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    ADAPTIVE PENCIL BEAM SCANNING
    3.
    发明申请
    ADAPTIVE PENCIL BEAM SCANNING 审中-公开

    公开(公告)号：US20170281980A1

    公开(公告)日：2017-10-05

    申请号：US15087292

    申请日：2016-03-31

    申请人： Varian Medical Systems Particle Therapy GmbH

    发明人： Joerg WULFF

    IPC分类号： A61N5/10 ,  H01J37/08 ,  H01J37/14

    CPC分类号： A61N5/1077 ,  A61N5/1043 ,  A61N2005/1087 ,  A61N2005/1095 ,  G21K1/093 ,  H01J37/08 ,  H01J37/14 ,  H01J2237/14

    摘要： Embodiments of the present invention disclose methods and systems for producing an adaptive pencil beam having an adjustable lateral beam size and Bragg-peak width. According to one disclosed embodiment, an apparatus for producing an adaptive pencil beam is disclosed. The apparatus includes a set of momentum band expanders configured to widen a momentum spread of a pencil beam, where a momentum band expander is selected from the set of momentum band expanders to receive the pencil beam, and a slit at dispersive focus of two dipole magnets to adjust a width of a Bragg-peak of the pencil beam. According to another disclosed embodiment, a method for producing an adaptive pencil beam with an adjustable lateral beam is disclosed. The method includes selecting a scatter foil, or setting of a defocusing/focusing magnet, and adjusting a lateral size of the pencil beam.

    Swing objective lens
    4.
    发明授权
    Swing objective lens 有权
    摆动物镜

    公开(公告)号：US09583306B2

    公开(公告)日：2017-02-28

    申请号：US14964274

    申请日：2015-12-09

    申请人： Hermes Microvision Inc.

    发明人： Shuai Li

    IPC分类号： G21K5/04 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J37/145 ,  H01J37/21

    CPC分类号： H01J37/1478 ,  H01J37/145 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/1035 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/1508 ,  H01J2237/1534 ,  H01J2237/1536 ,  H01J2237/2801 ,  H01J2237/2811

    摘要： A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam scanning angle. The scanning electron microscope comprises a charged particle source, an accelerating electrode, and a swing objective lens system including a pre-deflection unit, a swing deflection unit and an objective lens, all of them are rotationally symmetric with respect to an optical axis. The upper inner-face of the swing deflection unit is tilted an angle θ to the outer of the SEM and its lower inner-face is parallel to the optical axis. A distribution for a first and second focusing field of the swing objective lens is provided to limit the off-aberrations and can be performed by a single swing deflection unit. Preferably, the two focusing fields are overlapped by each other at least 80 percent.

    摘要翻译： 具有摆动物镜（SOL）的扫描电子显微镜（SEM）减小了偏差以提高图像分辨率，并且扩展了电子束扫描角度。 扫描电子显微镜包括带电粒子源，加速电极和包括预偏转单元，摆动偏转单元和物镜的摆动物镜系统，它们都相对于光轴旋转对称。 摆动偏转单元的上部内表面与SEM的外侧倾斜角度θ，其下部内表面平行于光轴。 提供了用于摆动物镜的第一和第二聚焦场的分布以限制偏差并且可以由单个摆动偏转单元执行。 优选地，两个聚焦场彼此重叠至少80％。

    Charged Particle Beam Apparatus
    5.
    发明申请
    Charged Particle Beam Apparatus 审中-公开
    带电粒子束装置

    公开(公告)号：US20160379797A1

    公开(公告)日：2016-12-29

    申请号：US14902436

    申请日：2014-06-25

    申请人： HITACHI HIGH-TECNOLOGIES CORPORATION

    发明人： Tsunenori NOMAGUCHI ,  Toshihide AGEMURA ,  Zulihuma YASENJIANG

    IPC分类号： H01J37/244 ,  H01J37/141 ,  H01J37/285 ,  H01J37/22

    CPC分类号： H01J37/244 ,  H01J37/141 ,  H01J37/145 ,  H01J37/1471 ,  H01J37/22 ,  H01J37/226 ,  H01J37/285 ,  H01J2237/12 ,  H01J2237/14

    摘要： Disclosed is a charged particle beam apparatus wherein charged particles emitted from a sample are efficiently acquired at a position as close as possible to the sample, said position being in the objective lens. This charged particle beam apparatus is provided with: a charged particle beam receiving surface that is provided with a scintillator that emits light by means of charged particles; a photodetector that detects light emitted from the scintillator; a mirror that guides, to the photodetector, the light emitted from the scintillator; and an objective lens for focusing the charged particle beam to a sample. A distance (Lsm) between the charged particle beam receiving surface and the mirror is longer than a distance (Lpm) between the photodetector and the mirror, and the charged particle beam receiving surface, the mirror, and the photodetector are stored in the objective lens.

    摘要翻译： 公开了一种带电粒子束装置，其中从样品发射的带电粒子在尽可能靠近样品的位置被有效地获取，所述位置在物镜中。 该带电粒子束装置具有：带电粒子束接收面，其具有通过带电粒子发光的闪烁器; 检测从闪烁体发出的光的光检测器; 向所述光电检测器引导从所述闪烁体发射的光的反射镜; 以及用于将带电粒子束聚焦到样品的物镜。 带电粒子束接收表面和反射镜之间的距离（Lsm）长于光电检测器和反射镜之间的距离（Lpm），并且带电粒子束接收表面，反射镜和光电检测器被存储在物镜 。

    Swing Objective Lens
    6.
    发明申请
    Swing Objective Lens 有权
    摆动物镜

    公开(公告)号：US20160172150A1

    公开(公告)日：2016-06-16

    申请号：US14964274

    申请日：2015-12-09

    申请人： Hermes Microvision Inc.

    发明人： Shuai Li

    IPC分类号： H01J37/147 ,  H01J37/145 ,  H01J37/21 ,  H01J37/28

    CPC分类号： H01J37/1478 ,  H01J37/145 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/1035 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/1508 ,  H01J2237/1534 ,  H01J2237/1536 ,  H01J2237/2801 ,  H01J2237/2811

    摘要： A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam scanning angle. The scanning electron microscope comprises a charged particle source, an accelerating electrode, and a swing objective lens system including a pre-deflection unit, a swing deflection unit and an objective lens, all of them are rotationally symmetric with respect to an optical axis. The upper inner-face of the swing deflection unit is tilted an angle θ to the outer of the SEM and its lower inner-face is parallel to the optical axis. A distribution for a first and second focusing field of the swing objective lens is provided to limit the off-aberrations and can be performed by a single swing deflection unit. Preferably, the two focusing fields are overlapped by each other at least 80 percent.

    摘要翻译： 具有摆动物镜（SOL）的扫描电子显微镜（SEM）减小了偏差以提高图像分辨率，并且扩展了电子束扫描角度。 扫描电子显微镜包括带电粒子源，加速电极和包括预偏转单元，摆动偏转单元和物镜的摆动物镜系统，它们都相对于光轴旋转对称。 摆动偏转单元的上内表面倾斜一角度; 到SEM的外侧，并且其下内表面平行于光轴。 提供了用于摆动物镜的第一和第二聚焦场的分布以限制偏差并且可以由单个摆动偏转单元执行。 优选地，两个聚焦场彼此重叠至少80％。

    Correlative optical and charged particle microscope
    8.
    发明授权
    Correlative optical and charged particle microscope 有权
    相关光学和带电粒子显微镜

    公开(公告)号：US09293297B2

    公开(公告)日：2016-03-22

    申请号：US14606850

    申请日：2015-01-27

    申请人： FEI Company

    发明人： Bart Buijsse

    IPC分类号： H01J37/26 ,  H01J37/22 ,  H01J37/20

    CPC分类号： H01J37/226 ,  H01J37/20 ,  H01J37/228 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/14 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/223 ,  H01J2237/2602

    摘要： A Correlative Light and Electron Microscope (CLEM) is equipped with a TEM column and a light microscope fitted between the pole shoes of the objective lens of the TEM. To enlarge the acceptance solid angle for enhanced sensitivity a truncated lens is used. It is noted that this does not imply that the lens shows astigmatism (it is not a cylindrical lens).Using the light microscope, a first image is made with the sample in a first direction. This image will show in one direction a higher (diffraction limited) resolution than in the direction perpendicular thereto, due to the different NA of the lens in the two directions. By rotating the sample and making a second image, a combined image can be formed showing a better resolution than either of the images in the direction where they show a low NA.

    摘要翻译： 相关的光电子显微镜（CLEM）配有TEM柱和光学显微镜，装在TEM的物镜的极靴之间。 为了增加灵敏度的接受立体角，使用截头透镜。 应注意，这并不意味着透镜显示散光（它不是柱面透镜）。 使用光学显微镜，在第一方向上用样品制作第一图像。 由于透镜在两个方向上的NA不同，该图像将在一个方向上显示比垂直于其方向更高（衍射受限）的分辨率。 通过旋转样品并制作第二图像，可以形成组合图像，其显示出比它们显示低NA的方向中的任一个图像更好的分辨率。

    Method for Removing Foreign Substances in Charged Particle Beam Device, and Charged Particle Beam Device
    10.
    发明申请
    Method for Removing Foreign Substances in Charged Particle Beam Device, and Charged Particle Beam Device 有权
    带电粒子束装置和带电粒子束装置中除去异物的方法

    公开(公告)号：US20150279609A1

    公开(公告)日：2015-10-01

    申请号：US14433886

    申请日：2013-10-17

    申请人： Hitachi High-Technologies Corporation

    发明人： Kazuma Tanii ,  Yuji Kasai ,  Masakazu Takahashi ,  Hajime Kawano

    IPC分类号： H01J37/141 ,  H01J37/21

    CPC分类号： H01J37/141 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/028 ,  H01J2237/14 ,  H01J2237/2817

    摘要： Foreign substances present in a sample chamber are attached to or drawn close to an objective lens and an electrode disposed close to the objective lens by applying a higher magnetic field than when normally used to the objective lens and applying a higher electric field than when normally used to the electrode disposed close to the objective lens. A stage is moved such that the center of an optical axis is located directly above a dedicated stand capable of applying voltage, the magnetic field of the objective lens is turned off, and then the potential difference between the electrode disposed close to the objective lens and an electrode disposed close to the sage is periodically maximized and minimized to thereby forcibly drop the foreign substances onto the dedicated stand capable of applying voltage.

    摘要翻译： 存在于样品室中的异物通过施加比通常用于物镜时更高的磁场并且施加比通常使用的电场高的电场而附接到或靠近物镜和靠近物镜设置的电极 到靠近物镜设置的电极。 移动台，使得光轴的中心位于能够施加电压的专用支架的正上方，物镜的磁场被关闭，然后将靠近物镜的电极之间的电位差和 靠近圣人设置的电极被周期性地最大化并最小化，从而强制将异物掉入能够施加电压的专用支架上。