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公开(公告)号：US20240339286A1
公开(公告)日：2024-10-10
申请号：US18747216
申请日：2024-06-18
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
CPC分类号： H01J37/023 , H01J37/28 , H01J2237/20221 , H01J2237/20264 , H01J2237/20278 , H01J2237/2802
摘要： A positioning system, can include a control unit including a shear signal generator that can generate a modified shear element drive signal. The modified shear element drive signal can include an initial shear element drive signal and a compensation signal.
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公开(公告)号：US12057286B2
公开(公告)日：2024-08-06
申请号：US18084430
申请日：2022-12-19
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
CPC分类号： H01J37/023 , H01J37/28 , H01J2237/20221 , H01J2237/20264 , H01J2237/20278 , H01J2237/2802
摘要： A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.
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公开(公告)号：US11538652B2
公开(公告)日：2022-12-27
申请号：US16686011
申请日：2019-11-15
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
摘要： To compensate for hysteresis in an actuator, a path between a first position and a second position can be selected, and a drive signal can be applied to an actuator element that includes a hysteresis-compensated portion to move an object along the selected path.
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公开(公告)号：US20230101676A1
公开(公告)日：2023-03-30
申请号：US18059585
申请日：2022-11-29
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
摘要： A positioning system can include a drive unit having an actuator element and a control system. The actuator element can include a piezoelectric material. The control system can be configured to select a path between a first position and a second position, identify at least one change of direction of the actuator element along the selected path, generate a hysteresis-compensated drive signal based at least in part on the change in direction, and apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.
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公开(公告)号：US11562877B2
公开(公告)日：2023-01-24
申请号：US16685897
申请日：2019-11-15
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
摘要： A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element. A first displacement of the mover element can be determined. A first compensation signal to be applied to one or more drive unit shear elements can be determined based at least in part on the first displacement. The first compensation signal can be applied to the one or more drive unit shear elements and the clamp element drive signal can be applied to the drive unit clamp element. A second displacement can be determined in response to the application of the first compensation signal and the clamp element drive signal. The second displacement can then be compared to a preselected threshold. For a second displacement less than the preselected threshold, combining the first compensation signal with an initial shear element drive signal to produce a modified shear element drive signal, and for a second displacement greater than the preselected threshold, determining a second compensation signal to be applied to the one or more drive unit shear elements.
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公开(公告)号：US20230120177A1
公开(公告)日：2023-04-20
申请号：US18084430
申请日：2022-12-19
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
摘要： A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.
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公开(公告)号：US20210151277A1
公开(公告)日：2021-05-20
申请号：US16686011
申请日：2019-11-15
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
摘要： To compensate for hysteresis in an actuator, a path between a first position and a second position can be selected, and a drive signal can be applied to an actuator element that includes a hysteresis-compensated portion to move an object along the selected path.
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公开(公告)号：US20210151276A1
公开(公告)日：2021-05-20
申请号：US16685897
申请日：2019-11-15
申请人： FEI Company
发明人： Edwin Verschueren , Paul Tacx
摘要： A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element. A first displacement of the mover element can be determined. A first compensation signal to be applied to one or more drive unit shear elements can be determined based at least in part on the first displacement. The first compensation signal can be applied to the one or more drive unit shear elements and the clamp element drive signal can be applied to the drive unit clamp element. A second displacement can be determined in response to the application of the first compensation signal and the clamp element drive signal. The second displacement can then be compared to a preselected threshold. For a second displacement less than the preselected threshold, combining the first compensation signal with an initial shear element drive signal to produce a modified shear element drive signal, and for a second displacement greater than the preselected threshold, determining a second compensation signal to be applied to the one or more drive unit shear elements.
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