Photocathode Including Silicon Substrate With Boron Layer
    7.
    发明申请
    Photocathode Including Silicon Substrate With Boron Layer 审中-公开
    含有硅衬底的光电阴极

    公开(公告)号:US20170069455A1

    公开(公告)日:2017-03-09

    申请号:US15353980

    申请日:2016-11-17

    Abstract: A photocathode is formed on a monocrystalline silicon substrate having opposing illuminated (top) and output (bottom) surfaces. To prevent oxidation of the silicon, a thin (e.g., 1-5 nm) boron layer is disposed directly on the output surface using a process that minimizes oxidation and defects. An optional second boron layer is formed on the illuminated (top) surface, and an optional anti-reflective material layer is formed on the second boron layer to enhance entry of photons into the silicon substrate. An optional external potential is generated between the opposing illuminated (top) and output (bottom) surfaces. The photocathode forms part of novel electron-bombarded charge-coupled device (EBCCD) sensors and inspection systems.

    Abstract translation: 在具有相对的照明​​(顶部)和输出(底部)表面的单晶硅衬底上形成光电阴极。 为了防止硅的氧化,使用最小化氧化和缺陷的工艺将薄(例如1-5nm)的硼层直接设置在输出表面上。 在照明(顶部)表面上形成可选的第二硼层,并且在第二硼层上形成可选的抗反射材料层以增强光子进入硅衬底。 在相对的照明​​(顶部)和输出(底部)表面之间产生可选的外部电位。 光电阴极形成新型电子轰击电荷耦合器件(EBCCD)传感器和检测系统的一部分。

    TRANSMISSION MODE PHOTOCATHODE
    10.
    发明申请
    TRANSMISSION MODE PHOTOCATHODE 有权
    传输模式光栅

    公开(公告)号:US20160233044A1

    公开(公告)日:2016-08-11

    申请号:US15029336

    申请日:2014-08-08

    CPC classification number: H01J1/34 H01J1/32 H01J40/06 H01J43/08 H01J43/10

    Abstract: A transmission mode photocathode comprises: an optically transparent substrate having an outside face to which light is incident, and an inside face from which the light incident to the outside face side is output; a photoelectric conversion layer disposed on the inside face side of the optically transparent substrate and configured to convert the light output from the inside face into a photoelectron or photoelectrons; and an optically-transparent electroconductive layer comprising graphene, and disposed between the optically transparent substrate and the photoelectric conversion layer.

    Abstract translation: 透射模式光电阴极包括:具有入射光的外表面的光学透明基板和入射到外表面侧的光的内表面; 光电转换层,设置在所述光学透明基板的内表面侧,并且被配置为将从所述内表面输出的光转换为光电子或光电子; 以及包含石墨烯的光学透明导电层,并设置在光学透明基板和光电转换层之间。

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