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    Observation apparatus and optical axis adjustment method
    2.
    发明授权
    Observation apparatus and optical axis adjustment method 有权
    观察装置和光轴调整方法

    公开(公告)号：US09466457B2

    公开(公告)日：2016-10-11

    申请号：US14422531

    申请日：2013-07-01

    申请人： Hitachi High-Technologies Corporation

    发明人： Yusuke Ominami ,  Mami Konomi ,  Shinsuke Kawanishi ,  Sukehiro Ito

    IPC分类号： H01J37/18 ,  H01J37/20 ,  H01J37/22 ,  H01J37/28 ,  H01J37/04 ,  H01J37/16 ,  H01J37/09 ,  H01J37/26

    CPC分类号： H01J37/18 ,  H01J37/04 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/228 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/164 ,  H01J2237/1825 ,  H01J2237/2602 ,  H01J2237/2605

    摘要： Ordinary charged particle beam apparatuses have each been an apparatus manufactured for dedicated use in making observations in a gas atmosphere at atmospheric pressure or at a pressure substantially equal thereto. There have existed no devices capable of simply making observations using an ordinary high-vacuum charged particle microscope in a gas atmosphere at atmospheric pressure or at a pressure approximately equal thereto. Furthermore, ordinary techniques have been incapable of observing the same spot of the sample in such an atmosphere using a charged particle beam and light simultaneously. This invention thus provides an apparatus including: a charged particle optical tube that irradiates a sample with a primary charged particle beam; a vacuum pump that evacuates the inside of the charged particle optical tube; a diaphragm arranged to separate a space in which the sample is placed from the charged particle optical tube, the diaphragm being detachable and allowing the primary charged particle beam to permeate or pass therethrough; and an optical microscope positioned on the opposite side of the charged particle optical tube across the diaphragm and the sample, the optical microscope having an optical axis thereof aligned with at least part of an extension of the optical axis of the charged particle optical tube.

    摘要翻译： 普通带电粒子束装置各自是制造用于在大气压或基本上等于其的压力下在气体气氛中进行观察的专用制造装置。 在大气压或大致相等的压力下，不存在使用普通的高真空带电粒子显微镜简单地进行观察的装置。 此外，普通技术已经不能使用带电粒子束和光同时在这样的大气中观察样品的相同点。 因此，本发明提供了一种装置，包括：带有电荷的粒子束照射样品的带电粒子光管; 抽真空带电粒子光管内部的真空泵; 隔膜，布置成将带有样品的空间与带电粒子光管分离，隔膜可拆卸并允许初级带电粒子束渗透或通过; 以及光学显微镜，其位于带电粒子光管的横跨隔膜和样品的相对侧，光学显微镜的光轴与带电粒子光管的光轴的延伸部分的至少一部分对准。

    Method of operating a particle beam microscope and a particle beam microscope
    5.
    发明授权
    Method of operating a particle beam microscope and a particle beam microscope 有权
    操作粒子束显微镜和粒子束显微镜的方法

    公开(公告)号：US09140656B2

    公开(公告)日：2015-09-22

    申请号：US14324360

    申请日：2014-07-07

    申请人： Carl Zeiss Microscopy GmbH

    发明人： Lorenz Lechner

    IPC分类号： H01J47/00 ,  G01N23/225 ,  H01J37/02 ,  H01J37/28

    CPC分类号： G01N23/2251 ,  H01J37/026 ,  H01J37/28 ,  H01J2237/045

    摘要： A method of operating a particle beam microscope includes: directing a particle beam onto a sample and detecting particles emanating from the sample during a first period for generating an image of the sample; generating electrons having a first distribution of kinetic energies and directing these electrons onto the sample during a second period for reducing a charge of the sample being generated while the directing the particle beam onto the sample; and generating electrons having a second distribution of their kinetic energies and directing these electrons onto the sample during a third period for further reducing the charge of the sample being generated while the directing of the particle beam onto the sample. An average value of the kinetic energy of the first distribution of the kinetic energy is greater than an average value of the kinetic energy of the second distribution of kinetic energies.

    摘要翻译： 操作粒子束显微镜的方法包括：在第一时间段期间将粒子束引导到样品上并检测从样品发出的颗粒，以产生样品的图像; 产生具有动能的第一分布的电子，并且在第二时段期间将这些电子引导到样品上以减少在将粒子束引导到样品上时产生的样品的电荷; 以及产生具有其动能的第二分布的电子并且在第三周期期间将这些电子引导到样品上，以进一步减少在将粒子束引导到样品上时产生的样品的电荷。 动能的第一次分布的动能的平均值大于动能的第二次分布的动能的平均值。

    Method and system of performing three-dimensional imaging using an electron microscope
    7.
    发明授权
    Method and system of performing three-dimensional imaging using an electron microscope 有权
    使用电子显微镜进行三维成像的方法和系统

    公开(公告)号：US08642959B2

    公开(公告)日：2014-02-04

    申请号：US11926791

    申请日：2007-10-29

    申请人： Shixin Wang

    发明人： Shixin Wang

    IPC分类号： G01N23/00

    CPC分类号： H01J37/14 ,  H01J29/64 ,  H01J37/09 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/1405 ,  H01J2237/1534

    摘要： A method and electron microscope system of performing three-dimensional imaging using an electron microscope. At least some of the illustrative embodiments are methods comprising generating an electron beam, and creating a hollow-cone electron beam (by passing the electron beam through an annular aperture), focusing the hollow-cone electron beam to form a probe, scanning a specimen using the probe; and performing three-dimensional imaging based on the scanning.

    摘要翻译： 使用电子显微镜进行三维成像的方法和电子显微镜系统。 至少一些说明性实施例是包括产生电子束并产生中空锥形电子束（通过使电子束通过环形孔）的方法，聚焦中空锥形电子束以形成探针，扫描样品 使用探针; 并基于扫描进行三维成像。

    TRANSMISSION INTERFERENCE MICROSCOPE
    9.
    发明申请
    TRANSMISSION INTERFERENCE MICROSCOPE 审中-公开
    传输干扰显微镜

    公开(公告)号：US20130163076A1

    公开(公告)日：2013-06-27

    申请号：US13700468

    申请日：2011-05-26

    申请人： Isao Nagaoki ,  Toshiaki Tanigaki

    发明人： Isao Nagaoki ,  Toshiaki Tanigaki

    IPC分类号： G02B21/00

    CPC分类号： H01J37/26 ,  H01J37/04 ,  H01J2237/045 ,  H01J2237/248 ,  H01J2237/2614

    摘要： Disclosed is a transmission interference microscope that provides a degree of freedom to a region being observed while obtaining pure transmission information, and obtains highly-accurate interference images at high magnification under optimized radiation conditions. An electron beam emitted from an electron source 1 is split by a biprism 11 positioned under a converging lens 3, and enters objective lenses 4 as an electron beam 6 passing through a sample and an electron beam 7 passing through a vacuum. The electron beams are bent at the front magnetic fields of the objective lenses 4, and are emitted as a collimated beam in a state in which the sample location and vacuum are each appropriately are left a space.

    摘要翻译： 公开了一种透射干涉显微镜，其在获得纯透射信息的同时提供观察区域的自由度，并且在优化的辐射条件下以高放大倍率获得高精度的干涉图像。 从电子源1发射的电子束被位于会聚透镜3下面的双棱镜11分开，并且作为通过样品的电子束6和通过真空的电子束7进入物镜4。 电子束在物镜4的前磁场弯曲，并且在样本位置和真空各自适当留下空间的状态下作为准直光束发射。