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公开(公告)号：US20230386696A1
公开(公告)日：2023-11-30
申请号：US18326935
申请日：2023-05-31
CPC分类号： G21K5/04 , H01J37/3007 , G21K1/02 , H01J37/3177 , H01J37/16 , H01J37/12 , H01J2237/0216 , H01J2237/0262 , H01J2237/1215 , H01J2237/002 , H01J2237/032 , H01J2237/30472 , H01J2237/16 , H01J2237/1825 , H01J2237/0213 , H01J2237/1207 , H01J2237/024
摘要： The invention relates to charged particle beam generator comprising a charged particle source for generating a charged particle beam, a collimator system comprising a collimator structure with a plurality of collimator electrodes for collimating the charged particle beam, a beam source vacuum chamber comprising the charged particle source, and a generator vacuum chamber comprising the collimator structure and the beam source vacuum chamber within a vacuum, wherein the collimator system is positioned outside the beam source vacuum chamber. Each of the beam source vacuum chamber and the generator vacuum chamber may be provided with a vacuum pump.
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公开(公告)号：US09905322B2
公开(公告)日：2018-02-27
申请号：US14541233
申请日：2014-11-14
IPC分类号： G21K1/02 , G21K5/04 , H01J37/30 , H01J37/24 , H01J37/317 , H01J37/02 , H01J37/16 , H01J37/065 , H01J37/12
CPC分类号： G21K1/02 , G21K5/04 , H01J37/026 , H01J37/065 , H01J37/12 , H01J37/16 , H01J37/24 , H01J37/3002 , H01J37/3007 , H01J37/3174 , H01J37/3175 , H01J37/3177 , H01J2237/002 , H01J2237/0216 , H01J2237/024 , H01J2237/032 , H01J2237/04 , H01J2237/1215 , H01J2237/16 , H01J2237/1825 , H01J2237/303 , H01J2237/30472
摘要： The invention relates to a collimator electrode stack (70), comprising: —at least three collimator electrodes (71-80) for collimating a charged particle beam along an optical axis (A), wherein each collimator electrode comprises an electrode body with an electrode aperture for allowing passage to the charged particle beam, wherein the electrode bodies are spaced along an axial direction (Z) which is substantially parallel with the optical axis, and wherein the electrode apertures are coaxially aligned along the optical axis; and —a plurality of spacing structures (89) provided between each pair of adjacent collimator electrodes and made of an electrically insulating material, for positioning the collimator electrodes at predetermined distances along the axial direction. Each of the collimator electrodes (71-80) is electrically connected to a separate voltage output (151-160).The invention further relates to a method of operating a charged particle beam generator.
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公开(公告)号：US09703213B2
公开(公告)日：2017-07-11
申请号：US14342542
申请日：2012-09-12
CPC分类号： G03F7/70891 , B82Y10/00 , B82Y40/00 , G03F7/709 , H01J37/02 , H01J37/3177 , H01J2237/002 , H01J2237/0216 , H01J2237/28
摘要： The invention relates to a substrate processing apparatus (10) comprising a support frame (60), a radiation projection system (20) for projecting radiation onto a substrate to be processed, a substrate support structure (30) for supporting the substrate, and a fluid transfer system (150). The radiation projection system comprises a cooling arrangement (130) and is supported by and vibrationally decoupled from the support frame such that vibrations of the support frame above a predetermined maximum frequency are substantially decoupled from the radiation projection system. The fluid transfer system comprises at least one tube (140) fixed at two points (151,152), and comprises a flexible portion. A substantial part of the flexible portion extends over a plane substantially parallel to the substrate support structure surface. The stiffness of the flexible portion is adapted to substantially decouple vibrations at the second fixed point which are above the predetermined maximum frequency from the first fixed point.
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公开(公告)号：US20170125209A1
公开(公告)日：2017-05-04
申请号：US15243753
申请日：2016-08-22
申请人： FEI Company
IPC分类号： H01J37/24 , H01J37/244 , H01J37/22 , H01J37/20
CPC分类号： H01J37/24 , H01J37/20 , H01J37/226 , H01J37/244 , H01J37/265 , H01J37/268 , H01J2237/0216
摘要： A method of using a Charged Particle Microscope comprising: A specimen holder, connected to a positioning stage, for holding a specimen; A source, for producing a beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation, comprising the following steps: Providing the microscope with an interferential optical position sensor for determining a position of said specimen holder relative to a reference; Providing an automatic controller with a time-dependent position signal from said optical position sensor; Invoking said controller to use said signal to produce a vibration profile for the microscope.
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公开(公告)号：US20160133437A1
公开(公告)日：2016-05-12
申请号：US14938689
申请日：2015-11-11
申请人： FEI Company
IPC分类号： H01J37/26
CPC分类号： H01J37/265 , H01J37/02 , H01J2237/0216 , H01J2237/16
摘要： A method of mitigating the effects of environmental pressure variation while using a charged particle microscope is described. The charged particle microscope equipped with a barometric pressure sensor and an automatic controller configured to use the signal from the barometric sensor as an input to a control procedure to compensate for a relative positional error between the charged particle beam and the specimen holder.
摘要翻译： 描述了在使用带电粒子显微镜时减轻环境压力变化的影响的方法。 装有大气压力传感器和自动控制器的带电粒子显微镜被配置为使用来自气压传感器的信号作为控制过程的输入，以补偿带电粒子束和样品架之间的相对位置误差。
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公开(公告)号：US20160111243A1
公开(公告)日：2016-04-21
申请号：US14969306
申请日：2015-12-15
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
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7.发明申请Charged Particle Beam System and Method of Operating a Charged Particle Beam System 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US20160104598A1
公开(公告)日：2016-04-14
申请号：US14969352
申请日：2015-12-15
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
摘要翻译： 本公开涉及一种气体离子源，其包括壳体，布置在壳体内的导电尖端，用于向壳体供应一种或多种气体的气体源，其中所述一种或多种气体包括氖或具有原子的惰性气体 具有大于氖的质量，以及具有孔的提取器电极，其允许在尖端附近产生的离子穿过孔。 提取器电极的面向尖端的表面可以由每个入射氖离子具有小于10-5的负次级离子溅射速率的材料制成。
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公开(公告)号：US09257258B2
公开(公告)日：2016-02-09
申请号：US14738950
申请日：2015-06-15
发明人： Yang Wei , Shou-Shan Fan
CPC分类号： H01J37/20 , B82Y40/00 , C25D5/48 , C25D5/54 , C25D7/00 , H01J37/26 , H01J2237/0216 , Y10S977/742
摘要： A method of making a transmission electron microscope micro-grid includes following steps. A carbon nanotube layer is provided, and the carbon nanotube layer includes a first surface and a second surface opposite to each other. A first metal layer is electroplated on the first surface and a second metal layer is electroplated on the second surface. A number of first through holes are formed by etching the first metal layer, and a number of second through holes are formed by etching the second metal layer, wherein the carbon nanotube layer is exposed through the number of first through holes and the number of second through holes.
摘要翻译： 制造透射电子显微镜微格栅的方法包括以下步骤。 提供碳纳米管层，碳纳米管层包括彼此相对的第一表面和第二表面。 在第一表面上电镀第一金属层，在第二表面上电镀第二金属层。 通过蚀刻第一金属层形成多个第一通孔，并且通过蚀刻第二金属层形成多个第二通孔，其中通过多个第一通孔露出碳纳米管层，并且第二通孔的数量 通孔。
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9.发明授权Charged particle beam system and method of operating a charged particle beam system 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US09218935B2
公开(公告)日：2015-12-22
申请号：US14314289
申请日：2014-06-25
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
摘要翻译： 本公开涉及一种气体离子源，其包括壳体，布置在壳体内的导电尖端，用于向壳体供应一种或多种气体的气体源，其中所述一种或多种气体包括氖或具有原子的惰性气体 具有大于氖的质量，以及具有孔的提取器电极，其允许在尖端附近产生的离子穿过孔。 提取器电极的面向尖端的表面可以由每个入射氖离子具有小于10-5的负次级离子溅射速率的材料制成。
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公开(公告)号：US09024275B2
公开(公告)日：2015-05-05
申请号：US13816601
申请日：2011-08-16
申请人： Shohei Terada
发明人： Shohei Terada
CPC分类号： H01J37/20 , H01J37/26 , H01J2237/0216
摘要： The present invention realizes a specimen holder for a charged-particle beam apparatus capable for moving at least one specimen support, and for obtaining the image of the transmission electron microscopy, or the like of all specimens arranged in the specimen holder with high spatial resolution. The retainer plates are put on the specimen supports after the specimen supports are set on the specimen stages at the end portion of the specimen holder respectively. Thereafter, the specimen supports and the retainer plates are fixed to the specimen stages. The vibration damping mechanism is arranged on the end portion side of the specimen holder. The vibration of the specimen support can be prevented or restricted by the condition that the vibration damping mechanism contacts to the specimen support. Accordingly, the transmission electron microscopy image can be obtained with high spatial resolution power.
摘要翻译： 本发明实现了用于移动至少一个样本支架的带电粒子束装置的样本保持器，并且用于获得以高空间分辨率布置在样本保持器中的所有样本的透射电子显微镜等的图像。 将样品支架分别放置在样品架端部的样品台上之后，将保持板放在样品支架上。 然后，将试样支架固定在试样台上。 振动阻尼机构设置在试样架的端部侧。 可以通过减振机构与试样支架接触的条件来防止或限制试样支架的振动。 因此，可以以高空间分辨率的功率获得透射电子显微镜图像。
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