公开(公告)号：US20240242923A1

公开(公告)日：2024-07-18

申请号：US18559439

申请日：2021-05-13

申请人： Hitachi High-Tech Corporation

发明人： Michiko SUZUKI ,  Yudai KUBO

IPC分类号： H01J37/153 ,  H01J37/143 ,  H01J37/28

CPC分类号： H01J37/153 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/1534

摘要： An object of the invention is to efficiently execute aberration correction in an electron microscope including an aberration corrector that corrects aberration using a multipole lens. The electron microscope according to the invention includes an aberration corrector that includes first and second multipole lenses, a transfer lens, and an adjustment lens, in which the first multipole lens is configured to correct third-order spherical aberration by adjusting a lens current, and third-order spherical aberration and fifth-order spherical aberration are collectively corrected by adjusting a transfer lens current while changing an adjustment lens current.

公开(公告)号：US20220199354A1

公开(公告)日：2022-06-23

申请号：US17127749

申请日：2020-12-18

申请人： FEI Company

发明人： Lubomír Tuma

IPC分类号： H01J37/143 ,  H01J37/20 ,  H01J37/21

摘要： A charged particle beam system can include a vacuum chamber, a specimen holder for holding a specimen within the vacuum chamber, and a charged particle column. The charged particle column can include a charged particle source for producing a beam of charged particles along an optical axis and a magnetic immersion lens for focusing the beam of charged particles. The magnetic immersion lens can include a first lens pole disposed adjacent a first surface of the specimen, an excitation coil surrounding the first lens pole, and a counterpole disposed adjacent a second surface of the specimen, the counterpole including one or more magnets disposed on the counterpole.

公开(公告)号：US10032600B2

公开(公告)日：2018-07-24

申请号：US15404618

申请日：2017-01-12

申请人： Hermes Microvision Inc.

发明人： Shuai Li

IPC分类号： H01J37/143 ,  H01J37/28 ,  H01J3/20 ,  H01J37/09

摘要： This invention provides a charged particle source, which comprises an emitter and means for generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

公开(公告)号：US08445862B2

公开(公告)日：2013-05-21

申请号：US12968221

申请日：2010-12-14

申请人： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

发明人： Zhongwei Chen ,  Weiming Ren ,  Kenichi Kanai ,  Xuedong Liu

IPC分类号： H01J37/143

CPC分类号： H01J37/141 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/1534

摘要： An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.

摘要翻译： 设备基本上使用简单紧凑的多轴磁性透镜来同时将多个带电粒子束中的每一个聚焦在样品表面上。 在多轴磁性透镜的每个子透镜模块中，两个磁环分别插入具有非磁性径向间隙的上孔和下孔中。 每个间隙尺寸足够小以保持足够的磁耦合并且足够大以在靠近其光轴的空间中获得足够的磁标势电位分布的轴向对称性。 该方法同时消除了每个子透镜中的非轴对称横向场和所有子透镜之间的圆透镜场差; 都存在于传统的多轴磁性透镜中。 在该装置中，使用一些额外的磁屏蔽措施，例如磁屏蔽管，板和房子来消除带电粒子路径上从每个带电粒子源到每个子透镜的入口和从出口的入口处的非轴对称横向场 每个子透镜到样品表面。

公开(公告)号：US4639597A

公开(公告)日：1987-01-27

申请号：US663855

申请日：1984-10-23

申请人： Yoshiro Shiokawa

发明人： Yoshiro Shiokawa

IPC分类号： G01N23/227 ,  H01J37/10 ,  H01J37/143 ,  H01J37/145 ,  H01J37/252 ,  H01J49/08 ,  H01J49/48

CPC分类号： H01J37/252 ,  H01J49/08 ,  H01J49/482

摘要： In an Auger electron spectrometer for use in analyzing a surface of an object by the use of Auger electrons resulting from impingement of an electron beam, an electron gun comprises an electron beam source for generating the electron beam and an electron lens system for guiding the electron beam towards the surface. The electron lens system comprises a combination of a condenser lens and a permanent magnet member nearer to the surface than the condenser lens. The permanent magnet member may comprise either a plurality of permanent magnet pieces radially and azimuthally spaced apart from one another or a single permanent magnet piece. An ion gun may be disposed in the vicinity of the electron gun to generate an ion beam oblique to the electron beam and substantially concurrent with the electron beam on the surface. Magnetic pole pieces may be attached to each permanent magnet piece and bypassed to control a magnetic field generated by each permanent magnet piece. Each permanent magnet piece may be coated with a combination of a nonmagnetic film and a magnetic film. Anyway, the electron gun can be disposed in an inner cylindrical space of an inner cylindrical electrode member when the electron spectrometer is of a cylindrical mirror type.

摘要翻译： 在用于通过使用由电子束撞击产生的俄歇电子来分析物体表面的俄歇电子能谱仪中，电子枪包括用于产生电子束的电子束源和用于引导电子的电子透镜系统 朝向表面。 电子透镜系统包括聚光透镜和比聚光透镜更靠近表面的永磁体构件的组合。 永磁体构件可以包括彼此径向和方位间隔开的多个永磁体片或单个永磁体片。 离子枪可以设置在电子枪的附近，以产生与电子束倾斜的离子束，并且基本上与表面上的电子束同时存在。 磁极片可以附接到每个永磁体片上并被旁路以控制由每个永磁体片产生的磁场。 每个永磁体片可以涂覆有非磁性膜和磁性膜的组合。 无论如何，当电子光谱仪是圆柱形反射镜类型时，电子枪可以设置在内圆柱形电极部件的内圆柱形空间中。

公开(公告)号：US3812365A

公开(公告)日：1974-05-21

申请号：US33988173

申请日：1973-03-09

申请人： LEPOOLE J

发明人： LEPOOLE J

IPC分类号： H01J37/14 ,  H01J37/143 ,  H01J37/00

CPC分类号： H01J37/14 ,  H01J37/143

摘要： A magnetic lens system, in particular for an electron microscope, comprising two thin small disc magnets, provided with small openings and magnetized axially in opposite directions, which are united straight into an electron-optic achromatic as well as rotation-free and distortionfree system that forms lens fields, at a distance that is practically equal to the diameter of the small openings.

公开(公告)号：US2804548A

公开(公告)日：1957-08-27

申请号：US26729452

申请日：1952-01-19

申请人： SIEMENS AG

发明人： ERNST RUSKA

IPC分类号： H01J37/143

CPC分类号： H01J37/143 ,  H01J2893/0018

公开(公告)号：US20240212969A1

公开(公告)日：2024-06-27

申请号：US18288405

申请日：2022-04-19

申请人： NIKON CORPORATION

发明人： Takakuni GOTO ,  Motofusa ISHIKAWA ,  Baku OGASAWARA ,  Shunta KUSU ,  Yuta KOMATSU ,  Tomoya UCHIDA

IPC分类号： H01J37/145 ,  H01J37/141 ,  H01J37/143 ,  H01J37/147

CPC分类号： H01J37/145 ,  H01J37/141 ,  H01J37/143 ,  H01J37/1472

摘要： A charged particle optical system includes a permanent magnetic lens disposed closer to an object than a central point between a charged particle beam source and the object in an optical axis direction of the charged particle optical system, an electromagnetic lens disposed such that a position of at least a part of the electromagnetic lens overlaps the permanent magnetic lens in the optical axis direction of the charged particle optical system, and an electrostatic lens disposed such that a position of at least a part of the electrostatic lens overlaps at least one of the permanent magnetic lens and the electromagnetic lens in the optical axis direction of the charged particle optical system.

公开(公告)号：US20240021403A1

公开(公告)日：2024-01-18

申请号：US18344720

申请日：2023-06-29

申请人： IMS Nanofabrication GmbH

发明人： Dietmar Puchberger ,  Johannes Leitner ,  Patrick Mayrhofer

IPC分类号： H01J37/141 ,  H01J37/143 ,  H01J37/317

CPC分类号： H01J37/141 ,  H01J37/143 ,  H01J37/3177 ,  H01J2237/1415

摘要： A fine-adjustable charged particle lens comprises a magnetic circuit assembly including permanent magnets and a yoke body, surrounding a beam passage extending along the longitudinal axis. The permanent magnet is arranged between an inner yoke component and an outer yoke component so as to form a magnetic circuit having at least two gaps, generating a magnetic field reaching inwards into the beam passage, into which a sleeve insert having electrostatic electrodes can be inserted, which may also generate an electric field spatially overlapping said magnetic field. In order to modify the magnetic flux and thus the magnetic field in the gaps, a thermal control element located in the yoke body introduces or extracts heat to or from components of the of the magnetic circuit assembly so as to thermally control or modulate the magnetic behavior of said components.

公开(公告)号：US20200013579A1

公开(公告)日：2020-01-09

申请号：US16450242

申请日：2019-06-24

申请人： KLA-Tencor Corporation

发明人： Christopher Sears

IPC分类号： H01J37/143 ,  H01J37/28

摘要： A magnetically microfocused electron emission source apparatus is disclosed. The apparatus may include a magnetic emitter unit, wherein the magnetic emitter unit comprises an emitter. Further, the magnetic emitter unit may include one or more magnetic portions formed from one or more magnetic materials, wherein the one or more magnetic portions of the magnetic emitter unit are configured to generate a magnetic field proximate to a tip of the emitter of the magnetic emitter unit for enhancing focusing of the emitted electrons from the electron emitter.