公开(公告)号：US09390882B2

公开(公告)日：2016-07-12

申请号：US14171357

申请日：2014-02-03

Applicant: Micron Technology, Inc.

Inventor： Shixin Wang

IPC: H01J47/00 ,  H01J37/14 ,  H01J37/09 ,  H01J37/153 ,  H01J37/28 ,  H01J29/64

CPC classification number: H01J37/14 ,  H01J29/64 ,  H01J37/09 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/0492 ,  H01J2237/103 ,  H01J2237/1405 ,  H01J2237/1534

Abstract: Apparatus having a magnetic lens configured to diverge an electron beam are useful in three-dimensional imaging using an electron microscope. The magnetic lens includes a body member having a core and defining a gap, and a winding surrounding a portion of the core. The body member and winding are configured such that an electrical current through the winding produces a magnetic field proximate to the gap.

Abstract translation: 具有配置成发散电子束的磁性透镜的装置在使用电子显微镜的三维成像中是有用的。 磁性透镜包括具有芯并限定间隙的主体部件和围绕芯部的一部分的绕组。 身体构件和绕组被配置成使得通过绕组的电流产生靠近间隙的磁场。