公开(公告)号：US10014158B1

公开(公告)日：2018-07-03

申请号：US15590857

申请日：2017-05-09

申请人： FEI Company

发明人： Bart Jozef Janssen ,  Auke van der Heide ,  Henricus Gerardus Roeven ,  Jacobus Adrianus Maria Thomassen

IPC分类号： H01J37/22 ,  H01J37/20 ,  H01J37/26

CPC分类号： H01J37/222 ,  G06T5/50 ,  G06T2207/10061 ,  G06T2207/20192 ,  G06T2207/20221 ,  H01J37/20 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/221

摘要： A method of using a charged particle microscope comprising a source; a specimen holder, for holding a specimen; an illuminator, for irradiating the specimen; a detector; and a controller, for controlling at least some aspects of the microscope's operation. The method comprises the steps of using the detector to acquire a series of component images of a part of the specimen; then successively quantizing each component image and storing it in a memory; recording a quantization error per pixel for each quantized component image, and keeping a running tally of cumulative quantization errors per pixel for the quantized component images; when quantizing a next component image, choosing a quantization polarity for each pixel that will avoid further increasing the total quantization error for each pixel. Finally, combining the component images to assemble a composite image.