公开(公告)号：US20110260558A1

公开(公告)日：2011-10-27

申请号：US13123199

申请日：2009-10-06

申请人： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

发明人： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

IPC分类号： H02K41/02 ,  B23P11/00

CPC分类号： H01J37/20 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/28

摘要： A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

摘要翻译： 平台包括用于引导可动台（4）的直线导轨（2），从动杆（12），与从动杆（12）接触的线性驱动致动器，以将驱动力传递到从动杆（12） 和用于保持从动杆（12）的相对端的平行板簧（30）。 线性驱动致动器的驱动传递表面设置成与可移动台（4）分离，这防止定位精度降低。 此外，平行弹簧（30）减小施加到支撑从动杆（12）的部分的变形力，并且这防止被驱动杆被损坏。 该配置使舞台高度准确和高度可靠。

公开(公告)号：US20080218185A1

公开(公告)日：2008-09-11

申请号：US12118421

申请日：2008-05-09

申请人： Takashi FURUKAWA ,  Takayuki MIZUNO ,  Eiichi HAZAKI ,  Hirofumi SATO

发明人： Takashi FURUKAWA ,  Takayuki MIZUNO ,  Eiichi HAZAKI ,  Hirofumi SATO

IPC分类号： G01R31/303

CPC分类号： G01R31/307 ,  G01R31/2887

摘要： A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

摘要翻译： 探针导航方法，导航装置和缺陷检查装置，其中在具有用于电特性评估的探针的带电粒子束系统中，探测可以容易地进行，而不管设备用户的技能水平如何。 为了达到这个目的，探针和放置测试片的试片台由独立的驱动装置驱动。 此外，提供一体地驱动探针和试片台的大台驱动装置。 另外还采用CAD导航。 这样可以提高设备用户在探测过程中的便利性。

公开(公告)号：US07129727B2

公开(公告)日：2006-10-31

申请号：US11258041

申请日：2005-10-26

申请人： Tsutomu Saito ,  Osamu Yamada ,  Eiichi Hazaki ,  Yasuhiko Nara ,  Hirofumi Sato ,  Yoshikazu Inada ,  Yoshinori Numata

发明人： Tsutomu Saito ,  Osamu Yamada ,  Eiichi Hazaki ,  Yasuhiko Nara ,  Hirofumi Sato ,  Yoshikazu Inada ,  Yoshinori Numata

IPC分类号： G01R31/02 ,  G01R31/00

CPC分类号： G01R31/307 ,  G01R31/2891

摘要： A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.

摘要翻译： 用于测量包括精细布线图案的样品的电特性的多个探针与带电粒子束单元组合的缺陷检查装置包括简单地控制多个探针的图形用户界面（GUI）。 该装置包括：探针图像处理单元，用于在显示器上显示多个探针; 选择单元，从显示器上显示的探针中选择要被操作的探针; 以及显示单元，用于同时显示探针选择单元和指示所选择的探针是可操作探针的信息，或探针处于未选择状态。

公开(公告)号：US4639146A

公开(公告)日：1987-01-27

申请号：US600324

申请日：1984-04-13

申请人： Masahiro Yoshioka ,  Hideki Izumi ,  Hiroshi Inouye ,  Eiichi Hazaki ,  Shiro Nakadaira

发明人： Masahiro Yoshioka ,  Hideki Izumi ,  Hiroshi Inouye ,  Eiichi Hazaki ,  Shiro Nakadaira

IPC分类号： F16C17/06 ,  F16C27/00 ,  F16C27/02 ,  F16C27/08

CPC分类号： F16C17/06

摘要： A thrust bearing has a plurality of bearing pads each provided on its back side with a pivot, and a support on which the pads are disposed in the circumferential direction. An integral carrier is mounted on the support. The carrier has leg portions and a resilient portion and definies a squeeze film damper portion between the rear surface thereof and the opposing surface of the support. The pads are carried tiltably by the carrier through the pivots.

摘要翻译： 推力轴承具有多个轴承瓦片，每个轴承瓦片在其后侧具有枢轴，支撑件在其周向上设置有支撑件。 整体载体安装在支架上。 载体具有腿部和弹性部分，并且在其后表面和支撑体的相对表面之间限定挤压薄膜阻尼部分。 垫片由载体通过枢轴可倾斜地承载。

公开(公告)号：US20090230984A1

公开(公告)日：2009-09-17

申请号：US12471907

申请日：2009-05-26

申请人： Eiichi HAZAKI ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

发明人： Eiichi HAZAKI ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC分类号： G01R31/02

CPC分类号： G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

摘要翻译： 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于 第一名

公开(公告)号：US07372283B2

公开(公告)日：2008-05-13

申请号：US11397677

申请日：2006-04-05

申请人： Takashi Furukawa ,  Takayuki Mizuno ,  Eiichi Hazaki ,  Hirofumi Sato

发明人： Takashi Furukawa ,  Takayuki Mizuno ,  Eiichi Hazaki ,  Hirofumi Sato

IPC分类号： G01R31/02 ,  G01R31/00

CPC分类号： G01R31/307 ,  G01R31/2887

摘要： A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

摘要翻译： 探针导航方法，导航装置和缺陷检查装置，其中在具有用于电特性评估的探针的带电粒子束系统中，探测可以容易地进行，而不管设备用户的技能水平如何。 为了达到这个目的，探针和放置测试片的试片台由独立的驱动装置驱动。 此外，提供一体地驱动探针和试片台的大台驱动装置。 另外还采用CAD导航。 这样可以提高设备用户在探测过程中的便利性。

公开(公告)号：US20080048699A1

公开(公告)日：2008-02-28

申请号：US11976238

申请日：2007-10-23

申请人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

发明人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC分类号： G01R31/02

CPC分类号： G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

摘要翻译： 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且在第二位置处的测量精度优于 第一名

公开(公告)号：US06403968B1

公开(公告)日：2002-06-11

申请号：US09347844

申请日：1999-07-02

申请人： Eiichi Hazaki ,  Masaki Kurihara ,  Kaname Takahashi

发明人： Eiichi Hazaki ,  Masaki Kurihara ,  Kaname Takahashi

IPC分类号： H01J3720

CPC分类号： H01J37/20 ,  H01J2237/0216 ,  H01J2237/28

摘要： Oil from an oil source is introduced into an inside of a reciprocal oil hydraulic pressure cylinder through a port, and a lock shaft is pushed against a lock plate by the oil pressure to restrict movement of a tilt table. A cylindrical portion made of a material having a large friction coefficient to the lock plate is attached to a top end of the lock shaft so as to contact with the lock plate in a surface contact state. Releasing of stage locking is performed by introducing the oil into the inside of the reciprocal oil hydraulic pressure cylinder through another port to draw back the lock shaft by the oil pressure. Thereby, the stiffness of the sample stage lock mechanism in the x-direction becomes large and the friction force in the y- and z-directions also becomes large. Therefore, vibration of the tilt table in the x-, y- and z-directions can be effectively suppressed.

摘要翻译： 来自油源的油通过端口被引入往复式油压缸的内部，并且通过油压将锁定轴推向锁定板以限制倾斜台的移动。 由锁定板具有大的摩擦系数的材料制成的圆筒部分附接到锁定轴的顶端，以便在表面接触状态下与锁定板接触。 通过另一端口将油引入往复式油压缸的内部，通过油压拉回锁定轴来执行级锁定的释放。 因此，样品台锁定机构在x方向的刚度变大，并且在y方向和z方向上的摩擦力也变大。 因此，可以有效地抑制倾斜台在x，y和z方向上的振动。

公开(公告)号：US5393977A

公开(公告)日：1995-02-28

申请号：US69573

申请日：1993-06-01

申请人： Akimitsu Okura ,  Mitsugu Sato ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

发明人： Akimitsu Okura ,  Mitsugu Sato ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

IPC分类号： H01J37/22 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q60/10 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265

摘要： A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.

摘要翻译： 用电子束扫描样本，以产生样本的信号特征，从而根据产生的信号产生图像。 提供了一种存储器，用于存储与用于指定样本的识别信息相关联的扫描电子显微镜的操作条件。 指定识别信息，从而从存储器读出与指定的识别信息相对应的至少一个操作条件，并且自动设置读出操作条件，使得扫描电子显微镜在设定的操作条件下操作。

公开(公告)号：US4749344A

公开(公告)日：1988-06-07

申请号：US42700

申请日：1987-04-27

申请人： Yoshikatsu Tomita ,  Katsuaki Kikuchi ,  Eiichi Hazaki ,  Tetsuya Arata ,  Masao Shiibayashi ,  Kazutaka Suefuji ,  Takao Senshu ,  Akira Murayama

发明人： Yoshikatsu Tomita ,  Katsuaki Kikuchi ,  Eiichi Hazaki ,  Tetsuya Arata ,  Masao Shiibayashi ,  Kazutaka Suefuji ,  Takao Senshu ,  Akira Murayama

IPC分类号： F04C18/02 ,  F01C21/04 ,  F04C29/02 ,  F01C1/02 ,  F01M11/02 ,  F16C9/02

CPC分类号： F01C21/04

摘要： An oil feeding device for a scroll fluid apparatus. A fixed scroll member is associated with an orbiting scroll member. A crankshaft rotatably supported by a bearing of a frame has a crank portion engaging with a plain bearing of the orbiting scroll member. A variable speed driving motor is connected to the crankshaft. An oil feeding passageway is provided in the crankshaft and the crank portion. Oil is supplied to the plain bearing of the orbiting scroll member through a space at the end face of the crank portion. An oil flow passage is provided in parallel with the axis and in a surface of the crank portion located at a position advanced through approximately 45 degrees toward the rotational direction of the crank portion, from a position at which the load acting radially of the shaft due to the centrifugal force caused by the orbiting motion of the orbiting scroll member is applied to the crank portion of the shaft.

摘要翻译： 一种用于涡旋流体装置的供油装置。 固定涡旋构件与旋转涡旋构件相关联。 由框架的轴承可旋转地支撑的曲轴具有与旋转涡旋构件的滑动轴承接合的曲柄部。 变速驱动电动机连接到曲轴。 在曲轴和曲柄部分设置供油通道。 油通过曲柄部分的端面处的空间供给到绕动涡旋件的滑动轴承。 一个油流通道与轴线平行地设置在曲柄部分的表面上，该曲柄部分位于从轴的径向方向施加的负载的位置处，该曲柄部分位于从曲柄部分的旋转方向前进大约45度的位置 由于绕动涡旋构件的旋转运动引起的离心力被施加到轴的曲柄部分。