- 专利标题: Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method
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申请号: US18048414申请日: 2022-10-20
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公开(公告)号: US12087543B2公开(公告)日: 2024-09-10
- 发明人: Hiroshi Matsumoto
- 申请人: NuFlare Technology, Inc.
- 申请人地址: JP Yokohama
- 专利权人: NuFlare Technology, Inc.
- 当前专利权人: NuFlare Technology, Inc.
- 当前专利权人地址: JP Yokohama
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP 18204059 2018.10.30
- 分案原申请号: US16654155 2019.10.16
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; G03F7/00 ; H01J37/141 ; H01J37/24 ; H01J37/302 ; H01L21/027
摘要:
A multi-charged particle beam writing apparatus according to one aspect of the present invention includes a region setting unit configured to set, as an irradiation region for a beam array to be used, the region of the central portion of an irradiation region for all of multiple beams of charged particle beams implemented to be emittable by a multiple beam irradiation mechanism, and a writing mechanism, including the multiple beam irradiation mechanism, configured to write a pattern on a target object with the beam array in the region of the central portion having been set in the multiple beams implemented.
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