公开(公告)号：US11842881B2

公开(公告)日：2023-12-12

申请号：US17413011

申请日：2018-12-18

Applicant: Hitachi High-Tech Corporation

Inventor： Akio Yamamoto ,  Kazuki Ikeda ,  Wen Li ,  Shunsuke Mizutani ,  Hiroyuki Takahashi

IPC: H01J37/28 ,  H01J37/244

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J2237/24495 ,  H01J2237/281

Abstract: A measurement device that comprises a photoelectric conversion element and a signal processing part that receives, from the photoelectric conversion element, detected pulses that include dark pulses and signal pulses that are outputted in accordance with inputted photons. The signal processing part performs amplitude discrimination on the detected pulses on the basis of a pre-acquired dark pulse amplitude distribution for the photoelectric conversion element.

公开(公告)号：US09852881B2

公开(公告)日：2017-12-26

申请号：US15039527

申请日：2014-11-19

Applicant: Hitachi High-Technologies Corporation

Inventor： Chie Shishido ,  Takuma Yamamoto ,  Shinya Yamada ,  Maki Tanaka

IPC: H01J37/29 ,  H01J37/26 ,  G01B15/00 ,  G01B21/00 ,  H01J37/244 ,  H01J37/28 ,  G01B15/04 ,  H01L21/66

CPC classification number: H01J37/29 ,  G01B15/00 ,  G01B15/04 ,  G01B2210/56 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/2806 ,  H01J2237/281 ,  H01J2237/2815 ,  H01L22/12

Abstract: In order to allow detecting backscattered electrons (BSEs) generated from the bottom of a hole for determining whether a hole with a super high aspect ratio is opened or for inspecting and measuring the ratio of the top diameter to the bottom diameter of a hole, which are typified in 3D-NAND processes of opening a hole, a primary electron beam accelerated at a high accelerating voltage is applied to a sample. Backscattered electrons (BSEs) at a low angle (e.g. a zenith angle of five degrees or more) are detected. Thus, the bottom of a hole is observed using “penetrating BSEs” having been emitted from the bottom of the hole and penetrated the side wall. Using the characteristics in which a penetrating distance is relatively prolonged through a deep hole and the amount of penetrating BSEs is decreased to cause a dark image, a calibration curve expressing the relationship between a hole depth and the brightness is given to measure the hole depth.

公开(公告)号：US09536700B2

公开(公告)日：2017-01-03

申请号：US14786039

申请日：2014-04-17

Applicant: Hitachi High-Technologies Corporation

Inventor： Yasunori Goto ,  Takuma Yamamoto

IPC: G01N23/00 ,  H01J37/22 ,  H01J37/28 ,  H01L21/66

CPC classification number: H01J37/222 ,  H01J37/22 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/281 ,  H01J2237/2815 ,  H01L22/12

Abstract: Provided is a sample observation apparatus including a charged particle optical column that irradiates a sample including an observation target portion that is a concave portion with a charged particle beam at an acceleration voltage, an image generation section that acquires an image including the observation target portion from a signal acquired with irradiation of the charged particle beam, a storage section that stores information representing a relationship between a brightness ratio of a concave portion and its neighboring portion of a reference sample that is irradiated with the charged particle beam at the acceleration voltage and a value that represents a structure of the concave portions of the reference sample in advance, a calculation section that acquires a brightness ratio of the concave portion and its neighboring portion of the image, and a determination section that determines whether or not a defect occurs in the observation target portion based on the information that represents the relationship and the brightness ratio of the image.

Abstract translation: 提供了一种样本观察装置，其包括带电粒子光学柱，其以包括具有加速电压的带电粒子束的凹部的观察对象部分的样本照射包括观察对象部分的图像的图像生成部， 通过照射带电粒子束获取的信号;存储部分，其存储表示在加速电压下照射带电粒子束的参考样本的凹部的亮度比与其相邻部分之间的关​​系的信息;以及 预先表示参考样本的凹部的结构的值，获取图像的凹部及其相邻部分的亮度比的计算部，以及判断部是否发生缺陷发生的判定部 基于该信息的观察目标部分 t表示图像的关系和亮度比。

公开(公告)号：US09105440B2

公开(公告)日：2015-08-11

申请号：US14468674

申请日：2014-08-26

Applicant: Hermes-Microvision, Inc.

Inventor： Zhongwei Chen ,  Weiming Ren ,  Xuerang Hu ,  Xuedong Liu

IPC: H01J37/141 ,  H01J37/145 ,  H01J37/28

CPC classification number: H01J37/141 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/15 ,  H01J2237/281 ,  H01J2237/2817

Abstract: An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.

Abstract translation: 提供具有多轴磁性透镜的多个带电粒子束的装置，以执行观察样品表面的多功能，例如高通量检测和其感兴趣特征的高分辨率检查以及用于增强图像对比度的充电控制 和图像分辨率。 在该装置中，形成两个或多个子列，并且每个子列执行多功能之一。 基本上，子列采取正常照明以获得高图像分辨率，但是一个或多个可能采取倾斜照明以获得高图像对比度。

公开(公告)号：US20140299767A1

公开(公告)日：2014-10-09

申请号：US14244802

申请日：2014-04-03

Applicant: Hitachi High-Technologies Corporation

Inventor： Daisuke Bizen ,  Hajime Kawano ,  Hideyuki Kazumi

IPC: H01J37/28 ,  G01B15/00

CPC classification number: H01J37/28 ,  H01J37/244 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/2806 ,  H01J2237/281

Abstract: In an SEM provided with an ExB deflector for deflecting secondary electrons outside an optical axis of a primary electron beam between an electronic source and an object lens for condensing the primary electron beam and irradiating a sample with the beam, a unit to decelerate the secondary electrons deflected in the ExB deflector, and a magnetic generator for deflecting the decelerated secondary electron are provided, and a plurality of energy filters and detectors are arranged around the magnetic generator. That is, by separating loci of the secondary electrons incident on the energy filters and of the secondary electrons reflected at the energy filters by the magnetic generator, both of the secondary electrons are concurrently detected.

Abstract translation: 在具有ExB偏转器的SEM中，用于使电子源和物镜之间的一次电子束的光轴外侧的二次电子偏转，用于聚集一次电子束并用光束照射样品，使二次电子减速的单元 偏转在ExB偏转器中，并且设置用于使减速二次电子偏转的磁发生器，并且多个能量滤波器和检测器布置在磁发生器周围。 也就是说，通过分离入射到能量滤波器上的二次电子的位置和通过磁性发生器在能量滤波器处反射的二次电子的位置，同时检测二次电子。

公开(公告)号：US08648300B2

公开(公告)日：2014-02-11

申请号：US13939767

申请日：2013-07-11

Applicant: Hitachi High-Technologies Corporation

Inventor： Miki Isawa ,  Minoru Yamazaki ,  Yuzuru Mizuhara ,  Hiroshi Makino ,  Hideyuki Kazumi

IPC: G01N23/00 ,  G21K7/00

CPC classification number: G01N23/2258 ,  G01B2210/56 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/1508 ,  H01J2237/2448 ,  H01J2237/281 ,  H01J2237/2816

Abstract: The charged particle beam apparatus having an opening formation member formed with an opening for passage of a charged particle beam emitted from a charged particle source, and either a detector adapted to detect charged particles having passed through the passage opening or a detector adapted to detect charged particles resulting from bombardment on another member of the charged particles having passed through the opening, comprises an aligner for aligning charged particles discharged from the sample and a control unit for controlling the aligner, wherein the control unit controls the aligner to cause it to shift trajectories of the charged particles discharged from the sample so that length measurement may be executed on the basis of detection signals before and after the alignment by the aligner.

Abstract translation: 带电粒子束装置具有开口形成构件，该开口形成构件形成有用于通过从带电粒子源发射的带电粒子束的开口，以及适于检测通过通道开口的带电粒子的检测器或适于检测带电粒子的检测器 通过对通过开口的带电粒子的另一个部件进行轰击而产生的粒子包括用于对准从样品排出的带电粒子的对准器和用于控制对准器的控制单元，其中控制单元控制对准器使其移动轨迹 从样品排出的带电粒子可以根据校准器对准前后的检测信号进行长度测量。

公开(公告)号：US07838840B2

公开(公告)日：2010-11-23

申请号：US12163121

申请日：2008-06-27

Applicant: Atsushi Kobaru

Inventor： Atsushi Kobaru

IPC: H01J3/14 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/21 ,  H01J2237/21 ,  H01J2237/281 ,  H01J2237/2815

Abstract: A charged particle beam apparatus for measuring and inspecting a sample having some parts in focus and other parts out of focus in an image due to the effect of the roughness of the sample surface is disclosed, in which in order to acquire a clear image of the whole or a predetermined area in the image, the focus adjustment conditions for each point in the area to be scanned by the charged particle beam are determined in advance, and the focus adjustment conditions thus determined are applied selectively to the patterns formed under the same fabrication conditions as the sample for which the focus adjustment conditions are determined.

Abstract translation: 公开了一种带电粒子束装置，用于测量和检查由于样品表面的粗糙度的影响而在图像中具有焦点部分和其他部分焦点的样品的样品，其中为了获得样品表面的清晰图像 整个或预定区域，预先确定要由被带电粒子束扫描的区域中的每个点的焦点调整条件，并且将如此确定的聚焦调节条件选择性地施加到在相同制造下形成的图案 作为确定焦点调整条件的样本的条件。

公开(公告)号：US07642514B2

公开(公告)日：2010-01-05

申请号：US12005387

申请日：2007-12-27

Applicant: Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

Inventor： Atsushi Takane ,  Haruo Yoda ,  Hideo Todokoro ,  Fumio Mizuno ,  Shoji Yoshida ,  Mitsuji Ikeda ,  Mitsugu Sato ,  Makoto Ezumi

IPC: H01J37/21

CPC classification number: G06T5/002 ,  G06T5/003 ,  G06T5/20 ,  G06T5/50 ,  G06T7/13 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/226 ,  H01J2237/281 ,  H01J2237/2815 ,  H01J2237/2817

Abstract: It is an object of the present invention to obtain an image which is focused on all portions of a sample and to provide a charged particle beam apparatus capable of obtaining a two-dimensional image which has no blurred part over an entire sample. In order to achieve the above object, the present invention comprises means for changing a focus condition of a charged particle beam emitted from a charged particle source, a charged particle detector for detecting charged particles irradiated from a surface portion of said sample in response to the emitted charged particle beam, and means for composing a two-dimensional image of the surface portion of the sample based on signals on which said charged particle beam is focused, said signals being among signals output from the charged particle detector.

Abstract translation: 本发明的目的是获得一种聚焦于样品的所有部分的图像，并提供一种能够获得在整个样品上没有模糊部分的二维图像的带电粒子束装置。 为了实现上述目的，本发明包括用于改变从带电粒子源发射的带电粒子束的聚焦条件的装置，用于检测从所述样品的表面部分照射的带电粒子的带电粒子检测器， 发射的带电粒子束，以及用于基于所述带电粒子束聚焦的信号来组合样品的表面部分的二维图像的装置，所述信号在从带电粒子检测器输出的信号中。

公开(公告)号：US20080121799A1

公开(公告)日：2008-05-29

申请号：US11932083

申请日：2007-10-31

Applicant: Chohei Kanno ,  Hirotami Koike ,  Toru Tojo

Inventor： Chohei Kanno ,  Hirotami Koike ,  Toru Tojo

IPC: G21K5/00

CPC classification number: H01J37/28 ,  H01J37/228 ,  H01J2237/047 ,  H01J2237/21 ,  H01J2237/2808 ,  H01J2237/281

Abstract: A sample analyzing apparatus includes: an irradiation system which irradiates a charged particle onto a sample having a concave portion partially on a surface thereof; a light condensing reflecting mirror which condenses luminescence obtained from the surface based on the irradiation of the charged particle; a light detector which detects the luminescence guided to the light condensing reflecting mirror; a charged particle detector which detects the charged particle reflected from the surface of the sample as a reflection charged particle; and a signal processor which controls the irradiation system to irradiate the charged particle intermittently, which obtains a shape of the sample on the basis of a detection signal outputted from the charged particle detector, and which identifies a material of the sample on the basis of an attenuation characteristic of a detection signal outputted from the light detector in a period from a time point in which the intermittent irradiation of the charged particle by the irradiation system is ended to a time point in which the intermittent irradiation of the charged particle by the irradiation system is started.

Abstract translation: 样品分析装置包括：照射系统，其将带电粒子照射到其表面上部分地具有凹部的样品上; 聚光反射镜，其基于带电粒子的照射而凝结从表面获得的发光; 光检测器，其检测被引导到聚光反射镜的发光; 检测从样品表面反射的带电粒子作为反射带电粒子的带电粒子检测器; 以及信号处理器，其控制照射系统间歇地照射带电粒子，其基于从带电粒子检测器输出的检测信号获得样本的形状，并且基于以下方式识别样品的材料 在从照射系统的带电粒子的间歇照射的时间点到达照射系统的带电粒子的间歇照射的时间点的期间，从光检测器输出的检测信号的衰减特性 开始了

公开(公告)号：US07294835B2

公开(公告)日：2007-11-13

申请号：US11331222

申请日：2006-01-13

Applicant: Hideo Todokoro ,  Makoto Ezumi ,  Yoichi Ose ,  Naomasa Suzuki

Inventor： Hideo Todokoro ,  Makoto Ezumi ,  Yoichi Ose ,  Naomasa Suzuki

IPC: H01J37/20

CPC classification number: H01J37/244 ,  G01N23/225 ,  G01R31/307 ,  H01J37/05 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/053 ,  H01J2237/0535 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24495 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/281 ,  H01J2237/2817

Abstract: A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector.