公开(公告)号：US20230260738A1

公开(公告)日：2023-08-17

申请号：US18306381

申请日：2023-04-25

申请人： Varian Medical Systems, Inc.

发明人： Amir SHOJAEI ,  Philip ADAMSON ,  Flavio POEHLMANN-MARTINS

IPC分类号： H01J37/08 ,  H01J37/16

CPC分类号： H01J37/08 ,  H01J37/16 ,  H01J2237/022 ,  H01J2237/166 ,  H01J2237/186 ,  H01J2237/1825

摘要： An apparatus includes an ion chamber and a valve assembly. The ion chamber may include a housing enclosing a gas and one or more electrodes. The valve assembly is coupled to the ion chamber allowing control of replacement of the gas within the housing.

公开(公告)号：US09165741B2

公开(公告)日：2015-10-20

申请号：US14235892

申请日：2012-07-04

申请人： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

发明人： Yusuke Ominami ,  Tomohisa Ohtaki ,  Sukehiro Ito

IPC分类号： H01J37/06 ,  H01J37/18 ,  H01J37/28

CPC分类号： H01J37/18 ,  H01J37/06 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/202 ,  H01J2237/2445 ,  H01J2237/2608

摘要： A charged particle beam device capable of observing a sample in an air atmosphere or gas atmosphere has a thin film for separating the atmospheric pressure space from the decompressed space. A vacuum evacuation pump evacuates a first housing; and a detector detects a charged particle beam (obtained by irradiation of the sample) in the first housing. A thin film is provided to separate the inside of the first housing and the inside of a second housing at least along part of the interface between the first and second housings. An opening part is formed in the thin film so that its opening area on a charged particle irradiation unit's side is larger than its opening area on the sample side; and the thin film which covers the sample side of the opening part transmits or allows through the primary charged particle beam and the charged particle beam.

摘要翻译： 能够在空气气氛或气体气氛中观察样品的带电粒子束装置具有用于将压缩空间与减压空间分离的薄膜。 真空排气泵抽出第一壳体; 并且检测器检测在第一壳体中的带电粒子束（通过样品的照射获得）。 提供薄膜以至少沿着第一和第二壳体之间的界面的一部分分离第一壳体的内部和第二壳体的内部。 在薄膜中形成开口部，使得带电粒子照射单元侧的开口面积大于样品侧的开口面积; 并且覆盖开口部的样品侧的薄膜透过或允许通过初级带电粒子束和带电粒子束。

公开(公告)号：US20140312227A1

公开(公告)日：2014-10-23

申请号：US14257071

申请日：2014-04-21

申请人： EBARA CORPORATION

发明人： Shoji YOSHIKAWA ,  Kiwamu TSUKAMOTO

IPC分类号： G01N23/22 ,  G01N21/95 ,  H01J37/02

CPC分类号： H01J37/023 ,  G01N21/9501 ,  G01N23/2204 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/022 ,  H01J2237/0264 ,  H01J2237/1501 ,  H01J2237/166 ,  H01J2237/20 ,  H01J2237/2007 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/26

摘要： An inspection apparatus capable of facilitating reduction in cost of the apparatus is provided. The inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held on a movable stage in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The inspection apparatus further includes: a linear motor that drives the movable stage; and a Helmholtz coil that causes a magnetic field for canceling a magnetic field caused by the linear motor when the movable stage is driven.

摘要翻译： 提供了能够有助于降低设备成本的检查装置。 检查装置包括：用于产生任何带电粒子和电磁波作为光束的光束产生装置; 将光束引导到保持在工作室中的可移动台上的检查对象中并用该束照射检查对象的主光学系统; 第二光学系统，其检测从检查对象发生的次级带电粒子; 以及基于检测到的二次带电粒子形成图像的图像处理系统。 检查装置还包括：驱动可动台的直线电机; 以及亥姆霍兹线圈，其在驱动可动载物台时引起磁场消除由线性马达引起的磁场。

公开(公告)号：US08598524B2

公开(公告)日：2013-12-03

申请号：US12303715

申请日：2007-04-26

申请人： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen ,  Siegfried Lichtenegger ,  Petrus Henricus Joannes Van Dooren

发明人： Johannes Antonius Hendricus Wilhelmus Gerardus Persoon ,  Andreas Theodorus Engelen ,  Siegfried Lichtenegger ,  Petrus Henricus Joannes Van Dooren

IPC分类号： G01N23/00

CPC分类号： H01J37/28 ,  H01J37/185 ,  H01J37/20 ,  H01J2237/166 ,  H01J2237/184 ,  H01J2237/2006 ,  H01J2237/204

摘要： An apparatus for loading a sample into a particle-optical instrument that includes a slider bearing having a base plate in contact with the vacuum chamber at one side, said base plate showing a first through-hole in contact with the vacuum chamber, and a second plate, one side of the second plate in contact with the base plate, said second plate also showing a through-hole, where the faces of the base plate and the second plate facing each other are sufficiently smooth to form a non-elastomeric vacuum seal and where the second plate is a flexible plate and the face of the flexible plate opposite to the base plate is equipped to seal against a cup equipped to hold a sample. Preferably the through-hole in the base plate shows a rim facing the flexible plate with a controlled curvature, the curvature of the rim formed such that the vacuum seal between the base plate and the flexible plate forms on a pre-defined contour and that the Hertzian contact pressure is smaller than a pre-defined maximum contact pressure, the pre-determined maximum contact pressure chosen to minimize particle generation. By forming the second plate as a flexible plate the pressure with which the base plate and the second plate are pressed together is better reproducible than when both plates are rigid. By forming the rim with a controlled radius, particle generation is minimized.

摘要翻译： 一种用于将样品装载到包括滑动轴承的颗粒光学仪器的装置，该滑动轴承具有与一侧的真空室接触的基板，所述基板显示与真空室接触的第一通孔，第二通孔 板，与基板接触的第二板的一侧，所述第二板还显示通孔，其中基板和第二板的面彼此面对是足够光滑的，以形成非弹性真空密封件 并且其中第二板是柔性板，并且与基板相对的柔性板的表面被装备以密封装备以保持样品的杯。 优选地，基板中的通孔显示出具有受控曲率的面向柔性板的边缘，所述边缘的曲率形成为使得基板和柔性板之间的真空密封形成预定义的轮廓，并且 赫兹接触压力小于预定义的最大接触压力，选择预定的最大接触压力以最小化颗粒产生。 通过将第二板形成为柔性板，将基板和第二板压在一起的压力比两个板刚性时的压力更好。 通过以受控的半径形成轮辋，使颗粒的产生最小化。

公开(公告)号：US08536071B2

公开(公告)日：2013-09-17

申请号：US13591039

申请日：2012-08-21

申请人： Gregory R. Bettencourt ,  Gautam Bhattacharyya ,  Simon Gosselin ,  Sandy Chao

发明人： Gregory R. Bettencourt ,  Gautam Bhattacharyya ,  Simon Gosselin ,  Sandy Chao

IPC分类号： H01L21/00 ,  H05H1/24 ,  C23C16/50 ,  C23C16/509 ,  C23C16/455 ,  C23C16/22

CPC分类号： H01L21/67069 ,  H01J37/16 ,  H01J37/3244 ,  H01J37/32541 ,  H01J37/32605 ,  H01J2237/166

摘要： An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A thermally and electrically conductive gasket with projections thereon is compressed between the showerhead electrode and the backing plate at a location three to four inches from the center of the showerhead electrode. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the electrode.

摘要翻译： 用于等离子体反应室的电极组件，用于半导体衬底处理。 该组件包括上部喷头电极，其通过一系列间隔开的凸轮锁定机械地附接到背板。 在其上具有突起的导电和导电垫片在喷头电极和背板之间在距离喷头电极的中心三至四英寸的位置处被压缩。 保护环围绕背板并且可移动到保护环中的开口与背板中的开口对准的位置，使得凸轮锁可以用工具旋转以释放从电极的上表面延伸的锁定销。

公开(公告)号：US08354654B2

公开(公告)日：2013-01-15

申请号：US12661522

申请日：2010-03-18

申请人： Jiong Chen

发明人： Jiong Chen

IPC分类号： H01J37/317

CPC分类号： H01J37/3171 ,  H01J49/00 ,  H01J2237/057 ,  H01J2237/1526 ,  H01J2237/153 ,  H01J2237/166 ,  H01J2237/24528 ,  H01J2237/24542 ,  H01J2237/30472

摘要： An ion implantation apparatus with multiple operating modes is disclosed. The ion implantation apparatus has an ion source and an ion extraction means for forming a converging beam on AMU-non-dispersive plane therefrom. The ion implantation apparatus includes magnetic scanner prior to a magnetic analyzer for scanning the beam on the non-dispersive plane, the magnetic analyzer for selecting ions with specific mass-to-charge ratio to pass through a mass slit to project onto a substrate. A rectangular quadruple magnet is provided to collimate the scanned ion beam and fine corrections of the beam incident angles onto a target. A deceleration or acceleration system incorporating energy filtering is at downstream of the beam collimator. A two-dimensional mechanical scanning system for scanning the target is disclosed, in which a beam diagnostic means is built in.

摘要翻译： 公开了一种具有多种工作模式的离子注入装置。 离子注入装置具有离子源和用于在其AMU非分散平面上形成会聚束的离子提取装置。 离子注入装置包括在用于扫描非分散平面上的束的磁分析仪之前的磁扫描器，用于选择具有特定质荷比的离子的磁分析器通过质量狭缝以投射到基底上。 提供矩形四极磁体以准直扫描的离子束并将光束入射角精细校正到目标上。 结合能量过滤的减速或加速系统位于射束准直仪的下游。 公开了一种用于扫描目标的二维机械扫描系统，其中内置了光束诊断装置。

公开(公告)号：US08084400B2

公开(公告)日：2011-12-27

申请号：US11352077

申请日：2006-02-10

申请人： Tony P. Chiang ,  David E. Lazovsky ,  Thomas R. Boussie ,  Alexander Gorer

发明人： Tony P. Chiang ,  David E. Lazovsky ,  Thomas R. Boussie ,  Alexander Gorer

IPC分类号： C40B50/00

CPC分类号： H01L21/67011 ,  C23C14/54 ,  C23C16/4412 ,  C23C16/45544 ,  C23C16/4557 ,  C23C16/45578 ,  C23C16/4583 ,  C23C16/46 ,  C23C16/52 ,  H01J37/32449 ,  H01J37/32513 ,  H01J37/32724 ,  H01J2237/166 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01L21/6715 ,  H01L21/76849 ,  H01L22/20 ,  H01L2924/0002 ,  Y10S438/907 ,  Y10S438/913 ,  Y10T137/8593 ,  H01L2924/00

摘要： The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.

摘要翻译： 本发明提供了用于基板区域的离散化，组合处理的方法和系统，例如用于集成电路制造中使用的新材料，工艺和工艺顺序集成方案的发现，实现，优化和鉴定。 通过将材料输送到衬底或修改衬底的区域来处理其上具有差分处理区域阵列的衬底。

公开(公告)号：US20110297845A1

公开(公告)日：2011-12-08

申请号：US13150822

申请日：2011-06-01

申请人： Kan Ota ,  William Davis Lee

发明人： Kan Ota ,  William Davis Lee

IPC分类号： G21K5/00

CPC分类号： H01J37/3171 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/002 ,  H01J2237/166 ,  H01J2237/2001 ,  H01J2237/2005 ,  H01J2237/20278 ,  H01J2237/31701

摘要： A method for warming a rotational interface in an ion implantation environment provides a scan arm configured to rotate about a first axis and an end effector coupled to the scan arm via a motor to selectively secure a workpiece. The end effector is configured to rotate about a second axis having a bearing and a seal associated with the second axis and motor. The motor is activated, and the rotation of motor is reversed after a predetermined time or when the motor faults due to a rotation the end effector about the second axis. A determination is made as to whether the rotation of the end effector about the second axis is acceptable, and the scan arm is reciprocated about the first axis when the rotation of the end effector is unacceptable, wherein inertia of the end effector causes a rotation of the end effector about the second axis.

摘要翻译： 用于在离子注入环境中加热旋转界面的方法提供了扫描臂，该扫描臂被配置为通过电动机围绕第一轴线和与扫描臂耦合的端部执行器旋转以选择性地固定工件。 末端执行器构造成围绕具有与第二轴和马达相关联的轴承和密封件的第二轴线旋转。 电动机被激活，并且电动机的旋转在预定时间之后或当电动机由于端部执行器围绕第二轴线的旋转而故障时被反转。 确定端部执行器围绕第二轴线的旋转是否可接受，并且当端部执行器的旋转不可接受时，扫描臂围绕第一轴线往复运动，其中末端执行器的惯性导致旋转 末端执行器围绕第二轴。

公开(公告)号：US08067340B2

公开(公告)日：2011-11-29

申请号：US12029379

申请日：2008-02-11

申请人： Tony P. Chiang ,  David E. Lazovsky ,  Thomas R. Boussie ,  Alexander Gorer

发明人： Tony P. Chiang ,  David E. Lazovsky ,  Thomas R. Boussie ,  Alexander Gorer

IPC分类号： C40B50/00

CPC分类号： H01L21/67011 ,  C23C14/54 ,  C23C16/4412 ,  C23C16/45544 ,  C23C16/4557 ,  C23C16/45578 ,  C23C16/4583 ,  C23C16/46 ,  C23C16/52 ,  H01J37/32449 ,  H01J37/32513 ,  H01J37/32724 ,  H01J2237/166 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01L21/6715 ,  H01L21/76849 ,  H01L22/20 ,  H01L2924/0002 ,  Y10S438/907 ,  Y10S438/913 ,  Y10T137/8593 ,  H01L2924/00

摘要： The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.

公开(公告)号：US08058154B2

公开(公告)日：2011-11-15

申请号：US12028666

申请日：2008-02-08

申请人： Tony P. Chiang ,  David E. Lazovsky ,  Thomas R. Boussie ,  Alexander Gorer

发明人： Tony P. Chiang ,  David E. Lazovsky ,  Thomas R. Boussie ,  Alexander Gorer

IPC分类号： H01L21/20

CPC分类号： H01L21/67011 ,  C23C14/54 ,  C23C16/4412 ,  C23C16/45544 ,  C23C16/4557 ,  C23C16/45578 ,  C23C16/4583 ,  C23C16/46 ,  C23C16/52 ,  H01J37/32449 ,  H01J37/32513 ,  H01J37/32724 ,  H01J2237/166 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01L21/6715 ,  H01L21/76849 ,  H01L22/20 ,  H01L2924/0002 ,  Y10S438/907 ,  Y10S438/913 ,  Y10T137/8593 ,  H01L2924/00

摘要： The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.