Invention Application
- Patent Title: Method for Electron Tomography
- Patent Title (中): 电子层析成像方法
-
Application No.: US14298919Application Date: 2014-06-07
-
Publication No.: US20150069231A1Publication Date: 2015-03-12
- Inventor: Uwe Luecken , Remco Schoenmakers , Johannes Antonius Maria van den Oetelaar
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Priority: EP13170871.1 20130606
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/28 ; H01J37/22

Abstract:
The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.
Public/Granted literature
- US09147551B2 Method for electron tomography Public/Granted day:2015-09-29
Information query