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    Ion implanter and controlling method therefor
    2.
    发明授权
    Ion implanter and controlling method therefor 失效
    离子注入机及其控制方法

    公开(公告)号：US5293508A

    公开(公告)日：1994-03-08

    申请号：US865275

    申请日：1992-04-08

    申请人： Shigeru Shiratake ,  Hirohisa Yamamoto

    发明人： Shigeru Shiratake ,  Hirohisa Yamamoto

    IPC分类号： C23C14/48 ,  C23C14/54 ,  C23C30/00 ,  H01J37/24 ,  H01J37/317 ,  H01L21/265 ,  H05F3/04

    CPC分类号： C23C8/36 ,  H01J37/026 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/0045 ,  H01J2237/1202 ,  H01J2237/1215 ,  H01J2237/20

    摘要： An ion implanter encloses a semiconductor substrate adjacent to a fixing member which retains a semiconductor substrate on a supporting bed. The ion implanter includes a ring electrode for generating secondary electrons in response to incident ions and a cup-like electrode for directing the secondary ions to the semiconductor substrate. The ring electrode is negatively biased with respect to the supporting bed and the cup-like electrode surrounds the outer edge of the semiconductor substrate. The ion implanter increases the quantity of the secondary electrons produced and efficiently directs them to the semiconductor substrate. The semiconductor substrate which is electrically charged by implanting ions is neutralized, preventing dielectric breakdown from occurring in an insulating film.

    摘要翻译： 离子注入机包围与固定部件相邻的半导体衬底，该固定部件将半导体衬底保持在支撑床上。 离子注入机包括用于响应于入射离子产生二次电子的环形电极和用于将二次离子引导到半导体衬底的杯形电极。 环状电极相对于支撑床呈负偏置，杯形​​电极围绕半导体衬底的外边缘。 离子注入机增加产生的二次电子的量并有效地将它们引导到半导体衬底。 通过注入离子而带电的半导体衬底被中和，防止在绝缘膜中发生电介质击穿。

    OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS
    4.
    发明申请
    OBJECTIVE LENS ARRANGEMENT USABLE IN PARTICLE-OPTICAL SYSTEMS 审中-公开
    目标镜头布置可用于粒子系统

    公开(公告)号：US20160181054A1

    公开(公告)日：2016-06-23

    申请号：US15056143

    申请日：2016-02-29

    申请人： CARL ZEISS MICROSCOPY GMBH ,  APPLIED MATERIALS ISRAEL, LTD.

    发明人： Rainer KNIPPELMEYER ,  Stefan SCHUBERT

    IPC分类号： H01J37/145

    CPC分类号： H01J37/141 ,  H01J37/145 ,  H01J37/20 ,  H01J37/21 ,  H01J37/24 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/04922 ,  H01J2237/04926 ,  H01J2237/12 ,  H01J2237/1215 ,  H01J2237/14 ,  H01J2237/1405 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2817

    摘要： An objective lens arrangement includes a first, second and third pole pieces, each being substantially rotationally symmetric. The first, second and third pole pieces are disposed on a same side of an object plane. An end of the first pole piece is separated from an end of the second pole piece to form a first gap, and an end of the third pole piece is separated from an end of the second pole piece to form a second gap. A first excitation coil generates a focusing magnetic field in the first gap, and a second excitation coil generates a compensating magnetic field in the second gap. First and second power supplies supply current to the first and second excitation coils, respectively. A magnetic flux generated in the second pole piece is oriented in a same direction as a magnetic flux generated in the second pole piece.

    摘要翻译： 物镜配置包括第一，第二和第三极片，每个极片基本上是旋转对称的。 第一，第二和第三极片设置在物平面的同一侧。 第一极靴的端部与第二极靴的端部分离以形成第一间隙，并且第三极靴的端部与第二极靴的端部分离以形成第二间隙。 第一激励线圈在第一间隙中产生聚焦磁场，第二激励线圈在第二间隙中产生补偿磁场。 第一和第二电源分别向第一和第二励磁线圈提供电流。 在第二极靴中产生的磁通量在与第二极靴中产生的磁通量相同的方向上定向。

    Multi-electrode stack arrangement
    5.
    发明授权
    Multi-electrode stack arrangement 有权
    多电极堆叠布置

    公开(公告)号：US09355751B2

    公开(公告)日：2016-05-31

    申请号：US14541238

    申请日：2014-11-14

    申请人： MAPPER LITHOGRAPHY IP B.V.

    发明人： Willem Henk Urbanus ,  Marco Jan-Jaco Wieland

    IPC分类号： G21K1/02 ,  G21K5/04 ,  H01J37/24 ,  H01J37/30 ,  H01J37/317 ,  H01J37/02 ,  H01J37/16 ,  H01J37/065 ,  H01J37/12

    CPC分类号： G21K1/02 ,  G21K5/04 ,  H01J37/026 ,  H01J37/065 ,  H01J37/12 ,  H01J37/16 ,  H01J37/24 ,  H01J37/3002 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3175 ,  H01J37/3177 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/032 ,  H01J2237/04 ,  H01J2237/1215 ,  H01J2237/16 ,  H01J2237/1825 ,  H01J2237/303 ,  H01J2237/30472

    摘要： The invention relates to an electrode stack (70) comprising stacked electrodes (71-80) for manipulating a charged particle beam along an optical axis (A). Each electrode comprises an electrode body with an aperture for the charged particle beam. The electrode bodies are mutually spaced and the electrode apertures are coaxially aligned along the optical axis. The electrode stack comprises electrically insulating spacing structures (89) between each pair of adjacent electrodes for positioning the electrodes (71-80) at predetermined mutual distances along the axial direction (Z). A first electrode and a second electrode each comprise an electrode body with one or more support portions (86), wherein each support portion is configured to accommodate at least one spacing structure (89). The electrode stack has at least one clamping member (91-91c) configured to hold the support portions (86) of the first and second electrodes, as well as the intermediate spacing structure (89) together.

    摘要翻译： 本发明涉及一种电极堆叠（70），其包括用于沿光轴（A）操纵带电粒子束的堆叠电极（71-80）。 每个电极包括具有用于带电粒子束的孔的电极体。 电极体相互间隔开，并且电极孔沿光轴同轴对准。 电极堆叠包括在每对相邻电极之间的电绝缘间隔结构（89），用于将电极（71-80）沿着轴向方向（Z）定位在预定的相互距离处。 第一电极和第二电极各自包括具有一个或多个支撑部分（86）的电极主体，其中每个支撑部分构造成容纳至少一个间隔结构（89）。 电极堆叠具有至少一个构造成将第一和第二电极的支撑部分（86）以及中间间隔结构（89）保持在一起的夹紧构件（91-91c）。

    Axially progressive lens for transporting charged particles
    7.
    发明授权
    Axially progressive lens for transporting charged particles 有权

    公开(公告)号：US11791149B2

    公开(公告)日：2023-10-17

    申请号：US17631393

    申请日：2020-07-16

    申请人： Agilent Technologies, Inc.

    发明人： Tong Chen ,  Curt A. Flory ,  Gershon Perelman

    IPC分类号： H01J49/06 ,  H01J37/12

    CPC分类号： H01J49/067 ,  H01J37/12 ,  H01J2237/1215 ,  H01J2237/1534

    摘要： An electrostatic lens for transporting charged particles in an axial direction includes a first group of first electrodes configured to receive a first DC potential from a DC voltage source, and a second group of second electrodes configured to receive a second DC potential from the DC voltage source different from the first DC potential. The first electrodes are interdigitated with the second electrodes. The first group and/or the second group has a geometric feature that progressively varies along the axial direction. The lens generates an axial potential profile that progressively changes along the axial direction, and thereby reduces geometrical aberrations. The lens may be part of a charged particle processing apparatus such as, for example, a mass spectrometer or an electron microscope.