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    Nano-Patterned System And Magnetic-Field Applying Device Thereof
    1.
    发明申请
    Nano-Patterned System And Magnetic-Field Applying Device Thereof 有权
    纳米图案系统及其磁场应用器件

    公开(公告)号：US20170018395A1

    公开(公告)日：2017-01-19

    申请号：US15282028

    申请日：2016-09-30

    申请人： Institute Of Physics, Chinese Academy Of Sciences

    发明人： Guoqiang Yu ,  Peng Guo ,  Xiufeng Han ,  Chaohui Guo ,  Xiaoyu Sun ,  Xiangqian Zhou

    IPC分类号： H01J37/09 ,  H01J37/141 ,  H01F7/20

    CPC分类号： H01J37/09 ,  G01R33/093 ,  G01R33/096 ,  H01F7/202 ,  H01F7/204 ,  H01F41/00 ,  H01J37/141 ,  H01J2237/0262 ,  H01J2237/0264 ,  H01J2237/28 ,  H01J2237/31754 ,  H01L43/12

    摘要： A nano-patterned system comprises a vacuum chamber, a sample stage and a magnetic-field applying device, which comprises a power supply, a magnetic-field generation device and a pair of magnetic poles. The magnetic-field generation device comprises a coil and a magnetic conductive soft iron core. The power supply is connected to the coil, which is wound on the soft iron core to generate a magnetic field. The soft iron core is of a semi-closed frame structure and the magnetic poles are at the ends of the frame structure. The stage is inside a vacuum chamber. The poles are oppositely arranged inside the vacuum chamber relative to the stage. The coil and the soft iron core are outside the vacuum chamber. The soft iron core leads the magnetic field generated by the coil into the vacuum chamber. The magnetic poles locate a sample on the stage and apply a local magnetic field.

    摘要翻译： 纳米图案系统包括真空室，样品台和磁场施加装置，其包括电源，磁场产生装置和一对磁极。 磁场产生装置包括线圈和导磁软铁芯。 电源连接到卷绕在软铁芯上的线圈，以产生磁场。 软铁芯为半闭框架结构，磁极位于框架结构的两端。 舞台在真空室内。 极相对于真空室相对地布置在真空室内。 线圈和软铁芯在真空室外。 软铁芯将线圈产生的磁场引入真空室。 磁极将样品放在载物台上并施加局部磁场。

    LINEAR MOTOR
    2.
    发明申请
    LINEAR MOTOR 审中-公开
    线性电动机

    公开(公告)号：US20160268882A1

    公开(公告)日：2016-09-15

    申请号：US15062361

    申请日：2016-03-07

    申请人： SUMITOMO HEAVY INDUSTRIES, LTD.

    发明人： Kotaro WADA ,  Dotaro USUI ,  Takashi IKEDA ,  Hirokazu YUSA

    IPC分类号： H02K41/02 ,  H02K1/17 ,  H01J37/20 ,  H02K1/02

    CPC分类号： H01J37/20 ,  H01J2237/0264 ,  H01J2237/20221 ,  H01J2237/20278 ,  H02K1/17 ,  H02K41/031 ,  H02K2213/03

    摘要： A linear-motor stator is configured by connecting a plurality of magnetic circuits along the axis of travel of the forcer (along the x-axis). The magnetic circuits are furnished with yokes and pluralities of field magnets fixed to the yokes. High-magnetic permeability members of magnetic permeability higher than that of the yokes are provided where adjoining magnetic circuits are connected, straddling the connections.

    摘要翻译： 线性电动机定子通过沿着锻炼器的行进轴线（沿x轴）连接多个磁路而构成。 磁路配有轭和固定在轭上的多个场磁体。 提供高于磁轭的磁导率的高磁导率构件，其中邻接的磁路连接，跨越连接。

    INSPECTION APPARATUS
    3.
    发明申请
    INSPECTION APPARATUS 有权
    检查装置

    公开(公告)号：US20150340193A1

    公开(公告)日：2015-11-26

    申请号：US14813768

    申请日：2015-07-30

    申请人： EBARA CORPORATION

    发明人： Shoji YOSHIKAWA ,  Kiwamu TSUKAMOTO ,  Takeshi MURAKAMI ,  Masahiro HATAKEYAMA ,  Tsutomu KARIMATA

    IPC分类号： H01J37/02 ,  H01J37/20 ,  H01J37/285

    CPC分类号： H01J37/023 ,  G01N21/9501 ,  G01N23/2204 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/022 ,  H01J2237/0264 ,  H01J2237/1501 ,  H01J2237/166 ,  H01J2237/20 ,  H01J2237/2007 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/26

    摘要： An inspection apparatus capable of facilitating reduction in cost of the apparatus is provided. The inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held on a movable stage in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The inspection apparatus further includes: a linear motor that drives the movable stage; and a Helmholtz coil that causes a magnetic field for canceling a magnetic field caused by the linear motor when the movable stage is driven.

    摘要翻译： 提供了能够有助于降低设备成本的检查装置。 检查装置包括：用于产生任何带电粒子和电磁波作为光束的光束产生装置; 将光束引导到保持在工作室中的可移动台上的检查对象中并用该束照射检查对象的主光学系统; 第二光学系统，其检测从检查对象发生的次级带电粒子; 以及基于检测到的二次带电粒子形成图像的图像处理系统。 检查装置还包括：驱动可动台的直线电机; 以及亥姆霍兹线圈，其在驱动可动载物台时引起磁场消除由线性马达引起的磁场。

    TOP OPENING-CLOSING MECHANISM AND INSPECTION APPARATUS
    4.
    发明申请
    TOP OPENING-CLOSING MECHANISM AND INSPECTION APPARATUS 有权
    顶开式封闭机构和检测装置

    公开(公告)号：US20150221469A1

    公开(公告)日：2015-08-06

    申请号：US14568596

    申请日：2014-12-12

    申请人： EBARA CORPORATION

    发明人： Matsutaro MIYAMOTO

    IPC分类号： H01J37/16 ,  H01J37/26 ,  H01J37/20 ,  B65D43/26 ,  B65D85/00

    CPC分类号： H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/0264 ,  H01J2237/20292 ,  H01J2237/26 ,  H01J2237/3175

    摘要： A top opening-closing mechanism for opening and closing a top of a container including a container body and the top includes a rolling element rotatably provided at the top and positioned on the outside of the container body in a planar view, a rail, a jack for lifting the rail, and a top resting table disposed adjacent to the container and mounting the top thereon. When the top is opened, the jack lifts the rail, the rail lifts the rolling element from below, and thereby the top is lifted up from the container body. Then, the rolling element rolls on the rail and the top resting table to move the top from above the container body to the top resting table.

    摘要翻译： 用于打开和关闭包括容器主体和顶部的容器的顶部的顶部打开 - 关闭机构包括滚动元件，该滚动元件可旋转地设置在顶部并且在平面图中位于容器主体的外侧，轨道，千斤顶 用于提升导轨，以及邻近容器设置的顶部搁置台，并将顶部安装在其上。 当顶部打开时，千斤顶提升轨道，轨道从下方提起滚动元件，从而顶部从容器体上提起。 然后，滚动元件在轨道和顶部静止台上滚动以将顶部从容器主体上方移动到顶部静止台。

    Charged particle beam apparatus sample holder with magnetic field generating element and sample holding element
    6.
    发明授权
    Charged particle beam apparatus sample holder with magnetic field generating element and sample holding element 有权
    带有磁场产生元件和样品保持元件的带电粒子束装置样品架

    公开(公告)号：US09070532B2

    公开(公告)日：2015-06-30

    申请号：US14260452

    申请日：2014-04-24

    申请人： Hitachi, Ltd.

    发明人： Akira Sugawara ,  Tomokazu Shimakura ,  Yoshio Takahashi

    IPC分类号： G21K5/10 ,  H01J37/20 ,  H01J37/26 ,  H01J37/09

    CPC分类号： H01J37/20 ,  H01J37/09 ,  H01J37/266 ,  H01J2237/0264 ,  H01J2237/2008

    摘要： The disclosed invention provides a sample holder capable of reducing or preventing the influence of a charged particle beam deflected by applying a magnetic field to a sample and provided with means for simply switching between a mode of observing a sample while applying a magnetic field to the sample, and a mode free of a magnetic field in which a magnetic field becomes zero completely. The sample holder includes a magnetic field generating element including three or more magnetic gaps for applying a magnetic field to a sample, a cantilever-beam-shaped sample holding element that holds a sample on one end thereof, and a moving mechanism that adjusts a relative position between a sample and a magnetic gap. The magnetic gaps can be placed along an optical axis of a charged particle beam.

    摘要翻译： 所公开的发明提供一种样品保持器，其能够减少或防止通过对样品施加磁场而偏转的带电粒子束的影响，并且提供用于简单地在观察样品的模式之间切换的装置，同时向样品施加磁场 ，以及没有完全磁场变为零的磁场的模式。 样品架包括：磁场产生元件，包括用于向样品施加磁场的三个或更多个磁隙;在其一端保持样品的悬臂梁形样品保持元件;以及调节相对 样品与磁隙之间的位置。 磁隙可以沿带电粒子束的光轴放置。

    DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, AND METHOD OF MANUFACTURING DEVICE
    7.
    发明申请
    DRIVING APPARATUS, CHARGED PARTICLE BEAM IRRADIATION APPARATUS, AND METHOD OF MANUFACTURING DEVICE 审中-公开
    驱动装置，充电颗粒光束辐射装置和制造装置的方法

    公开(公告)号：US20150033546A1

    公开(公告)日：2015-02-05

    申请号：US14444774

    申请日：2014-07-28

    申请人： CANON KABUSHIKI KAISHA

    发明人： Shinji Uchida

    IPC分类号： H01F7/06 ,  G21K5/02 ,  H01J37/30

    CPC分类号： H01J37/30 ,  H01F7/08 ,  H01F13/006 ,  H01J37/20 ,  H01J2237/0264 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/3175 ,  Y10T29/4902

    摘要： A driving apparatus includes an electromagnetic actuator configured to generate a motive power by an electromagnetic force; movable portions configured to be moved by the electromagnetic actuator, and a magnetic shield unit including a first magnetic shield and a second magnetic shield that surround the electromagnetic actuator in this order, and from a side closer to a magnetic field generating portion of the electromagnetic actuator.An opening through which a demagnetizing coil penetrates provided on at least one of the magnetic shields is opposite to the first magnetic shield or the second magnetic shield in a part of the area of the opening.

    摘要翻译： 驱动装置包括电磁致动器，其构造成通过电磁力产生动力; 被配置为由电磁致动器移动的可移动部分，以及包括依次围绕电磁致动器的第一磁屏蔽和第二磁屏蔽的磁屏蔽单元，以及更靠近电磁致动器的磁场产生部分的一侧 。 在至少一个磁屏蔽上设置有去磁线圈穿透的开口在开口区域的一部分中与第一磁屏蔽或第二磁屏蔽相反。

    SAMPLE HOLDER AND CHARGED PARTICLE BEAM APPARATUS USING SAME
    8.
    发明申请
    SAMPLE HOLDER AND CHARGED PARTICLE BEAM APPARATUS USING SAME 有权
    使用相同的样品夹和充电颗粒光束装置

    公开(公告)号：US20140319371A1

    公开(公告)日：2014-10-30

    申请号：US14260452

    申请日：2014-04-24

    申请人： Hitachi, Ltd.

    发明人： Akira Sugawara ,  Tomokazu Shimakura ,  Yoshio Takahashi

    IPC分类号： H01J37/20 ,  H01J37/26

    CPC分类号： H01J37/20 ,  H01J37/09 ,  H01J37/266 ,  H01J2237/0264 ,  H01J2237/2008

    摘要： The disclosed invention provides a sample holder capable of reducing or preventing the influence of a charged particle beam deflected by applying a magnetic field to a sample and provided with means for simply switching between a mode of observing a sample while applying a magnetic field to the sample, and a mode free of a magnetic field in which a magnetic field becomes zero completely. The sample holder includes a magnetic field generating element including three or more magnetic gaps for applying a magnetic field to a sample, a cantilever-beam-shaped sample holding element that holds a sample on one end thereof, and a moving mechanism that adjusts a relative position between a sample and a magnetic gap. The magnetic gaps can be placed along an optical axis of a charged particle beam.

    摘要翻译： 所公开的发明提供一种样品保持器，其能够减少或防止通过对样品施加磁场而偏转的带电粒子束的影响，并且提供用于简单地在观察样品的模式之间切换的装置，同时向样品施加磁场 ，以及没有完全磁场变为零的磁场的模式。 样品架包括：磁场产生元件，包括用于向样品施加磁场的三个或更多个磁隙;在其一端保持样品的悬臂梁形样品保持元件;以及调节相对 样品与磁隙之间的位置。 磁隙可以沿带电粒子束的光轴放置。