公开(公告)号：US11842881B2

公开(公告)日：2023-12-12

申请号：US17413011

申请日：2018-12-18

申请人： Hitachi High-Tech Corporation

发明人： Akio Yamamoto ,  Kazuki Ikeda ,  Wen Li ,  Shunsuke Mizutani ,  Hiroyuki Takahashi

IPC分类号： H01J37/28 ,  H01J37/244

CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/24495 ,  H01J2237/281

摘要： A measurement device that comprises a photoelectric conversion element and a signal processing part that receives, from the photoelectric conversion element, detected pulses that include dark pulses and signal pulses that are outputted in accordance with inputted photons. The signal processing part performs amplitude discrimination on the detected pulses on the basis of a pre-acquired dark pulse amplitude distribution for the photoelectric conversion element.

公开(公告)号：US20210066033A1

公开(公告)日：2021-03-04

申请号：US16996123

申请日：2020-08-18

申请人： Hitachi High-Tech Corporation

发明人： Shinichi Murakami ,  Makoto Suzuki ,  Shunsuke Mizutani ,  Akio Yamamoto ,  Wen Li

IPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/28

摘要： Provided is a charged particle beam control device having improved signal detection accuracy. The charged particle beam control device (detection block) includes: a detector provided in a charged particle beam device, and configured to detect secondary electrons emitted from a sample by irradiating the sample with a charged particle beam and output an electric signal based on the detected secondary electrons; a signal wiring configured to transmit the electric signal; a noise detection wiring configured to detect a noise signal generated in the charged particle beam device; and an arithmetic circuit configured to generate a signal obtained by subtracting the noise signal from the electric signal.

公开(公告)号：US20220068597A1

公开(公告)日：2022-03-03

申请号：US17413011

申请日：2018-12-18

申请人： Hitachi High-Tech Corporation

发明人： Akio Yamamoto ,  Kazuki Ikeda ,  Wen Li ,  Shunsuke Mizutani ,  Hiroyuki Takahashi

IPC分类号： H01J37/28 ,  H01J37/244

摘要： A measurement device that comprises a photoelectric conversion element and a signal processing part that receives, from the photoelectric conversion element, detected pulses that include dark pulses and signal pulses that are outputted in accordance with inputted photons. The signal processing part performs amplitude discrimination on the detected pulses on the basis of a pre-acquired dark pulse amplitude distribution for the photoelectric conversion element.

公开(公告)号：US11211225B2

公开(公告)日：2021-12-28

申请号：US16996123

申请日：2020-08-18

申请人： Hitachi High-Tech Corporation

发明人： Shinichi Murakami ,  Makoto Suzuki ,  Shunsuke Mizutani ,  Akio Yamamoto ,  Wen Li

IPC分类号： H01J37/26 ,  H01J37/244 ,  H01J37/28

摘要： Provided is a charged particle beam control device having improved signal detection accuracy. The charged particle beam control device (detection block) includes: a detector provided in a charged particle beam device, and configured to detect secondary electrons emitted from a sample by irradiating the sample with a charged particle beam and output an electric signal based on the detected secondary electrons; a signal wiring configured to transmit the electric signal; a noise detection wiring configured to detect a noise signal generated in the charged particle beam device; and an arithmetic circuit configured to generate a signal obtained by subtracting the noise signal from the electric signal.

公开(公告)号：US11848171B2

公开(公告)日：2023-12-19

申请号：US17587935

申请日：2022-01-28

申请人： Hitachi High-Tech Corporation

发明人： Akio Yamamoto ,  Wen Li ,  Hiroshi Oinuma ,  Shunsuke Mizutani

IPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/22 ,  H01J37/26

CPC分类号： H01J37/244 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/2826

摘要： Provided is a charged particle beam device and a charged particle beam device calibration method capable of correcting an influence of characteristic variation and noise with high accuracy. Control units execute a first calibration of correcting a characteristic variation between a plurality of channels in detectors and signal processing circuits by using a setting value of a control parameter for each of the plurality of channels in a state in which a primary electron beam is not emitted. The control units further execute a second calibration of correcting a characteristic variation between the plurality of channels in scintillators or the like by using the setting value of the control parameter for each of the plurality of channels in a state in which the primary electron beam is emitted.