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    Charged particle source
    1.
    发明授权
    Charged particle source 有权

    公开(公告)号：US10468227B2

    公开(公告)日：2019-11-05

    申请号：US16042871

    申请日：2018-07-23

    Applicant: Hermes Microvision, Inc.

    Inventor： Shuai Li

    IPC: H01J37/143 ,  H01J37/28 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/14 ,  H01J37/09

    Abstract: This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

    Apparatus of Plural Charged-Particle Beams
    4.
    发明申请
    Apparatus of Plural Charged-Particle Beams 有权
    多次充电粒子束装置

    公开(公告)号：US20160336142A1

    公开(公告)日：2016-11-17

    申请号：US15150858

    申请日：2016-05-10

    Applicant: Hermes Microvision Inc.

    Inventor： Xuedong Liu ,  Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/147 ,  H01J37/20 ,  H01J37/06 ,  H01J37/10 ,  H01J37/28 ,  H01J37/22

    CPC classification number: H01J37/147 ,  H01J37/04 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/061 ,  H01J2237/083 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/2817

    Abstract: One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

    Abstract translation: 提出了一种改进的源转换单元和一种减少多光束装置中的库仑效应的方法。 在修改的源转换单元中，在图像形成功能使每个子束在局部变化之后进行像差补偿功能，因此避免了由于子束倾斜/移位引起的不期望的像差。 具有多个库仑效应还原开口的库仑效应降低装置放置在靠近设备的单个电子源的位置，因此可以尽可能早地切断未使用的电子。

    Energy filter for charged particle beam apparatus
    5.
    发明授权
    Energy filter for charged particle beam apparatus 有权
    带电粒子束装置的能量过滤器

    公开(公告)号：US09384936B2

    公开(公告)日：2016-07-05

    申请号：US14800098

    申请日：2015-07-15

    Applicant: Hermes Microvision Inc.

    Inventor： Weiming Ren ,  Joe Wang ,  Shuai Li ,  Zhongwei Chen

    IPC: G01T1/20 ,  H01J37/05 ,  H01J37/10 ,  H01J37/28 ,  H01J37/12 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

    Abstract: This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.

    Abstract translation: 本发明提供了两种用于利用带电粒子束的反射型能量滤波器来改善能量鉴别检测装置的性能的方法。 第一种方法采用光束调节装置来提高能量鉴别能力，而第二种方法使用电子倍增装置来增强图像信号而没有噪声提高。 具有这种改进的能量鉴别检测装置的LVSEM可以在样本表面上提供用于多种应用目的的感兴趣特征的变体高对比度图像。

    Method for improving performance of an energy filter
    6.
    发明授权
    Method for improving performance of an energy filter 有权
    改善能量过滤器性能的方法

    公开(公告)号：US09048062B1

    公开(公告)日：2015-06-02

    申请号：US14611741

    申请日：2015-02-02

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/12

    CPC classification number: H01J37/12 ,  H01J37/05 ,  H01J2237/04924 ,  H01J2237/0535 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/28

    Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

    Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

    Apparatus of plural charged-particle beams
    7.
    发明授权
    Apparatus of plural charged-particle beams 有权

    公开(公告)号：US10109456B2

    公开(公告)日：2018-10-23

    申请号：US15633639

    申请日：2017-06-26

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Xuedong Liu ,  Zhongwei Chen

    IPC: H01J37/28 ,  H01J37/147 ,  H01J37/12

    Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

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