公开(公告)号：US20170069458A1

公开(公告)日：2017-03-09

申请号：US15119950

申请日：2015-01-09

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Minami SHOUJI ,  Takashi OHSHIMA ,  Yuusuke OOMINAMI ,  Hideo MORISHITA ,  Kunio HARADA

IPC分类号： H01J37/244 ,  H01J37/20 ,  H01J37/26

CPC分类号： H01J37/244 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2445 ,  H01J2237/2808

摘要： The objective of the present invention is to simply perform image observation through transmitted charged particles. A sample irradiated by a charged particle beam is disposed directly or via a predetermined member on a light-emitting element (23) whereinto charged particles that have traversed or scattered inside the sample enter, causing a light to be emitted therefrom, which is collected and detected efficiently using a light transmission means (203) to generate a transmission charged particle image of the sample.

摘要翻译： 本发明的目的是简单地通过透射带电粒子进行图像观察。 由带电粒子束照射的样品直接或通过预定部件设置在发光元件（23）上，其中穿过或散射在样品内的带电粒子进入，从而从中收集光， 使用光传输装置（203）有效地检测以产生样本的透射带电粒子图像。

公开(公告)号：US20150235802A1

公开(公告)日：2015-08-20

申请号：US14420722

申请日：2013-08-08

申请人： SNU R&DB Foundation

发明人： Young Woon Kim ,  Sung Dae Kim

IPC分类号： H01J37/20 ,  H01J37/26 ,  H01J37/22

CPC分类号： H01J37/20 ,  H01J37/226 ,  H01J37/228 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/2602 ,  H01J2237/2808

摘要： Disclosed is a holder device for an electron microscope, which efficiently collects light emitted when electrons collide with a sample inside the electron microscope and is selectively usable in various electron microscopes since it can be easily attached to and detached from the electron microscopes. The holder device includes a frame; a sample support block configured to be supported on the frame and comprising a sample mounting portion to support an edge of a sample; a mirror unit configured to comprise an upper mirror and a lower mirror respectively arranged above and below the sample and reflect light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction; a condensing lens configured to condense light from the mirror unit on a predetermined target; and an optical fiber configured to collect light from the condensing lens.

摘要翻译： 公开了一种用于电子显微镜的保持装置，其有效地收集当电子与电子显微镜内部的样品碰撞时发射的光，并且可以选择性地使用于各种电子显微镜，因为它可以容易地附着到电子显微镜上并从电子显微镜上分离。 支架装置包括框架; 样品支撑块，被配置为支撑在所述框架上并且包括样品安装部分以支撑样品的边缘; 反射镜单元，被配置为包括分别布置在样本上方和下方的上反射镜和下反射镜，并将从样品发射的光沿预定方向反射，该样品安装到样品安装部分并且发射电子束; 聚光透镜，被配置为将来自所述反射镜单元的光在预定目标上进行冷凝; 以及配置为收集来自聚光透镜的光的光纤。

公开(公告)号：US08986645B2

公开(公告)日：2015-03-24

申请号：US11480823

申请日：2006-07-06

申请人： Daniel James Twitchen ,  Geoffrey Alan Scarsbrook ,  Philip Maurice Martineau ,  Paul Martyn Spear ,  Stephen David Williams ,  Ian Friel

发明人： Daniel James Twitchen ,  Geoffrey Alan Scarsbrook ,  Philip Maurice Martineau ,  Paul Martyn Spear ,  Stephen David Williams ,  Ian Friel

IPC分类号： B01J3/06 ,  C30B7/00 ,  C30B23/00 ,  C30B25/00 ,  C30B28/12 ,  H05H1/24 ,  A44C17/00 ,  B44C1/00 ,  C30B25/02 ,  C30B29/04 ,  C30B33/00

CPC分类号： A44C17/00 ,  B44C1/005 ,  C30B25/00 ,  C30B25/02 ,  C30B29/04 ,  C30B33/00 ,  H01J2237/2808 ,  Y10T428/30

摘要： A method of producing a CVD single crystal diamond layer on a substrate includes adding into a DVD synthesis atmosphere a gaseous source comprising silicon. The method can be used to mark the diamond material, for instance to provide means by which its synthetic nature can more easily be determined. It can also be exploited to generate single crystal diamond material of high color.

摘要翻译： 在衬底上制造CVD单晶金刚石层的方法包括在DVD合成气氛中加入包含硅的气态源。 该方法可用于标记金刚石材料，例如提供可以更容易地确定其合成性质的方法。 也可以开发出高颜色的单晶金刚石材料。

公开(公告)号：US20140197310A1

公开(公告)日：2014-07-17

申请号：US14150012

申请日：2014-01-08

申请人： CARL ZEISS MICROSCOPY LTD.

发明人： Edward Hill ,  Stewart Bean

IPC分类号： G01N23/22 ,  H01J37/26

CPC分类号： H01J37/26 ,  G01N23/2254 ,  H01J2237/2804 ,  H01J2237/2806 ,  H01J2237/2808 ,  H01J2237/2809

摘要： The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.

摘要翻译： 本发明涉及一种用于使用与物体相互作用的带电粒子束来分析物体的方法和带电粒子束装置。 该物体包括嵌入树脂中的样品。 检测呈阴极发光的形式的相互作用的放射线用于识别布置树脂的区域，其中布置样品。 通过使用EDX分析，检测相互作用颗粒以鉴定树脂和样品中的颗粒进行进一步分析。

公开(公告)号：US20110168889A1

公开(公告)日：2011-07-14

申请号：US13002448

申请日：2009-07-02

申请人： Dov Shachal ,  Rafi De Picciotto

发明人： Dov Shachal ,  Rafi De Picciotto

IPC分类号： G01N23/04 ,  G01N23/00

CPC分类号： G01N23/22 ,  G01N2223/079 ,  G01N2223/08 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/208 ,  H01J2237/244 ,  H01J2237/2608 ,  H01J2237/2808

摘要： An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

摘要翻译： 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

公开(公告)号：US20060269483A1

公开(公告)日：2006-11-30

申请号：US11494157

申请日：2006-07-27

申请人： Robert Austin ,  Shuang Lim ,  Robert Riehm

发明人： Robert Austin ,  Shuang Lim ,  Robert Riehm

IPC分类号： A61K49/00

CPC分类号： A61K49/0067 ,  H01J2237/2808

摘要： Methods for high resolution tissue imaging in which a tissue to be imaged is labeled with UCP's coupled to probes that bind specifically to biological markers on the tissue; the UCP's are then excited with electrons so that the UCP's emit cathodoluminescent photons; after which the photon emission is converted to a visible image. Methods for measuring water content, blood content or blood oxygenation in tumor tissue are also disclosed.

摘要翻译： 用于高分辨率组织成像的方法，其中待成像组织的UCP与特异性结合组织上的生物学标记的探针偶联; 然后UCP被电子激发，使得UCP发射阴极发光光子; 之后将光子发射转换成可见光。 还公开了测量肿瘤组织中含水量，血液含量或血氧饱和度的方法。

公开(公告)号：US4410272A

公开(公告)日：1983-10-18

申请号：US272781

申请日：1981-06-11

申请人： Jacky Beauvineau ,  Jack Semo

发明人： Jacky Beauvineau ,  Jack Semo

IPC分类号： G01N23/225 ,  G01J3/04 ,  G01J3/06 ,  G01J3/12 ,  G01J3/18 ,  G01Q30/02 ,  G01Q30/16 ,  G01Q30/18 ,  H01J37/22 ,  H01J37/26 ,  G01N21/62

CPC分类号： H01J37/228 ,  G01J3/18 ,  H01J2237/2808

摘要： Optical spectroscope for scanning electron microscopes, the latter comprising a vacuum chamber containing a sample holder bombarded by an electron beam.The microscope chamber contains a concave mirror having an opening, a plane deviating mirror and an exit window for the chamber. Outside the microscope chamber is provided a drum carrying a plurality of flat diffractive gratings, the drum being equipped with a bracket which rotates about an axis controlled by a stepping motor. In addition there are a spherical concave mirror, a slit blocking means and a photodetector.

摘要翻译： 用于扫描电子显微镜的光学分光镜，后者包括含有由电子束轰击的样品架的真空室。 显微镜室包含具有开口的凹面镜，平面偏转镜和用于腔室的出射窗。 在显微镜室外设置有承载多个平面衍射光栅的鼓，该滚筒装有一个围绕由步进马达控制的轴线旋转的托架。 另外还有球面凹面镜，狭缝阻挡装置和光电检测器。

公开(公告)号：US20180158645A1

公开(公告)日：2018-06-07

申请号：US15576686

申请日：2016-08-11

申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

发明人： Bok Lae CHO ,  Sang Jung AHN ,  Inho SUL

IPC分类号： H01J37/16 ,  H01J37/244 ,  H01J37/22 ,  H01J37/18 ,  G02B21/02 ,  G02B21/06 ,  G02B21/36 ,  G02B21/00

CPC分类号： H01J37/16 ,  G02B21/0004 ,  G02B21/02 ,  G02B21/06 ,  G02B21/36 ,  G02B21/361 ,  H01J37/18 ,  H01J37/20 ,  H01J37/226 ,  H01J37/244 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/166 ,  H01J2237/182 ,  H01J2237/2448 ,  H01J2237/2808 ,  H01J2237/2855

摘要： A vacuum sample chamber for a particle and optical device includes on one surface thereof, an aperture through which a particle beam to be focused along an optical axis of particles such as electrons, ions and neutral particles is incident; and on the opposite surface thereof, a detachable sample holder through which light penetrates, thereby enabling a sample to be observed and analyzed by means of the particle beam and light. A sample chamber is capable of reducing observation time by maintaining a vacuum therein even when a sample is put into or taken out from a sample chamber of an electron microscope or focused ion beam observation equipment, and capable of obtaining an optical image on the outside thereof without inserting a light source or an optical barrel into the sample chamber. A light-electron fusion microscope comprising the sample chamber.

公开(公告)号：US20140194314A1

公开(公告)日：2014-07-10

申请号：US14125934

申请日：2012-06-13

申请人： Ronald Walsworth ,  Jeff Lichtman ,  Narayanan Kasthuri ,  David Glenn ,  Huiliang Zhang ,  Richard Schalek

发明人： Ronald Walsworth ,  Jeff Lichtman ,  Narayanan Kasthuri ,  David Glenn ,  Huiliang Zhang ,  Richard Schalek

IPC分类号： G01N23/225 ,  G01N33/543

CPC分类号： G01N23/2254 ,  G01N33/54373 ,  G01N2223/403 ,  G01N2223/418 ,  G01N2223/612 ,  H01J37/22 ,  H01J37/244 ,  H01J2237/225 ,  H01J2237/2808

摘要： Multi-color CL images of nanoparticle samples may be generated, by irradiating with a scanning electron beam a nanoparticle sample that containing a plurality of spectrally distinct optical emitters configured to generate CL light at respective different color channels, then detecting the CL light from the nanoparticles to generate multi-color NP-CL images of the nanoparticle sample. In some embodiments, SE (secondary electron) images of the sample may be acquire, substantially simultaneously with the acquisition of the CL images, so as to generate correlative NP-CL and SE images of the nanoparticle sample. In some embodiments, the nanoparticles may be surface-functionalized so that the nanoparticles selectively bind only to particular structures of interest.

摘要翻译： 可以通过用扫描电子束照射纳米颗粒样品来产生纳米颗粒样品的多色CL图像，所述纳米颗粒样品包含被配置为在各个不同颜色通道产生CL光的多个光谱不同的光发射器，然后检测来自纳米颗粒的CL光 以产生纳米颗粒样品的多色NP-CL图像。 在一些实施例中，样本的SE（二次电子）图像可以在获取CL图像的同时获取，以便产生纳米颗粒样品的相关NP-CL和SE图像。 在一些实施方案中，纳米颗粒可以被表面官能化，使得纳米颗粒选择性地仅结合特定的感兴趣结构。

公开(公告)号：US08648301B2

公开(公告)日：2014-02-11

申请号：US13623829

申请日：2012-09-20

申请人： Carl Zeiss Microscopy Ltd.

发明人： Stewart Bean ,  Michael Robert Astley

IPC分类号： H01J37/28

CPC分类号： H01J37/226 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

摘要： A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.

摘要翻译： 一种系统包括粒子光学系统和光敏检测器。 粒子光学系统包括带电粒子束源和物镜。 带电粒子束源被配置为产生沿着粒子束路径行进的带电粒子束，并且物镜被配置为将粒子束聚焦到粒子光学系统的物平面上。 该系统被配置为使得系统的光束路径从物平面延伸到光敏检测器。