公开(公告)号：US08648301B2

公开(公告)日：2014-02-11

申请号：US13623829

申请日：2012-09-20

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Stewart Bean ,  Michael Robert Astley

IPC: H01J37/28

CPC classification number: H01J37/226 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.

Abstract translation: 一种系统包括粒子光学系统和光敏检测器。 粒子光学系统包括带电粒子束源和物镜。 带电粒子束源被配置为产生沿着粒子束路径行进的带电粒子束，并且物镜被配置为将粒子束聚焦到粒子光学系统的物平面上。 该系统被配置为使得系统的光束路径从物平面延伸到光敏检测器。