公开(公告)号：US20240030046A1

公开(公告)日：2024-01-25

申请号：US18350420

申请日：2023-07-11

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takuya YAMAMOTO ,  Takashi SUGIMOTO

IPC: H01L21/67 ,  H01J37/32 ,  H02P8/18 ,  F16K51/02 ,  F16K31/04

CPC classification number: H01L21/67017 ,  H01J37/32816 ,  H02P8/18 ,  H01L21/67196 ,  H01L21/67201 ,  F16K51/02 ,  F16K31/047 ,  H01J2237/184

Abstract: There is a control device for controlling a vacuum valve device which includes a valve body configured to open and close a transfer path through which a first chamber and a second chamber communicate with each other, a seal member provided in the valve body, and a valve body driver having a motor and configured to drive the valve body, wherein the control device is configured to be switchable between a first operation pattern for controlling the motor at a first separation speed and a second operation pattern for controlling the motor at a second separation speed lower than the first separation speed.

公开(公告)号：US09543112B2

公开(公告)日：2017-01-10

申请号：US14410235

申请日：2013-06-04

Applicant: Hitachi High-Technologies Corporation

Inventor： Yasuhira Nagakubo ,  Takashi Mizuo

IPC: G21K5/10 ,  H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/184 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/20207

Abstract: In an existing specimen cryo holder, a change in the orientation of a specimen would lead to tilting of a dewar together with the specimen and hence to bubbling of a cooling source contained in the dewar. In view of this, a specimen cryo holder, including a mechanism capable of cooling a specimen while keeping the posture of a dewar in a fixed direction even when the specimen is tilted into a direction suitable for processing or observation thereof, is provided. Also provided is a dewar in which a vacuum maintenance mechanism is mounted to an outer vessel so that an inner vessel holding a cooling source therein is vacuum-insulated from the outside air.

Abstract translation: 在现有的样品冷冻保持器中，样品的取向的变化将导致杜瓦瓶与样品一起倾斜，并因此产生包含在杜瓦瓶中的冷却源的起泡。 鉴于此，提供了一种样本冷冻保持器，其包括即使当试样倾斜到适合于其加工或观察的方向时，也能够将保持在固定方向上的杜瓦的姿势的样品冷却的机构。 还提供了一种杜瓦瓶，其中真空维护机构安装到外部容器，使得其中容纳冷却源的内部容器与外部空气真空绝缘。

公开(公告)号：US20160155602A1

公开(公告)日：2016-06-02

申请号：US14901506

申请日：2014-07-11

Applicant: Hitachi High-Technologies Corporation

Inventor： Atsushi KAMINO ,  Hisayuki TAKASU ,  Hirobumi MUTO

IPC: H01J37/08 ,  H01J37/305 ,  H01J37/20 ,  H01J37/16 ,  H01J37/18

CPC classification number: H01J37/08 ,  H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/3053 ,  H01J2237/006 ,  H01J2237/06 ,  H01J2237/08 ,  H01J2237/182 ,  H01J2237/1825 ,  H01J2237/184 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/31749

Abstract: This ion milling device is provided with a vacuum chamber (105), an exhaust device (101) for evacuating the interior of the vacuum chamber, a sample stage (103) for supporting a sample (102) to be irradiated inside the vacuum chamber, a heater (107) for heating the interior of the vacuum chamber, a gas source (106) for introducing into the vacuum chamber a gas serving as a heating medium, and a controller (110) for controlling the gas source, the controller controlling the gas source so that the vacuum chamber internal pressure is in a predetermined state during heating by the heater. This enables the control in a short time of the temperature for suppressing condensation, or the like, occurring at atmospheric release after cooling and ion milling a sample.

Abstract translation: 该离子研磨装置设置有真空室（105），用于抽空真空室内部的排气装置（101），用于支撑在真空室内照射的样品（102）的样品台（103） 用于加热真空室内部的加热器（107），用于将作为加热介质的气体引入真空室的气源（106），以及用于控制气源的控制器（110），控制器 气体源，使得真空室内部压力在加热器加热期间处于预定状态。 这使得能够在短时间内控制在冷却和离子研磨样品之后在大气释放下发生的冷凝等的抑制。

公开(公告)号：US09318301B2

公开(公告)日：2016-04-19

申请号：US14554469

申请日：2014-11-26

Applicant: JEOL Ltd.

Inventor： Masaaki Kobayashi

IPC: H01J37/18 ,  H01J37/26 ,  H01J37/20

CPC classification number: H01J37/185 ,  H01J37/26 ,  H01J2237/184 ,  H01J2237/20285

Abstract: A sample introduction device (100) has a pre-evacuation chamber (2), a sample holder (10), a mechanical drive arrangement (30) for moving the sample holder (10), and a controller (90). The controller (90) performs a first operation for controlling the mechanical drive arrangement (30) to move a support member (20) such that this support member (20) supports the sample holder (10) when its sample holding portion (12) is in the pre-evacuation chamber (2) and to bring the support member (20) to a halt, a second operation for making a decision as to whether the sample holding portion (12) can be moved into the sample chamber (1), based on the position at which the support member (20) is halted, and a third operation for moving the support member (20) supporting the sample holder (10) such that the sample holding portion (12) moves from the pre-evacuation chamber (2) into the sample chamber (1) if the decision is affirmative to indicate that the sample holding portion (12) can be moved into the sample chamber (1).

Abstract translation: 样品引入装置（100）具有预抽真空室（2），样品架（10），用于移动样品架（10）的机械驱动装置（30）和控制器（90）。 控制器（90）执行用于控制机械驱动装置（30）的第一操作以移动支撑构件（20），使得该支撑构件（20）在其样本保持部分（12）为 在所述预抽真空室（2）中，使所述支撑部件（20）停止，进行用于判定所述检体保持部（12）是否可以移动到所述检体室（1）中的第二操作， 基于支撑构件（20）停止的位置，以及第三操作，用于移动支撑样品保持器（10）的支撑构件（20），使得样品保持部分（12）从预抽真空室 （2）进入样品室（1），如果判断是肯定的，以指示样品保持部分（12）能够移动到样品室（1）中。

公开(公告)号：US09052272B2

公开(公告)日：2015-06-09

申请号：US14356332

申请日：2012-11-15

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Jérôme Lamontagne ,  Thierry Blay ,  Philippe Benard

IPC: G01Q10/04 ,  G01N23/22 ,  H01J37/18 ,  H01J37/252 ,  G01N23/225

CPC classification number: G01N23/2204 ,  G01N23/2252 ,  H01J37/185 ,  H01J37/252 ,  H01J2237/184 ,  H01J2237/204

Abstract: The invention relates to an analysis device comprising a main enclosure fitted with a secondary enclosure, a microprobe placed inside the main enclosure and fitted with an airlock and with a motion object, and a movable sample support that is movable from the secondary enclosure to the airlock and from the airlock to the motion object. Each of the airlock and the motion object includes a respective guide member for guiding the movable sample support and a respective sensor for detecting the presence of the movable sample support.

Abstract translation: 本发明涉及一种分析装置，其包括装配有次级外壳的主外壳，放置在主外壳内部并配有气闸和运动物体的微探针以及可移动的样品支架，该可移动样品支架可从第二外壳移动到气闸 并从气闸到运动物体。 气闸和运动物体中的每一个包括用于引导可移动样品支撑件的相应引导构件和用于检测可移动样品支架的存在的相应传感器。

公开(公告)号：US20140209193A1

公开(公告)日：2014-07-31

申请号：US14166997

申请日：2014-01-29

Applicant: JEOL Ltd.

Inventor： Mitsuhide Matsushita

IPC: H01J37/18

CPC classification number: H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/184 ,  H01J2237/188 ,  H01J2237/204 ,  Y10T137/86002

Abstract: A charged particle beam instrument is offered which has a specimen pre-evacuation chamber. An outflow flow rate adjusting valve (70) adjusts the flow rate of gas exhausted from the specimen pre-evacuation chamber (20) under control of controller (82). The controller (82) for making a decision as to whether the difference between a first pressure in the pre-evacuation chamber (20) before the adjusting valve (70) is controlled to the first degree of opening and a second pressure in the pre-evacuation chamber (20) after the adjusting valve (70) has been controlled to the first degree of opening is greater than a first reference value.

Abstract translation: 提供带有样品预抽真空室的带电粒子束仪器。 流出流量调节阀（70）在控制器（82）的控制下调节从样本预抽真空室（20）排出的气体的流量。 所述控制器（82）用于判断所述调节阀（70）之前的所述预抽空室（20）中的第一压力之间的差是否被控制到所述第一开度， 在调节阀（70）已被控制到第一开度之后的排气室（20）大于第一参考值。

公开(公告)号：US20140091237A1

公开(公告)日：2014-04-03

申请号：US13949318

申请日：2013-07-24

Applicant: Gatan, Inc.

Inventor： Steven Thomas Coyle ,  John Andrew Hunt ,  Michael Patrick Hassel-Shearer

IPC: H01J37/20

CPC classification number: H01J37/20 ,  G01N1/32 ,  G01N2021/8411 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/184 ,  H01J2237/202 ,  H01J2237/31745

Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The apparatus has disposed in a vacuum chamber at least one tilting ion beam irradiating means with intensity control, a rotation stage with rotation control, a sample holder, and an adjustable positioning stage that has two axes of positional adjustment that are operable to move the region of the sample being prepared by the ion beam relative to the ion beam. The apparatus may also include a vacuum-tight optical window for observing the sample and a shutter for protecting the optical window from debris while the sample is prepared in the ion beam.

Abstract translation: 公开了离子束样品制备装置和方法的实施方案。 该设备已经在真空室中设置了至少一个具有强度控制的倾斜离子束照射装置，具有旋转控制的旋转台，样品保持器和可调整的定位台，其具有两个位置调整轴线，该两个轴线可操作以移动该区域 样品由离子束相对于离子束制备。 该装置还可以包括用于观察样品的真空密封光学窗口和用于在样品在离子束中制备样品时保护光学窗口免于碎片的快门。

公开(公告)号：US20140028828A1

公开(公告)日：2014-01-30

申请号：US13949369

申请日：2013-07-24

Applicant: Gatan, Inc.

Inventor： John Andrew Hunt ,  Steven Thomas Coyle ,  Michael Patrick Hassel-Sheaer

IPC: H04N7/18

CPC classification number: H04N7/18 ,  G01N1/32 ,  G01N23/2251 ,  G01N2021/0162 ,  G01N2021/8416 ,  G02B21/00 ,  H01J37/3005 ,  H01J37/305 ,  H01J37/3053 ,  H01J37/3056 ,  H01J2237/184 ,  H01J2237/202 ,  H01J2237/31745 ,  H01L22/26

Abstract: Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues.

Abstract translation: 公开了离子束样品制备装置和方法的实施方案。 所述方法对设置在真空室中的样品进行操作，并且包括将强度可控的倾斜角度可控离子束引导到与旋转台连接的样品保持器的步骤。 所述方法还包括照亮和捕获样品的一个或多个图像，从一个或多个图像提取有用特征，然后调整样品制备步骤。 公开了用于捕获图像序列，以编程方式旋转图像以及显示具有相似旋转角度的图像序列的其它方法。 其他方法包括从继续离子束制备时可能随时间变化的图像序列中提取有用特征。

公开(公告)号：US20130146765A1

公开(公告)日：2013-06-13

申请号：US13817644

申请日：2011-08-02

Applicant: Shinya Kitayama ,  Wataru Suzuki ,  Satoshi Tomimatsu

Inventor： Shinya Kitayama ,  Wataru Suzuki ,  Satoshi Tomimatsu

IPC: H01J37/26

CPC classification number: H01J37/261 ,  H01J37/244 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/024 ,  H01J2237/184 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Provided is a charged particle beam device that outputs both an ion beam and an electron beam at a sample, has a common detector for both the ion beam and the electron beam in the charged particle beam device that processes and observes the sample, and is able to provide a detection unit to an appropriate position corresponding to the process details and observation technique of the sample. Provided are an electron beam optical column in which an electron beam for observing the observation surface of a sample is generated, an ion beam optical column in which an ion beam that processes the sample is generated, a detection device that detects a secondary signal generated from the sample or transmitted electrons, and a sample stage that is capable of mounting the detection device thereon; is rotatable in a horizontal plane that includes the optical axis of the electron beam and the optical axis of the ion beam about a cross point where both optical axes intersect; and is able to change the distance between the observation surface of the sample and the cross point.

Abstract translation: 提供了一种在样品输出离子束和电子束的带电粒子束装置，在处理和观察样品的带电粒子束装置中具有用于离子束和电子束两者的公共检测器，并且能够 以将检测单元提供到对应于样品的处理细节和观察技术的适当位置。 提供了一种电子束光学柱，其中产生用于观察样品观察表面的电子束，产生处理样品的离子束的离子束光学柱，检测装置，其检测从 样品或透射电子，以及能够在其上安装检测装置的样品台; 可以在包括电子束的光轴和离子束的光轴的水平面中绕两个光轴相交的交叉点旋转; 并且能够改变样品的观察表面与交叉点之间的距离。

公开(公告)号：US20110291030A1

公开(公告)日：2011-12-01

申请号：US13116580

申请日：2011-05-26

Applicant: William D. Lee

Inventor： William D. Lee

IPC: G21K5/10 ,  F27D3/00

CPC classification number: H01J37/3171 ,  H01J37/185 ,  H01J2237/006 ,  H01J2237/184 ,  H01J2237/2001 ,  H01J2237/24585

Abstract: A system, apparatus, and method is provided for preventing condensation on a workpiece in an end station of an ion implantation system. A workpiece is cooled in a first environment, and is transferred to a load lock chamber that is in selective fluid communication with the end station and a second environment, respectively. A workpiece temperature monitoring device is configured to measure a temperature of the workpiece in the load lock chamber. An external monitoring device measures a temperature and relative humidity in the second environment, and a controller is configured to determine a temperature of the workpiece at which condensation will not form on the workpiece when the workpiece is transferred from the load lock chamber to the second environment.

Abstract translation: 提供了一种系统，装置和方法，用于防止离子注入系统的终端中的工件上的冷凝。 工件在第一环境中被冷却，并且被转移到分别与终端站和第二环境选择性流体连通的负载锁定室。 工件温度监控装置被配置为测量加载锁定室中的工件的温度。 外部监视装置测量第二环境中的温度和相对湿度，并且控制器被配置为当工件从负载锁定室转移到第二环境时，确定在工件上不会形成冷凝的工件的温度 。