公开(公告)号：US20240203685A1

公开(公告)日：2024-06-20

申请号：US18068769

申请日：2022-12-20

Applicant: FEI Company

Inventor： Bart Buijsse ,  Pleun Dona

IPC: H01J37/20 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/20 ,  H01J37/261 ,  H01J37/28

Abstract: Systems, methods, and components of charged particle microscopes affording improved contrast in dose sensitive samples are described. A pole piece for an electron microscope can include a body, being substantially concentric with a central axis. The body can define an upper surface, substantially normal to the central axis, a lower surface, substantially normal to the central axis, a central aperture formed in the body from the upper surface to the lower surface. The central aperture can be substantially rotationally symmetrical about the central axis. The body can define a lateral surface, inclined relative to the central axis and tapering toward the upper surface and a plurality of lateral apertures formed in the body from the lateral surface to the central aperture. The plurality of lateral apertures can be arrayed substantially symmetrically about the central axis.

公开(公告)号：US11694874B2

公开(公告)日：2023-07-04

申请号：US17374459

申请日：2021-07-13

Applicant: FEI Company

Inventor： Bart Buijsse ,  Bart Jozef Janssen

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/295

CPC classification number: H01J37/265 ,  H01J37/295 ,  H01J2237/04

Abstract: Method and system for generating a diffraction image comprises acquiring multiple frames from a direct-detection detector responsive to irradiating a sample with an electron beam. Multiple diffraction peaks in the multiple frames are identified. A first dose rate of at least one diffraction peak in the identified diffraction peaks is estimated in the counting mode. If the first dose rate is not greater than a threshold dose rate, a diffraction image including the diffraction peak is generated by counting electron detection events. Values of pixels belonging to the diffraction peak are determined with a first set of counting parameter values corresponding to a first coincidence area. Values of pixels not belonging to any of the multiple diffraction peaks are determined using a second, set of counting parameter values corresponding to a second, different, coincidence area.

公开(公告)号：US11456149B2

公开(公告)日：2022-09-27

申请号：US16835218

申请日：2020-03-30

Applicant: FEI Company

Inventor： Bart Buijsse ,  Alexander Henstra ,  Yuchen Deng

IPC: H01J37/22 ,  H01J37/26 ,  H01J37/32

Abstract: Diffraction patterns of a sample at various tilt angles are acquired by irradiating a region of interest using a first charged particle beam. Sample images are acquired by irradiating the region of interest using a second charged particle beam. The first and second charged particle beams are formed by splitting charged particles generated by a charged particle source.

公开(公告)号：US11004655B2

公开(公告)日：2021-05-11

申请号：US16738992

申请日：2020-01-09

Applicant: FEI Company

Inventor： Bart Buijsse ,  Maarten Kuijper

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/147 ,  H01J37/244

Abstract: Techniques of using a Transmission Charged Particle Microscope for diffraction pattern detection are disclosed. An example method including irradiating at least a portion of a specimen with a charged particle beam, using an imaging system to collect charged particles that traverse the specimen during said irradiation, and to direct them onto a detector configured to operate in a particle counting mode, using said detector to record a diffraction pattern of said irradiated portion of the specimen, recording said diffraction pattern iteratively in a series of successive detection frames, and during recording of each frame, using a scanning assembly for causing relative motion of said diffraction pattern and said detector, so as to cause each local intensity maximum in said pattern to trace out a locus on said detector.

公开(公告)号：US09958403B1

公开(公告)日：2018-05-01

申请号：US15728252

申请日：2017-10-09

Applicant: FEI Company

Inventor： Pavel Stejskal ,  Marek Un{hacek over (c)}ovský ,  Tomá{hacek over (s)} Vystav{hacek over (e)}l ,  Alan Frank de Jong ,  Bart Buijsse ,  Pierre Bleuet

IPC: G01N23/00 ,  G01N23/04 ,  G21K7/00

CPC classification number: G01N23/046 ,  G01N23/2251 ,  G01N2223/1016 ,  G01N2223/204 ,  G01N2223/309 ,  G01N2223/3306 ,  G01N2223/401 ,  G01N2223/417 ,  G01N2223/419 ,  G21K7/00 ,  H01J37/28 ,  H01J2237/2807

Abstract: A method of investigating a specimen using X-ray tomography, comprising (a) mounting the specimen to a specimen holder, (b) irradiating the specimen with a beam of X-rays along a first line of sight through the specimen, and (c) detecting a flux of X-rays transmitted through the specimen and forming a first image. Then (d) repeating the steps (b) and (c) for a series of different lines of sight through the specimen, thereby producing a corresponding series of images. The method further comprises (e) performing a mathematical reconstruction on said series of images, so as produce a tomogram of at least part of the specimen, wherein the specimen is disposed within a substantially cylindrical metallic shell with an associated cylindrical axis, the beam of X-rays is produced by directing a beam of charged particles onto a zone of said metallic shell, so as to produce a confined X-ray source at said zone, and the series of different lines of sight is achieved by rotating said shell about said cylindrical axis, thereby causing relative motion of said zone relative to the specimen.

公开(公告)号：US20140203191A1

公开(公告)日：2014-07-24

申请号：US14160135

申请日：2014-01-21

Applicant: FEI Company

Inventor： Bart Buijsse ,  Linda Francina van Driel

IPC: G01N21/64

CPC classification number: G02B21/082 ,  G01N21/6458 ,  G02B21/16

Abstract: The invention relates to a method of inspecting parts of a sample on a TEM grid with a fluorescence microscope, as arises when performing correlative microscopy, more specifically for samples on a holey carbon grid. A problem occurs when imaging vitrified ice with sample material when the ice is heated by the light used. The invention is based on the insight that the absorption in the carbon support film is responsible for the heating, as ice hardly absorbs light. By localizing the illumination of the fluorescent microscope to the parts of the sample that are above a hole in the carbon, heating of the ice is lowered. The localization can be achieved by, for example, passing the light through a LCD type Spatial Light Modulator.

Abstract translation: 本发明涉及一种利用荧光显微镜在TEM网格上检测样品的部分的方法，如进行相关显微镜时更为具体地用于多孔碳网格上的样品。 当冰被所用的光加热时，用样品材料成像玻璃化冰时会出现问题。 本发明是基于以下认识：碳载体膜中的吸收负责加热，因为冰难以吸收光。 通过将荧光显微镜的照明定位在碳上方的孔的上方的样品部分，冰的加热降低。 定位可以通过例如使光通过LCD型空间光调制器来实现。

公开(公告)号：US10935506B2

公开(公告)日：2021-03-02

申请号：US16450321

申请日：2019-06-24

Applicant: FEI Company

Inventor： Bart Buijsse ,  Abhay Kotecha

IPC: G01N23/20 ,  G01N23/04 ,  G01N23/205

Abstract: Molecular structure may be determined based on structure factors solved from the diffraction pattern and the electron microscopy image of the sample. In particular, the amplitudes of the structure factors may be determined based on intensities of diffraction peaks in the multiple diffraction patterns. The phases of the structure factors may be determined based on electron microscopy images and the intensities of the diffraction peaks.

公开(公告)号：US10545100B2

公开(公告)日：2020-01-28

申请号：US15264132

申请日：2016-09-13

Applicant: FEI Company

Inventor： Bart Buijsse ,  Faysal Boughorbel

IPC: G01N23/04 ,  H01J35/00 ,  H01J37/28

Abstract: An x-ray source for computer tomography uses several sub-sources. An electron beam impacts the several sub-sources to achieve a high x-ray flux with high resolution. The several sub-sources produce a composite image, which is deconvolved to disentangle the composite image and render a useful image. The configuration of the several sub-sources can be optimized for a given specimen structure.

公开(公告)号：US09312098B2

公开(公告)日：2016-04-12

申请号：US14629387

申请日：2015-02-23

Applicant: FEI Company

Inventor： Ivan Lazic ,  Eric Gerardus Theodoor Bosch ,  Faysal Boughorbel ,  Bart Buijsse ,  Kasim Sader ,  Sorin Lazar

IPC: H01J37/26 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/26 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802

Abstract: Examining a sample in a charged-particle microscope of a scanning transmission type includes: Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample; Providing a detector for detecting a flux of charged particles traversing the sample; Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample, Embodying the detector to comprise a plurality of detection segments; Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field; and Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.

Abstract translation: 在扫描透射型的带电粒子显微镜中检查样品包括：提供从源通过照射器引导以便照射样品的带电粒子束; 提供检测器，用于检测穿过样品的带电粒子的通量; 使所述光束扫描穿过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，使检测器包含多个检测段; 组合来自检测器的不同段的信号，以便在每个扫描位置产生从检测器输出的矢量，并且编译该数据以产生矢量场; 并通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。

公开(公告)号：US09293297B2

公开(公告)日：2016-03-22

申请号：US14606850

申请日：2015-01-27

Applicant: FEI Company

Inventor： Bart Buijsse

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/20

CPC classification number: H01J37/226 ,  H01J37/20 ,  H01J37/228 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/14 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/223 ,  H01J2237/2602

Abstract: A Correlative Light and Electron Microscope (CLEM) is equipped with a TEM column and a light microscope fitted between the pole shoes of the objective lens of the TEM. To enlarge the acceptance solid angle for enhanced sensitivity a truncated lens is used. It is noted that this does not imply that the lens shows astigmatism (it is not a cylindrical lens).Using the light microscope, a first image is made with the sample in a first direction. This image will show in one direction a higher (diffraction limited) resolution than in the direction perpendicular thereto, due to the different NA of the lens in the two directions. By rotating the sample and making a second image, a combined image can be formed showing a better resolution than either of the images in the direction where they show a low NA.

Abstract translation: 相关的光电子显微镜（CLEM）配有TEM柱和光学显微镜，装在TEM的物镜的极靴之间。 为了增加灵敏度的接受立体角，使用截头透镜。 应注意，这并不意味着透镜显示散光（它不是柱面透镜）。 使用光学显微镜，在第一方向上用样品制作第一图像。 由于透镜在两个方向上的NA不同，该图像将在一个方向上显示比垂直于其方向更高（衍射受限）的分辨率。 通过旋转样品并制作第二图像，可以形成组合图像，其显示出比它们显示低NA的方向中的任一个图像更好的分辨率。