引导光束通过样品以成像样品; 在一系列样品倾斜中的每一个处重复该过程以获得一组图像; 在重建步骤中，数学地处理来自所述集合的图像以构建合成图像，由此在所述成像步骤中，对于给定的样本倾斜，在相应的焦点设置序列处捕获分量图像序列; 并且在所述重建步骤中，对于所述一系列样品倾斜中的至少一个构件，在所述数学图像处理中使用所述分量图像序列的多个成员。 这在给定的样品倾斜时呈现3D成像立方体，而不是2D成像片。
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公开(公告)号：US08817148B2
公开(公告)日：2014-08-26
申请号：US13645725
申请日：2012-10-05
Applicant: FEI Company
Inventor： Bart Jozef Janssen , Gerrit Cornelis van Hoften , Uwe Luecken
CPC classification number: H04N5/335 , H01L27/146 , H04N5/32 , H04N5/3575 , H04N5/374
Abstract: To avoid reset noise in a CMOS chip for direct particle counting, it is known to use Correlative Double Sampling: for each signal value, the pixel is sampled twice: once directly after reset and once after an integration time. The signal is then determined by subtracting the reset value from the later acquired value, and the pixel is reset again. In some embodiments of the invention, the pixel is reset only after a large number of read-outs. Applicants realized that typically a large number of events, typically approximately 10, are needed to cause a full pixel. By either resetting after a large number of images, or when one pixel of the image shows a signal above a predetermined value (for example 0.8 × the full-well capacity), the image speed can be almost doubled compared to the prior art method, using a reset after acquiring a signal.
Abstract translation: 为了避免用于直接粒子计数的CMOS芯片中的复位噪声，已知使用相关双倍采样：对于每个信号值，像素被采样两次：一次直接在复位后和一次积分时间之后。 然后通过从稍后获取的值中减去复位值来确定信号，并且再次复位像素。 在本发明的一些实施例中，仅在大量读出之后复位像素。 申请人意识到通常需要大量的事件，通常约为10个，以引起一个完整的像素。 通过在大量图像之后进行复位，或者当图像的一个像素显示高于预定值（例如0.8×全阱容量）的信号时，与现有技术方法相比，图像速度可以几乎翻倍， 在获取信号后使用复位。
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公开(公告)号：US20150170876A1
公开(公告)日：2015-06-18
申请号：US14574179
申请日：2014-12-17
Applicant: FEI Company
Inventor： Bart Jozef Janssen , Gijs van Duinen , Uwe Luecken , Ross Savage , Stephanus H.L. van den Boom , Ivan Lazic
IPC: H01J37/28 , H01J37/20 , H01J37/244 , H01J37/26
CPC classification number: H01J37/28 , H01J37/20 , H01J37/244 , H01J37/265 , H01J37/295 , H01J2237/12 , H01J2237/14 , H01J2237/226 , H01J2237/24507 , H01J2237/2614 , H01J2237/2802 , H01J2237/2806
Abstract: A method of investigating a wavefront of a charged-particle beam that is directed from a source through an illuminator so as to traverse a sample plane and land upon a detector, an output of the detector being used in combination with a mathematical reconstruction technique so as to calculate at least one of phase information and amplitude information for the wavefront at a pre-defined location along its path to the detector, in which method: Said beam is caused to traverse a particle-optical lens system disposed between said sample plane and said detector; At a selected location in the path from said source to said detector, a modulator is used to locally produce a given modulation of the wavefront; In a series of measurement sessions, different such modulations are employed, and the associated detector outputs are collectively used in said mathematical reconstruction.
Abstract translation: 一种调查带电粒子束的波前的方法，该波前从源通过照明器引导以遍历采样平面并落在检测器上，检测器的输出与数学重建技术结合使用，以便 沿着其到达检测器的路径的预定位置处计算波前的相位信息和幅度信息中的至少一个，其中：所述光束被穿过设置在所述样品平面和所述检测器之间的粒子 - 光学透镜系统 探测器; 在从所述源到所述检测器的路径中的选定位置处，使用调制器来本地产生波前的给定调制; 在一系列测量会话中，使用不同的这种调制，并且相关联的检测器输出在所述数学重建中被统一使用。
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Patent Agency Ranking
公开(公告)号：US20150069231A1
公开(公告)日：2015-03-12
申请号：US14298919
申请日：2014-06-07
Applicant: FEI Company
CPC classification number: H01J37/20 , G01N23/046 , H01J37/22 , H01J37/28 , H01J2237/20207 , H01J2237/20228 , H01J2237/20235 , H01J2237/20264 , H01J2237/20285 , H01J2237/2802
Abstract: The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.
Abstract translation: 本发明涉及电子断层摄影的改进方法。 电子断层摄影是一个耗时的过程，因为必须获取通常在50-100幅图像之间的大量图像，以形成一个断层图像。 本发明教导了一种方法，通过不断地逐步倾斜样品来缩短通过连续倾斜样本来更快地获取这个量的图像所需的时间。 因此消除了在步骤之间减少振动所需的时间。
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公开(公告)号：US20130093931A1
公开(公告)日：2013-04-18
申请号：US13645725
申请日：2012-10-05
Applicant: FEI Company
Inventor： Bart Jozef Janssen , Gerrit Cornelis van Hoften , Uwe Luecken
IPC: H04N5/335 , H01L27/146
CPC classification number: H04N5/335 , H01L27/146 , H04N5/32 , H04N5/3575 , H04N5/374
Abstract: To avoid reset noise in a CMOS chip for direct particle counting, it is known to use Correlative Double Sampling: for each signal value, the pixel is sampled twice: once directly after reset and once after an integration time. The signal is then determined by subtracting the reset value from the later acquired value, and the pixel is reset again. In some embodiments of the invention, the pixel is reset only after a large number of read-outs. Applicants realized that typically a large number of events, typically approximately 10, are needed to cause a full pixel. By either resetting after a large number of images, or when one pixel of the image shows a signal above a predetermined value (for example 0.8×the full-well capacity), the image speed can be almost doubled compared to the prior art method, using a reset after acquiring a signal.
Abstract translation: 为了避免用于直接粒子计数的CMOS芯片中的复位噪声，已知使用相关双倍采样：对于每个信号值，像素被采样两次：一次直接在复位后和一次积分时间之后。 然后通过从稍后获取的值中减去复位值来确定信号，并且再次复位像素。 在本发明的一些实施例中，仅在大量读出之后复位像素。 申请人意识到通常需要大量的事件，通常约为10个，以引起一个完整的像素。 通过在大量图像之后进行复位，或者当图像的一个像素显示高于预定值（例如0.8×全阱容量）的信号时，与现有技术方法相比，图像速度可以几乎翻倍， 在获取信号后使用复位。
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公开(公告)号：US09202670B2
公开(公告)日：2015-12-01
申请号：US14574179
申请日：2014-12-17
Applicant: FEI Company
Inventor： Bart Jozef Janssen , Gijs van Duinen , Uwe Luecken , Ross Savage , Stephanus H.L. van den Boom , Ivan Lazic
IPC: G21K5/04 , H01J37/28 , H01J37/26 , H01J37/20 , H01J37/244 , H01J37/295
CPC classification number: H01J37/28 , H01J37/20 , H01J37/244 , H01J37/265 , H01J37/295 , H01J2237/12 , H01J2237/14 , H01J2237/226 , H01J2237/24507 , H01J2237/2614 , H01J2237/2802 , H01J2237/2806
Abstract: A method of investigating a wavefront of a charged-particle beam that is directed from a source through an illuminator so as to traverse a sample plane and land upon a detector, an output of the detector being used in combination with a mathematical reconstruction technique so as to calculate at least one of phase information and amplitude information for the wavefront at a pre-defined location along its path to the detector, in which method: Said beam is caused to traverse a particle-optical lens system disposed between said sample plane and said detector; At a selected location in the path from said source to said detector, a modulator is used to locally produce a given modulation of the wavefront; In a series of measurement sessions, different such modulations are employed, and the associated detector outputs are collectively used in said mathematical reconstruction.
Abstract translation: 一种调查带电粒子束的波前的方法，该波前从源通过照明器引导以遍历采样平面并落在检测器上，检测器的输出与数学重建技术结合使用，以便 沿着其到达检测器的路径的预定位置处计算波前的相位信息和幅度信息中的至少一个，其中：所述光束被穿过设置在所述样品平面和所述检测器之间的粒子 - 光学透镜系统 探测器; 在从所述源到所述检测器的路径中的选定位置处，使用调制器来本地产生波前的给定调制; 在一系列测量会话中，使用不同的这种调制，并且相关联的检测器输出在所述数学重建中被统一使用。
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公开(公告)号：US09147551B2
公开(公告)日：2015-09-29
申请号：US14298919
申请日：2014-06-07
Applicant: FEI Company
CPC classification number: H01J37/20 , G01N23/046 , H01J37/22 , H01J37/28 , H01J2237/20207 , H01J2237/20228 , H01J2237/20235 , H01J2237/20264 , H01J2237/20285 , H01J2237/2802
Abstract: The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.
Abstract translation: 本发明涉及电子断层摄影的改进方法。 电子断层摄影是一个耗时的过程，因为必须获取通常在50-100幅图像之间的大量图像，以形成一个断层图像。 本发明教导了一种方法，通过不断地逐步倾斜样品来缩短通过连续倾斜样本来更快地获取这个量的图像所需的时间。 因此消除了在步骤之间减少振动所需的时间。
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8.发明申请METHOD OF PERFORMING TOMOGRAPHIC IMAGING OF A SAMPLE IN A CHARGED-PARTICLE MICROSCOPE 有权在充电微粒中进行样品的图像成像的方法公开(公告)号：US20140145077A1
公开(公告)日：2014-05-29
申请号：US14091035
申请日：2013-11-26
Applicant: FEI Company
Inventor： Remco Schoenmakers , Uwe Luecken , Erik Michiel Franken
IPC: H01J37/22
CPC classification number: H01J37/22 , G01N23/046 , G01N23/2251 , G01N2223/418 , G01N2223/419 , H01J37/21 , H01J37/222 , H01J37/26 , H01J2237/21 , H01J2237/226 , H01J2237/2802
Abstract: The invention relates to a method of performing tomographic imaging of a sample comprising providing a beam of charged particles; providing the sample on a sample holder that can be tilted; in an imaging step, directing the beam through the sample to image the sample; repeating this procedure at each of a series of sample tilts to acquire a set of images; in a reconstruction step, mathematically processing images from said set to construct a composite image, whereby in said imaging step, for a given sample tilt, a sequence of component images is captured at a corresponding sequence of focus settings; and in said reconstruction step, for at least one member of said series of sample tilts, multiple members of said sequence of component images are used in said mathematical image processing. This renders a 3D imaging cube rather than a 2D imaging sheet at a given sample tilt.
Abstract translation: 本发明涉及一种对样品进行层析成像的方法，包括提供带电粒子束; 将样品提供在可倾斜的样品架上; 在成像步骤中，引导光束通过样品以成像样品; 在一系列样品倾斜中的每一个处重复该过程以获得一组图像; 在重建步骤中，数学地处理来自所述集合的图像以构建合成图像，由此在所述成像步骤中，对于给定的样本倾斜，在相应的焦点设置序列处捕获分量图像序列; 并且在所述重建步骤中，对于所述一系列样品倾斜中的至少一个构件，在所述数学图像处理中使用所述分量图像序列的多个成员。 这在给定的样品倾斜时呈现3D成像立方体，而不是2D成像片。
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