公开(公告)号：US20150170876A1

公开(公告)日：2015-06-18

申请号：US14574179

申请日：2014-12-17

申请人： FEI Company

发明人： Bart Jozef Janssen ,  Gijs van Duinen ,  Uwe Luecken ,  Ross Savage ,  Stephanus H.L. van den Boom ,  Ivan Lazic

IPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/265 ,  H01J37/295 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/226 ,  H01J2237/24507 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2806

摘要： A method of investigating a wavefront of a charged-particle beam that is directed from a source through an illuminator so as to traverse a sample plane and land upon a detector, an output of the detector being used in combination with a mathematical reconstruction technique so as to calculate at least one of phase information and amplitude information for the wavefront at a pre-defined location along its path to the detector, in which method: Said beam is caused to traverse a particle-optical lens system disposed between said sample plane and said detector; At a selected location in the path from said source to said detector, a modulator is used to locally produce a given modulation of the wavefront; In a series of measurement sessions, different such modulations are employed, and the associated detector outputs are collectively used in said mathematical reconstruction.

摘要翻译： 一种调查带电粒子束的波前的方法，该波前从源通过照明器引导以遍历采样平面并落在检测器上，检测器的输出与数学重建技术结合使用，以便 沿着其到达检测器的路径的预定位置处计算波前的相位信息和幅度信息中的至少一个，其中：所述光束被穿过设置在所述样品平面和所述检测器之间的粒子 - 光学透镜系统 探测器; 在从所述源到所述检测器的路径中的选定位置处，使用调制器来本地产生波前的给定调制; 在一系列测量会话中，使用不同的这种调制，并且相关联的检测器输出在所述数学重建中被统一使用。

公开(公告)号：US09202670B2

公开(公告)日：2015-12-01

申请号：US14574179

申请日：2014-12-17

申请人： FEI Company

发明人： Bart Jozef Janssen ,  Gijs van Duinen ,  Uwe Luecken ,  Ross Savage ,  Stephanus H.L. van den Boom ,  Ivan Lazic

IPC分类号： G21K5/04 ,  H01J37/28 ,  H01J37/26 ,  H01J37/20 ,  H01J37/244 ,  H01J37/295

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/265 ,  H01J37/295 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/226 ,  H01J2237/24507 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2806

摘要： A method of investigating a wavefront of a charged-particle beam that is directed from a source through an illuminator so as to traverse a sample plane and land upon a detector, an output of the detector being used in combination with a mathematical reconstruction technique so as to calculate at least one of phase information and amplitude information for the wavefront at a pre-defined location along its path to the detector, in which method: Said beam is caused to traverse a particle-optical lens system disposed between said sample plane and said detector; At a selected location in the path from said source to said detector, a modulator is used to locally produce a given modulation of the wavefront; In a series of measurement sessions, different such modulations are employed, and the associated detector outputs are collectively used in said mathematical reconstruction.

摘要翻译： 一种调查带电粒子束的波前的方法，该波前从源通过照明器引导以遍历采样平面并落在检测器上，检测器的输出与数学重建技术结合使用，以便 沿着其到达检测器的路径的预定位置处计算波前的相位信息和幅度信息中的至少一个，其中：所述光束被穿过设置在所述样品平面和所述检测器之间的粒子 - 光学透镜系统 探测器; 在从所述源到所述检测器的路径中的选定位置处，使用调制器来本地产生波前的给定调制; 在一系列测量会话中，使用不同的这种调制，并且相关联的检测器输出在所述数学重建中被统一使用。