公开(公告)号：US12057286B2

公开(公告)日：2024-08-06

申请号：US18084430

申请日：2022-12-19

Applicant: FEI Company

Inventor： Edwin Verschueren ,  Paul Tacx

IPC: H01J37/02 ,  H01J37/28

CPC classification number: H01J37/023 ,  H01J37/28 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/2802

Abstract: A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.

公开(公告)号：US08957395B2

公开(公告)日：2015-02-17

申请号：US14221204

申请日：2014-03-20

Applicant: Jerry Peijster ,  Guido de Boer

Inventor： Jerry Peijster ,  Guido de Boer

IPC: H01J37/20 ,  H01J37/317

CPC classification number: H01J37/20 ,  H01J37/3002 ,  H01J37/3174 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/20292 ,  H01J2237/3175

Abstract: The invention relates to a charged particle beam lithography system comprising: a charged particle optical column arranged in a vacuum chamber for projecting a charged particle beam onto a target, wherein the column comprises deflecting means for deflecting the charged particle beam in a deflection direction, a target positioning device comprising a carrier for carrying the target, and a stage for carrying and moving the carrier along a first direction, wherein the first direction is different from the deflection direction, wherein the target positioning device comprises a first actuator for moving the stage in the first direction relative to the charged particle optical column, wherein the carrier is displaceably arranged on the stage and wherein the target positioning device comprises retaining means for retaining the carrier with respect to the stage in a first relative position.

公开(公告)号：US08530858B2

公开(公告)日：2013-09-10

申请号：US13000593

申请日：2009-06-11

Applicant: Shohei Terada ,  Yoshifumi Taniguchi

Inventor： Shohei Terada ,  Yoshifumi Taniguchi

IPC: H01J37/26

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/201 ,  H01J2237/20264 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/2802

Abstract: A transmission electron microscope apparatus, a sample holder and a sample stage and a method for acquiring spectral images as well are provided which can acquire spectral images at a time from a plurality of samples and measure highly accurate chemical shifts from electron energy loss spectra extracted from the spectral images. A transmission electron microscope apparatus comprises an electron gun for emitting an electron beam, a condenser lens for converging the emitted electron beam, a plurality of sample stages radiated with a converged electron beam and adapted to mount samples, a sample movement control unit for moving the sample stages, image-forming lenses for forming an image of an electron beam having transmitted through the plural samples, an electron spectrometer adapted to perform spectrometry of the electron beam in accordance with energy amounts the image-formed electron beam has and deliver spectral images obtained at convergence positions which are different in energy dispersion axis direction and in a direction orthogonal to the energy dispersion axis direction to thereby acquire spectral images from the plural samples at a time, and an image display unit for displaying acquired spectral images.

Abstract translation: 提供透射电子显微镜装置，样品架和样品台以及用于获取光谱图像的方法，其可以从多个样品一次获得光谱图像，并且从提取的电子能量损失谱测量高精度的化学位移 光谱图像。 一种透射电子显微镜装置，包括用于发射电子束的电子枪，用于会聚发射的电子束的聚光透镜，用会聚的电子束辐射并适合安装样品的多个样品台，用于移动 样品级，用于形成透过多个样品的电子束的图像的成像透镜，适于根据图像形成的电子束的能量进行电子束的光谱测定的电子光谱仪，并且传送所获得的光谱图像 在能量色散轴方向和与能量色散轴方向正交的方向上不同的会聚位置，从而一次从多个样本获取光谱图像，以及用于显示所取得的光谱图像的图像显示单元。

公开(公告)号：US20110260558A1

公开(公告)日：2011-10-27

申请号：US13123199

申请日：2009-10-06

Applicant: Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

Inventor： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

IPC: H02K41/02 ,  B23P11/00

CPC classification number: H01J37/20 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/28

Abstract: A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

Abstract translation: 平台包括用于引导可动台（4）的直线导轨（2），从动杆（12），与从动杆（12）接触的线性驱动致动器，以将驱动力传递到从动杆（12） 和用于保持从动杆（12）的相对端的平行板簧（30）。 线性驱动致动器的驱动传递表面设置成与可移动台（4）分离，这防止定位精度降低。 此外，平行弹簧（30）减小施加到支撑从动杆（12）的部分的变形力，并且这防止被驱动杆被损坏。 该配置使舞台高度准确和高度可靠。

公开(公告)号：US07851769B2

公开(公告)日：2010-12-14

申请号：US12253528

申请日：2008-10-17

Applicant: Andreas Karl Schmid ,  Nord Andresen

Inventor： Andreas Karl Schmid ,  Nord Andresen

IPC: G21K5/10

CPC classification number: H02N2/0095 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/20278 ,  H01J2237/28 ,  Y10T74/20348

Abstract: The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base (2), and attachment means (30) for attaching the specimen holder to the manipulator, characterized in that the manipulator further comprises at least three nano-actuators (3a, 3b, 3c) mounted on the base, each nano-actuator showing a tip (4a, 4b, 4c), the at least three tips defining the y-z plane, each tip capable of moving with respect to the base in the y-z plane; a platform (5) in contact with the tips of the nano-actuators; and clamping means (6) for pressing the platform against the tips of the nano-actuators; as a result of which the nano-actuators can rotate the platform with respect to the base in the y-z plane and translate the platform parallel to the y-z plane.

Abstract translation: 本发明涉及一种用于定位与yz平面平行的亚微米分辨率的TEM样本保持器并将样本架旋转在yz平面中的机动操纵器，所述操纵器包括基座（2）和用于附接的附接装置（30） 所述样本保持器到所述操纵器，其特征在于，所述操纵器还包括安装在所述基座上的至少三个纳米致动器（3a，3b，3c），每个纳米致动器显示尖端（4a，4b，4c） 限定yz平面的三个尖端，每个尖端能够在yz平面中相对于基座移动; 与纳米致动器的尖端接触的平台（5）; 以及用于将平台压靠纳米致动器的尖端的夹紧装置（6）; 其结果是纳米致动器能够相对于基座在y-z平面中旋转平台并将平台平行于y-z平面平移。

公开(公告)号：US20100006771A1

公开(公告)日：2010-01-14

申请号：US12491363

申请日：2009-06-25

Applicant: Hiroya Miyazaki

Inventor： Hiroya Miyazaki

IPC: G21K5/10

CPC classification number: H01J37/20 ,  H01J2237/201 ,  H01J2237/20207 ,  H01J2237/20221 ,  H01J2237/20264

Abstract: It is an object of the present invention to provide a significantly beneficial specimen holder which allows mounting one or more specimens, for example, a specimen to be examined and a standard adjustment specimen for aberration correction in one specimen holder at the same time, thereby observing each specimens. The present invention is a specimen holder having a specimen holder movement mechanism for driving the specimen holder, wherein the specimen holder movement mechanism makes it possible to move the specimen holder approximately along the longer side of the specimen holder. In a preferred embodiment of the specimen holder according to the present invention, the specimen holder is characterized in that the specimen holder movement mechanism makes it possible to vary an insertion depth of the specimen holder into a tube for holding the specimen holder, with no relation to another specimen holder movement mechanism set for driving the specimen holder approximately along the longer side of the specimen holder.

Abstract translation: 本发明的目的是提供一种显着有益的样本保持器，其允许在一个样本保持器中同时安装一个或多个样本，例如待检查样本和用于像差校正的标准调整样本，从而观察 每个标本。 本发明是具有用于驱动试样保持器的检体保持架移动机构的检体保持架，其中，检体保持架移动机构能够沿检体保持架的长边大致移动检体保持架。 在本发明的试样保持器的优选实施方式中，试样保持器的特征在于，试样保持架移动机构能够将试样保持器的插入深度变更为保持试样架的管，无关 到另一个样本保持器移动机构，用于大致沿着样本保持器的较长侧驱动样本保持器。

公开(公告)号：US07404339B2

公开(公告)日：2008-07-29

申请号：US11182108

申请日：2005-07-15

Applicant: Masanao Munekane ,  Kouji Iwasaki ,  Takashi Konno ,  Hiroki Hayashi

Inventor： Masanao Munekane ,  Kouji Iwasaki ,  Takashi Konno ,  Hiroki Hayashi

IPC: G01N1/00

CPC classification number: H01J37/20 ,  B25J7/00 ,  B25J15/12 ,  G01N1/32 ,  H01J2237/20264

Abstract: A probe mechanism and a sample pick up mechanism of the invention are provided at an observing apparatus or an analyzing apparatus and characterized in including a tip member comprising a needle-like member brought into contact with a sample, including a driving electrostatic actuator and means for monitoring a change in an electrostatic capacitance between electrodes of the electrostatic actuator, and capable of sensing that the probe is brought into contact with a sample by the monitor.

Abstract translation: 本发明的探针机构和取样机构设置在观察装置或分析装置中，其特征在于，包括：尖端部件，包括与样品接触的针状部件，所述针状部件包括驱动静电致动器和用于 监测静电致动器的电极之间的静电电容的变化，并且能够感测到探针通过监视器与样品接触。

公开(公告)号：US06617761B2

公开(公告)日：2003-09-09

申请号：US09803448

申请日：2001-03-09

Applicant: Toshio Ando ,  Akitoshi Toda

Inventor： Toshio Ando ,  Akitoshi Toda

IPC: H01L4108

CPC classification number: G01Q70/04 ,  G01Q10/04 ,  G02B21/002 ,  H01J2237/20264

Abstract: A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.

公开(公告)号：US06555829B1

公开(公告)日：2003-04-29

申请号：US09481103

申请日：2000-01-10

Applicant: James P. Spallas ,  Lawrence P. Muray ,  David Trost ,  Ho-Seob Kim ,  Tai-Hon P. Chang

Inventor： James P. Spallas ,  Lawrence P. Muray ,  David Trost ,  Ho-Seob Kim ,  Tai-Hon P. Chang

IPC: G01B902

CPC classification number: B23Q1/34 ,  B23Q1/621 ,  H01J37/023 ,  H01J2237/20264 ,  H01L21/68

Abstract: Disclosed is a positioning stage for precisely positioning an object within a limited range of travel (e.g. 100 &mgr;m). By way of example, the stage can be used to position an electron source such as a field emitter in an electron beam microcolumn. The stage includes a block which defines a channel to allow flexure along a first axis. The block also defines another channel to allow flexure along a second axis perpendicular to the first axis. Using actuators in the channels to flex a portion of the block, the object supported by the block can be precisely positioned to a desired location in a horizontal plane defined by the first and second axes.

Abstract translation: 公开了一种用于在有限的旅行范围内（例如，100mum）精确地定位物体的定位台。 作为示例，该级可用于将诸如场致发射体的电子源定位在电子束微柱中。 舞台包括限定通道以允许沿着第一轴弯曲的块。 该块还限定另一个通道，以允许沿垂直于第一轴线的第二轴线弯曲。 使用通道中的致动器来弯曲块的一部分，由块支撑的物体可精确地定位在由第一和第二轴限定的水平平面中的期望位置。

公开(公告)号：US20020017615A1

公开(公告)日：2002-02-14

申请号：US09803448

申请日：2001-03-09

Applicant: Olympus Optical Co., Ltd.

Inventor： Toshio Ando ,  Akitoshi Toda

IPC: G01J001/00 ,  G01N021/00 ,  G01N023/00

CPC classification number: G01Q70/04 ,  G01Q10/04 ,  G02B21/002 ,  H01J2237/20264

Abstract: A scanning unit for moving an object to be moved along at least one axis, which comprises a first actuator for moving the object along a first axis, the first actuator having a pair of end portions, and the object being attached to one of the end portions, the first actuator being held at a position in the vicinity of the center in dimension or the center of gravity thereof.

Abstract translation: 一种扫描单元，用于沿着至少一个轴线移动待移动的物体，该扫描单元包括用于沿着第一轴线移动物体的第一致动器，所述第一致动器具有一对端部，并且所述物体附接到所述端部中的一个端部 第一致动器被保持在中心附近或其重心附近的位置。