公开(公告)号：US20180209880A1

公开(公告)日：2018-07-26

申请号：US15935762

申请日：2018-03-26

申请人： The Florida State University Research Foundation, Inc.

发明人： Michael G. Roper ,  Nikita Mukhitov ,  Scott Stagg ,  John Spear

IPC分类号： G01N1/31 ,  H01J37/20 ,  G01N1/30

CPC分类号： G01N1/312 ,  G01N1/30 ,  H01J37/20 ,  H01J2237/2002 ,  H01J2237/2602

摘要： A sample preparation device for electron microscopy (EM) that is configured to eliminate user-to-user variations and environment contaminations, which are often present in the conventional method of sample preparation. The device not only provides a means for evenly and reproducibly delivering a fluid or sample to an EM grid, but also provides a means for sealing the EM grid in an air-tight chamber and delivering air-sensitive samples to the EM grid. The platform may comprise readily fabricated glass chips with features integrated to preserve the integrity of the sample grid and to facilitate its extraction. The methods may eliminate the element of user dependent variability and thus improve the throughput, reproducibility and translation of these methods.

公开(公告)号：US09984850B2

公开(公告)日：2018-05-29

申请号：US15051210

申请日：2016-02-23

申请人： PROTOCHIPS, INC.

发明人： John Damiano, Jr. ,  Stephen E. Mick ,  David P. Nackashi

IPC分类号： H01J37/26 ,  H01J37/20

CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/188 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/2602 ,  H01J2237/28 ,  H01J2237/2802

摘要： Electron microscope support structures and methods of making and using same. The support structures are generally constructed using semiconductor materials and semiconductor manufacturing processes. The temperature of the support structure may be controlled and/or gases or liquids may be confined in the observation region for reactions and/or imaging.

公开(公告)号：US09952128B2

公开(公告)日：2018-04-24

申请号：US15285070

申请日：2016-10-04

申请人： The Scripps Research Institute

发明人： Bridget Carragher ,  Clinton S. Potter ,  Tilak Jain

IPC分类号： G01N1/28 ,  G01N1/30 ,  G01N1/31 ,  H01J37/20 ,  H01J37/26

CPC分类号： G01N1/28 ,  G01N1/30 ,  G01N1/31 ,  G01N1/312 ,  H01J37/20 ,  H01J37/261 ,  H01J2237/20 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/2602

摘要： The invention provides systems or apparatuses for dispensing aqueous materials for electron microscopy (EM). The systems allow dispensing of aqueous materials onto an EM sample grid at individual specimen locations in an ordered array of specimen locations, with each individual specimen location in the array of locations. The systems contain a holder for reversibly receiving an EM sample grid, and a dispenser containing one or more dispensing elements that are configured to discretely dispense one or more aqueous solutions from the dispensing elements onto a plurality of individual specimen locations. The dispenser is able to provide an ordered array of discrete specimen locations discontinuous with one another. In the systems, at least one dispensing element is configured to dispense picoliter volumes of one or more of the aqueous solutions. Additionally, the systems contain a drive mechanism to position the EM sample grid relative to the one or more dispensing elements, as well as one or more reservoirs operably linked to the dispenser for holding the one or more aqueous solutions to be discretely dispensed onto each individual specimen location in the array of locations.

公开(公告)号：US09583303B2

公开(公告)日：2017-02-28

申请号：US14878513

申请日：2015-10-08

申请人： FEI Company

发明人： Bart Buijsse ,  Gijs van Duinen

IPC分类号： H01J37/26 ,  H01J37/02 ,  H01J37/153

CPC分类号： H01J37/023 ,  H01J37/153 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/024 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/2602 ,  H01J2237/2614

摘要： When preparing a Hole-Free Phase Plates (HFPP) a preferably featureless thin film should be placed with high accuracy in the diffraction plane of the TEM, or a plane conjugate to it. Two methods for accurately placing the thin film in said plane are described. One method uses a Ronchigram of the thin film while the TEM is in imaging mode, and the magnification of the Ronchigram is tuned so that the magnification in the middle of the Ronchigram is infinite. The second method uses electrons scattered by the thin film while the TEM is in diffraction mode. When the thin film does not coincide with the diffraction plane, electrons scattered by the thin film seem to originate from another location than the cross-over of the zero beam. This is observed as a halo. The absence of the halo is proof that the thin film coincides with the diffraction plane.

摘要翻译： 当准备无孔相板（HFPP）时，应该在TEM的衍射平面或与其共轭的平面上以高精度放置优选无特征薄膜。 描述了将薄膜准确地放置在所述平面中的两种方法。 当TEM处于成像模式时，一种方法使用薄膜的Ronchigram，并且调整Ronchigram的放大倍率，使得Ronchigram中间的放大倍率是无穷大的。 第二种方法是在TEM处于衍射模式时使用由薄膜散射的电子。 当薄膜与衍射平面不一致时，由薄膜散射的电子似乎源自与零光束交叉的另一位置。 这被观察为光环。 光晕的不存在证明薄膜与衍射平面重合。

公开(公告)号：US20160268929A1

公开(公告)日：2016-09-15

申请号：US14657234

申请日：2015-03-13

申请人： Ho Seob KIM ,  Byeng Jin KIM ,  Do Jin SEONG

发明人： Ho Seob KIM ,  Byeng Jin KIM ,  Do Jin SEONG

IPC分类号： H02N2/02 ,  H01J37/10 ,  H01J37/26 ,  H01J37/20

CPC分类号： H01J37/261 ,  H01J37/10 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/10 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20264 ,  H01J2237/2602 ,  H02N2/006 ,  H02N2/026

摘要： Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.

摘要翻译： 这里公开了使用即使在真空环境中也可靠地运行的压电元件的微型平台。 在需要高精度的微粒子柱（例如微电子柱）中，微型载物台可以用作具有微量级或纳米级精度的阶段，用于校准塔的部分或用于移动样品等。

公开(公告)号：US20160225581A1

公开(公告)日：2016-08-04

申请号：US15022436

申请日：2014-10-31

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Takashi KUBO ,  Hiroyuki KOBAYASHI

IPC分类号： H01J37/22 ,  H01J37/10 ,  H01J37/26

CPC分类号： H01J37/222 ,  H01J37/10 ,  H01J37/22 ,  H01J37/261 ,  H01J37/263 ,  H01J2237/045 ,  H01J2237/103 ,  H01J2237/221 ,  H01J2237/248 ,  H01J2237/2602

摘要： To improve the workability of the task of adjusting the position of a limit field diaphragm. An electron microscope provided with an image-capturing means for capturing an image of an observation visual field prior to insertion of a limit field diaphragm as a map image, a recording means for recording the map image, an extraction means for capturing an image of the observation visual field after insertion of the limit field diaphragm and extracting the outline of the diaphragm, a drawing means for drawing the outline on the map image, and a display means for displaying the image drawn by the drawing means.

摘要翻译： 提高调节极限场隔膜位置任务的可操作性。 一种具有图像捕获装置的电子显微镜，其用于在作为地图图像的极限场光阑插入之前捕获观察视野的图像，用于记录地图图像的记录装置，用于拍摄图像的图像的提取装置 插入极限视场光阑并提取光阑的轮廓之后的观察视野，用于在地图图像上绘制轮廓的绘图装置，以及显示由绘图装置绘制的图像的显示装置。

公开(公告)号：US09349564B2

公开(公告)日：2016-05-24

申请号：US14334293

申请日：2014-07-17

申请人： FEI Company

发明人： N. William Parker ,  Marcus Straw ,  Jorge Filevich

IPC分类号： H01J37/12 ,  H01J37/26 ,  H01J37/244

CPC分类号： H01J37/12 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/12 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/2602

摘要： A transmissive lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include elements that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis.

摘要翻译： 提供了用于检测X射线和光的带电粒子束列中的透射透镜。 最终的透镜可以包括对于用于EDS成像和分析的X射线透射的元件或对于用于阴极发光（CL）成像和分析的光透射的元件。 最终的透镜可被构造和布置为包括用于X射线和光的透射的元件以用于组合的EDS和CL成像和分析。

公开(公告)号：US09324540B2

公开(公告)日：2016-04-26

申请号：US14407117

申请日：2013-04-12

申请人： Hitachi High-Technologies Corporation

发明人： Ichiro Tachibana ,  Naomasa Suzuki

IPC分类号： H01J37/26 ,  G21K5/04 ,  H01J37/21 ,  H01J37/28 ,  H01J37/10 ,  H01J37/147

CPC分类号： H01J37/21 ,  H01J37/10 ,  H01J37/147 ,  H01J37/263 ,  H01J37/28 ,  H01J37/3178 ,  H01J2237/04756 ,  H01J2237/0492 ,  H01J2237/063 ,  H01J2237/10 ,  H01J2237/15 ,  H01J2237/21 ,  H01J2237/244 ,  H01J2237/2602 ,  H01J2237/281

摘要： When a signal electron is detected by energy selection by combining and controlling retarding and boosting for observation of a deep hole, etc., the only way for focus adjustment is to use a change in magnetic field of an objective lens. However, since responsiveness of the change in magnetic field is poor, throughput reduces. A charged particle beam device includes: an electron source configured to generate a primary electron beam; an objective lens configured to focus the primary electron beam; a deflector configured to deflect the primary electron beam; a detector configured to detect a secondary electron or a reflection electron generated from a sample by irradiation of the primary electron beam; an electrode having a hole through which the primary electron beam passes; a voltage control power supply configured to apply a negative voltage to the electrode; and a retarding voltage control power supply configured to generate an electric field, which decelerates the primary electron beam, on the sample by applying the negative voltage to the sample, wherein the charged particle beam device performs focus adjustment while an offset between the voltage applied to the electrode and the voltage applied to the sample is being kept constant.

摘要翻译： 当通过组合并控制用于观察深孔等的延迟和升压来进行能量选择来检测信号电子时，聚焦调整的唯一方式是使用物镜的磁场变化。 然而，由于磁场变化的响应性差，吞吐量降低。 带电粒子束装置包括：电子源，被配置为产生一次电子束; 配置成聚焦一次电子束的物镜; 偏转器，被配置为偏转所述一次电子束; 检测器，被配置为通过一次电子束的照射来检测从样品产生的二次电子或反射电子; 具有一次电子束通过的孔的电极; 电压控制电源，被配置为向所述电极施加负电压; 以及延迟电压控制电源，被配置为通过向样本施加负电压来产生使样品上的一次电子束减速的电场，其中带电粒子束装置执行焦点调整，同时施加到 施加到样品的电极和电压保持恒定。

公开(公告)号：US09274070B2

公开(公告)日：2016-03-01

申请号：US14383713

申请日：2013-03-08

申请人： APPFIVE, LLC

发明人： Jon Karl Weiss ,  Amith D. Darbal ,  Raman D. Narayan ,  Steven T. Kim ,  Stavros Nicolopoulos

IPC分类号： H01J37/26 ,  G01N23/225 ,  G01N23/20 ,  H01J37/295 ,  G01N3/02

CPC分类号： G01N23/2251 ,  G01N3/02 ,  G01N23/20058 ,  H01J37/26 ,  H01J37/261 ,  H01J37/2955 ,  H01J2237/15 ,  H01J2237/2448 ,  H01J2237/24585 ,  H01J2237/2602 ,  H01J2237/2802

摘要： A process for measuring strain is provided that includes placing a sample of a material into a TEM as a sample. The TEM is energized to create a small electron beam with an incident angle to the sample. Electrical signals are generated that control multiple beam deflection coils and image deflection coils of the TEM. The beam deflection control signals cause the angle of the incident beam to change in a cyclic time-dependent manner. A first diffraction pattern from the sample material that shows dynamical diffraction effects is observed and then one or more of the beam deflection coil control signals are adjusted to reduce the dynamical diffraction effects. One or more of the image deflection coil control signals are then adjusted to remove any motion of the diffraction pattern. A diffraction pattern is then collected from a strained area of the material after the adjusting step, and the strain is then determined from a numerical analysis of the strained diffraction pattern compared to a reference diffraction pattern from an unstained area of the material.

摘要翻译： 提供了一种测量应变的方法，包括将材料样品放置在TEM中作为样品。 TEM被激励以产生具有与样品的入射角的小电子束。 产生控制TEM的多个光束偏转线圈和图像偏转线圈的电信号。 光束偏转控制信号使入射光束的角度以循环时间依赖的方式变化。 观察到来自示出动态衍射效应的样品材料的第一衍射图案，然后调整一个或多个光束偏转线圈控制信号以减少动态衍射效应。 然后调整一个或多个图像偏转线圈控制信号以去除衍射图案的任何运动。 然后在调整步骤之后从材料的应变区域收集衍射图案，然后根据与材料的未染色区域的参考衍射图案的应变衍射图案的数值分析来确定应变。

公开(公告)号：US20150235802A1

公开(公告)日：2015-08-20

申请号：US14420722

申请日：2013-08-08

申请人： SNU R&DB Foundation

发明人： Young Woon Kim ,  Sung Dae Kim

IPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/22

CPC分类号： H01J37/20 ,  H01J37/226 ,  H01J37/228 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/2602 ,  H01J2237/2808

摘要： Disclosed is a holder device for an electron microscope, which efficiently collects light emitted when electrons collide with a sample inside the electron microscope and is selectively usable in various electron microscopes since it can be easily attached to and detached from the electron microscopes. The holder device includes a frame; a sample support block configured to be supported on the frame and comprising a sample mounting portion to support an edge of a sample; a mirror unit configured to comprise an upper mirror and a lower mirror respectively arranged above and below the sample and reflect light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction; a condensing lens configured to condense light from the mirror unit on a predetermined target; and an optical fiber configured to collect light from the condensing lens.

摘要翻译： 公开了一种用于电子显微镜的保持装置，其有效地收集当电子与电子显微镜内部的样品碰撞时发射的光，并且可以选择性地使用于各种电子显微镜，因为它可以容易地附着到电子显微镜上并从电子显微镜上分离。 支架装置包括框架; 样品支撑块，被配置为支撑在所述框架上并且包括样品安装部分以支撑样品的边缘; 反射镜单元，被配置为包括分别布置在样本上方和下方的上反射镜和下反射镜，并将从样品发射的光沿预定方向反射，该样品安装到样品安装部分并且发射电子束; 聚光透镜，被配置为将来自所述反射镜单元的光在预定目标上进行冷凝; 以及配置为收集来自聚光透镜的光的光纤。