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公开(公告)号：US20160111243A1
公开(公告)日：2016-04-21
申请号：US14969306
申请日：2015-12-15
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
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2.发明申请Charged Particle Beam System and Method of Operating a Charged Particle Beam System 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US20160104598A1
公开(公告)日：2016-04-14
申请号：US14969352
申请日：2015-12-15
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
摘要翻译： 本公开涉及一种气体离子源，其包括壳体，布置在壳体内的导电尖端，用于向壳体供应一种或多种气体的气体源，其中所述一种或多种气体包括氖或具有原子的惰性气体 具有大于氖的质量，以及具有孔的提取器电极，其允许在尖端附近产生的离子穿过孔。 提取器电极的面向尖端的表面可以由每个入射氖离子具有小于10-5的负次级离子溅射速率的材料制成。
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3.发明授权Charged particle beam system and method of operating a charged particle beam system 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US09218935B2
公开(公告)日：2015-12-22
申请号：US14314289
申请日：2014-06-25
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
摘要翻译： 本公开涉及一种气体离子源，其包括壳体，布置在壳体内的导电尖端，用于向壳体供应一种或多种气体的气体源，其中所述一种或多种气体包括氖或具有原子的惰性气体 具有大于氖的质量，以及具有孔的提取器电极，其允许在尖端附近产生的离子穿过孔。 提取器电极的面向尖端的表面可以由每个入射氖离子具有小于10-5的负次级离子溅射速率的材料制成。
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公开(公告)号：US10354830B2
公开(公告)日：2019-07-16
申请号：US15469702
申请日：2017-03-27
发明人： Weijie Huang , John A. Notte
摘要： An ion source includes an external housing, an electrically conductive tip, a gas supply system, configured to supply an operating gas into the neighborhood of the tip, and a cooling system configured to cool the tip. The gas supply system includes a first tube with a hollow interior, and a chemical getter material is provided in the hollow interior of the tube.
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5.发明申请Charged Particle Beam System and Method of Operating a Charged Particle Beam System 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US20150008333A1
公开(公告)日：2015-01-08
申请号：US14314262
申请日：2014-06-25
IPC分类号： H01J37/08
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
摘要翻译： 本公开涉及一种操作气体场离子束系统的方法，其中气体场离子束系统包括外部壳体，布置在外部壳体内的内部壳体，布置在内部壳体内的导电尖端，气体源 用于将一个或多个气体供应到内部壳体，气体供应具有终止在内部壳体内的管，以及具有孔的提取器电极，其具有允许在尖端附近产生的离子通过孔进入外部壳体。 该方法包括将外部壳体，内部壳体，导电尖端，管子和提取器电极定期加热至高于100℃的温度。
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6.发明申请CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权充电颗粒束系统和操作充电颗粒束系统的方法公开(公告)号：US20150008332A1
公开(公告)日：2015-01-08
申请号：US14314317
申请日：2014-06-25
发明人： John A. Notte, IV , Weijie Huang , Raymond Hill , FHM-Faridur Rahman , Alexander Groholski , Shawn McVey
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
摘要翻译： 本发明涉及一种具有枪壳体的气体离子源，连接到枪壳体的导电枪壳底座，安装在枪壳底座上的内管，内管由电隔离陶瓷制成， 连接到内管的导电尖端，安装到枪罐底座的外管，外管由电绝缘陶瓷制成，以及附接到外管的提取器电极。 提取器电极可以具有用于通过在导电末端附近产生的离子的开口。
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公开(公告)号：US09640364B2
公开(公告)日：2017-05-02
申请号：US14969352
申请日：2015-12-15
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
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8.发明授权Charged particle beam system and method of operating a charged particle beam system 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US09536699B2
公开(公告)日：2017-01-03
申请号：US14314317
申请日：2014-06-25
发明人： John A. Notte, IV , Weijie Huang , Raymond Hill , FHM-Faridur Rahman , Alexander Groholski , Shawn McVey
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
摘要翻译： 本发明涉及一种具有枪壳体的气体离子源，连接到枪壳体的导电枪壳底座，安装在枪壳底座上的内管，内管由电隔离陶瓷制成， 连接到内管的导电尖端，安装到枪罐底座的外管，外管由电绝缘陶瓷制成，以及附接到外管的提取器电极。 提取器电极可以具有用于通过在导电末端附近产生的离子的开口。
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9.发明授权Charged particle beam system and method of operating a charged particle beam system 有权带电粒子束系统和操作带电粒子束系统的方法公开(公告)号：US09218934B2
公开(公告)日：2015-12-22
申请号：US14314262
申请日：2014-06-25
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
摘要翻译： 本公开涉及一种操作气体场离子束系统的方法，其中气体场离子束系统包括外部壳体，布置在外部壳体内的内部壳体，布置在内部壳体内的导电尖端，气体源 用于将一个或多个气体供应到内部壳体，气体供应具有终止在内部壳体内的管，以及具有孔的提取器电极，其具有允许在尖端附近产生的离子通过孔进入外部壳体。 该方法包括将外部壳体，内部壳体，导电尖端，管子和提取器电极定期加热至高于100℃的温度。
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10.发明申请CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权充电颗粒束系统和操作充电颗粒束系统的方法公开(公告)号：US20150008334A1
公开(公告)日：2015-01-08
申请号：US14314289
申请日：2014-06-25
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
摘要翻译： 本公开涉及一种气体离子源，其包括壳体，布置在壳体内的导电尖端，用于向壳体供应一种或多种气体的气体源，其中所述一种或多种气体包括氖或具有原子的惰性气体 具有大于氖的质量，以及具有孔的提取器电极，其允许在尖端附近产生的离子穿过孔。 提取器电极的面向尖端的表面可以由每个入射氖离子具有小于10-5的负次级离子溅射速率的材料制成。
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